Microelectrical Mechanical Systems Actuator Array for Tactile Communication

Tactile perception of alpha-numerics is possible using a tactile illusion (TI). The illusory sensation of motion is produced by mechanical actuators applying points of pressure on the skin. Vibrating points induce a nonveridical perception of motion from point to point. Intact lemniscal and parietal cortex are necessary for perception of the TI and can be used as a neurophysiological testing tool and an additional human-machine communication channel. We describe a 4 x 5 actuator array of individual vibrating pixels for fingertip tactile communication. The array utilizes novel micro-clutch MEMS technology. Individual pixels are turned ON and OFF by pairs of microscopic thermal actuators, while the main vibration is generated by a vibrating piezo-electric plate. Physiological parameters required for inducing TI and the fabrication sequence for the thermal micro-actuators along with actuation results are presented. Fingertip perception of micro-actuators could be built into a variety of data acquisition interfaces for handicapped persons.