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Erschienen in:
2008 | OriginalPaper | Buchkapitel
Micro Assembly Technology and System
verfasst von : R. Du, Candy X. Y. Tang, D. L. Zhang
Erschienen in: Smart Devices and Machines for Advanced Manufacturing
Verlag: Springer London
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Micro assembly refers to assembling micro size objects, such as integrated electronic circuits, micro mechanical components, and micro fluidic components. These objects are usually no bigger than 10 mm. Moreover, high accuracy (
e.g.
1 µm) and high speed (
e.g.
1 m/sec. or 10 m/sec
2
) are often required. In general, a micro assembly system is made of two parts: grasping and positioning. This chapter gives a review on the newly developed technologies with a focus on our own research. For grasping, it includes pneumatic grippers, capillary force grippers, and bio-inspired grippers. For positioning, it includes servomotors, linear motors and piezoelectric motors. Force feedback controls and image based feedback controls are also discussed. A practical micro assembly system is included.