Background
Theoretical background
Removal rate of polishing
Removal amount of polishing path
Removal function at a fixed point
Methods
Scan line polishing path
Removal function of single line polishing path
Removal function of scan line polishing path
Archimedean spiral polishing path
Modeling of Archimedean spiral polishing path
Removal function of Archimedean spiral polishing path
Hilbert fractal polishing path
Fractal curve
Modeling of Hilbert fractal polishing path
Freeform surface polishing modeling
Natural coordinate expression of freeform surface path
Modeling of polishing path on the Bézier freeform surface
Results and discussion
Simulation
Scan line polishing path
Archimedean spiral polishing path
Hilbert fractal polishing path
Experiment
Polishing | Uniformity | Isotropy | Motion | Comprehensive |
---|---|---|---|---|
type | control | review | ||
Scan line | Bad | Bad | Easy | Easy control, low polishing quality |
Archimedean spiral | Bad | General | Hard | Hard control, general polishing quality |
Hilbert curve | Good | Good | General | Easy control, high polishing quality |