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Erschienen in: Journal of Materials Science 5/2016

01.03.2016 | Original Paper

Room-temperature and fast response hydrogen sensor based on annealed nanoporous palladium film

verfasst von: Mengmeng Hao, Shuanghong Wu, Han Zhou, Wenbin Ye, Xiongbang Wei, Xiangru Wang, Zhi Chen, Shibin Li

Erschienen in: Journal of Materials Science | Ausgabe 5/2016

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Abstract

Hydrogen sensor based on nanoporous palladium film with a short response time at room temperature has been investigated. Nanoporous palladium film was deposited on treated porous anodic aluminum oxide template by DC magnetron sputtering. We have researched the detection performance of the hydrogen sensor depending on different post-deposition annealing temperatures ranging from 150 to 400 °C. In this sensor, we obtained a sensor response time as short as 30 s at 1 % hydrogen concentration with an anneal temperature of 200 °C. The sensor exhibited good performance under hydrogen concentrations from 0.1 to 1 %.

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Metadaten
Titel
Room-temperature and fast response hydrogen sensor based on annealed nanoporous palladium film
verfasst von
Mengmeng Hao
Shuanghong Wu
Han Zhou
Wenbin Ye
Xiongbang Wei
Xiangru Wang
Zhi Chen
Shibin Li
Publikationsdatum
01.03.2016
Verlag
Springer US
Erschienen in
Journal of Materials Science / Ausgabe 5/2016
Print ISSN: 0022-2461
Elektronische ISSN: 1573-4803
DOI
https://doi.org/10.1007/s10853-015-9555-2

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