3. Micro-/Nanointegrated Fabrication Technique for Flexible Materials

In Chap. 2, we introduce a mass-production Si-based micro-/nanointegrated fabrication technique, which is simple, cost-efficient, and compatible with CMOS process. The fabricated samples show two important properties of wide-band anti-reflectance and stable super-hydrophobicity; thus, this novel Si-based micro-/nanointegrated fabrication technique has the attractive application potential. However, silicon is fragile and bio-incompatible, which hinds the further application of this technique in biomedical field. Therefore, we extend this micro-/nanointegrated fabrication technique from silicon to flexible materials, especially for biocompatible flexible materials, and then, a universal micro-/nanointegrated fabrication technology suitable for many materials is developed.