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Microsystem Technologies
Erschienen in: Microsystem Technologies 9/2011

01.09.2011 | Technical Paper

A parameter identification method for thermal flying-height control sliders

verfasst von: Gang Sheng, Jianfeng Xu

Erschienen in: Microsystem Technologies | Ausgabe 9/2011

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Abstract

This paper employs higher order frequency response functions to describe the closed-form solution of nonlinear dynamics of MEMS thermal actuated flying-height control (TFC) slider, and employs the measured acoustic emission signal of a TFC slider during touch down as its vibration approximation to correlate with the derived closed-form solution for parameter identification. It is shown that during slider touchdown when heater power is increased gradually, the slider performs weak nonlinear vibrations in early transition phase, and exhibits linear vibration in the following steady sliding phase. These results are useful for the clarification of complicated dynamics and the designs of active sliders in sub-nanometer clearance regime.
Nächster Artikel Review of MEMS flow sensors based on artificial hair cell sensor

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Metadaten
Titel
A parameter identification method for thermal flying-height control sliders
verfasst von
Gang Sheng
Jianfeng Xu
Publikationsdatum
01.09.2011
Verlag
Springer-Verlag
Erschienen in
Microsystem Technologies / Ausgabe 9/2011
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-011-1335-6

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