Skip to main content
Fachgebiete
Automobil + Motoren Bauwesen + Immobilien Business IT + Informatik Elektrotechnik + Elektronik Energie + Nachhaltigkeit Finance + Banking Management + Führung Marketing + Vertrieb Maschinenbau + Werkstoffe Versicherung + Risiko
DE
EN
Themenseiten
Organisationspsychologie Projektmanagement Marketing Smart Manufacturing
Bücher
Zeitschriften
Weitere Formate
Podcasts Webinare Technik Webinare Wirtschaft Kongresse Veranstaltungskalender Awards
Jetzt Einzelzugang starten
Zugang für Unternehmen
Referenzkunden
MTZ-Fachkongress

Antriebe und Energiesysteme von morgen


Austausch von Automobil- und Energiewirtschaft

Am 14./15. Mai geht es in Chemnitz um die Mobilitätswende durch Elektro- und Wasserstofffahrzeuge.
Erweiterte Suche
Anmelden
nach oben
Erschienen in:
Introduction to Radio Frequency Micro Electromechanical Systems Kapitel lesen Erstes Kapitel lesen

2022 | OriginalPaper | Buchkapitel

6. Micromachined Phase Shifters

verfasst von : Shiban Kishen Koul, Sukomal Dey

Erschienen in: Micromachined Circuits and Devices

Verlag: Springer Singapore

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

A radio frequency micromachined based phase shifter is one of the key components in a modern electronically steerable phased array for satellite communication, radar systems and high precision instrumentation. The phase shifter controls the signal phase to steer the direction of the beam. MEMS technology provides a superior performance in terms of low loss, low power consumption and excellent linearity compared to other technologies. MEMS based digital phase shifters provide a large phase shift and low sensitivity to electrical noise with a high tuning ratio compared to analog versions. This Chapter describes different types of TTD phase shifters utilizing MEMS switches and MEMS varactors. A gold-based surface micromachining process is used to develop different kinds of MEMS phase shifters on alumina (εr = 9.8) substrates. All phase shifters are implemented using coplanar waveguide (CPW) transmission lines and actuated by electrostatic actuations. These include the analog type Distributed MEMS Transmission Line (DMTL) phase shifter using push–pull actuation, a 5-bit DMTL phase shifter using MEMS bridge and a fixed capacitor, 5-bit switched line phase shifter using DC-contact MEMS switches and a 2-bit & 5-bit phase shifter using MEMS SP4T and SPDT switches. This Chapter includes details on the design, development, and characterization of MEMS phase shifters. Furthermore, all experimental results are validated with a circuit analysis and full-wave EM simulation.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Jetzt informieren
Vorheriges Kapitel Micromachined Resonators and Circuits
Nächstes Kapitel Micromachined Tunable Filters Using MEMS Switches
Literatur
1.
Koul SK, Bhat B (1991) Microwave and millimeter wave phase shifter, vol II. Artech House, Norwood, MA
2.
Rebeiz GM (2003) RF MEMS theory, design, and technology. Wiley, Hoboken, NJCrossRef
3.
Zhang WM, Hsia RP, Liang C, Song G, Domier CW, Luhmann NC Jr (1996) Novel low-loss delay line for broadband phased antenna array applications. IEEE Microw Guid Wave Lett 6:395–397CrossRef
4.
Dey S, Koul SK (2012) Design and development of a surface micro-machined push-pull-type true-time-delay phase shifter on an alumina substrate for Ka-band T/R module application. J Micromech Microeng 22:125006–125025CrossRef
5.
Dey S, Koul SK (2014) Design and development of a CPW-based 5-bit switched-line phase shifter using inline metal contact MEMS series switches for 17.25 GHz transmit/receive module application. J Micromech Microeng 24:1–24
6.
Simons RN (2001) Coplanar waveguide circuits, components, and systems. Wiley, New YorkCrossRef
7.
Norvell BR, Hancock RJ, Smith JK, Pugh ML, Theis SW, Kviatkofsky J (1999) Micro electro mechanical switch (MEMS) technology applied to electronically scanned arrays for spaced based radar. In: Proceedings of the aerospace conference, pp 239–247
8.
Koul SK, Bhat B (1991) Microwave and millimeter wave phase shifter, vol II. Artech House, Norwood, MA
9.
Parker D, Zimmermann D (2002) Phased arrays—Part I: theory and architectures. IEEE Trans Microw Theory Tech 50(3):678–687CrossRef
10.
Kang DW, Lee HD, Kim CH, Hong S (2006) Ku-band MMIC phase shifter using a parallel resonator with 0.18 µm CMOS technology. IEEE Trans Microw Theory Tech 54(1):294–301CrossRef
11.
Kwang-Jin K, Rebeiz GM (2007) 0.13 µm CMOS phase shifters for X-, Ku-, and K-band phased arrays. IEEE J Solid-State Circ 42(11):2535–2546CrossRef
12.
Min B, Rebeiz GM (2008) Single-ended and differential–Band BiCMOS phased array front-ends. IEEE J Solid-State Circ 43(10):2239–2250CrossRef
13.
Koh K-J, Rebeiz GM (2010) A 6–18 GHz 5-bit active phase shifter. In: IEEE MTT-S international microwave symposium on digest. Montreal, Anaheim, CA, pp 792–795
14.
Choi JY, Cho M-K, Baek D, Kim J-G (2013) A 5–20 GHz 5-bit true time delay circuit in 0.18 μm CMOS technology. J Semicond Tech Sci 13(3):193–197
15.
Liang C, Xinyu C, Youtao Z, Zhiqun L, Lei Y (2015) A high linearity X-band SOI CMOS digitally-controlled phase shifter. J. Semicond 36(6):1–8
16.
Lucyszyn S (2010) Advanced RF MEMS. Cambridge University Press
17.
Liu AQ (2010) RF MEMS switches and integrated switching circuits. Springer, New YorkCrossRef
18.
Tan G-L, Mihailovich R, Hacker J, DeNatale J, Rebeiz GM (2003) Low-loss 2- and 4-bit TTD MEMS phase shifters based on SP4T switches. IEEE Trans Microw Theory Tech 51(1):297–304CrossRef
19.
Jian Z, Weil Y-Y, Chen C, Yong Z, Le L (2006) A Compact 5-bit switched-line digital MEMS phase shifter. In: IEEE international conference on nano/micro engineered and molecular systems, pp 623–626
20.
Nordquist CD, Dyck CW, Kraus GM, Sullivan CT, Austin F, Finnegan PS, Balance MH (2008) Ku-band six-bit RF MEMS time delay network. In: Compound semiconductor integrated circuits symposium, 2008. CSIC ‘08. IEEE
21.
Mortonand MA, Papapolymerou J (2008)A packaged MEMS-based 5-bit X-band high-pass/low-pass phase shifter. In IEEE Trans Microw Theory Tech 56(9):2025–2031
22.
Wallace J, Redd H, Furlow R (1999) Low cost MMIC DBS chip sets for phased array applications. In: IEEE MTT-S international microwave symposium digest, Anaheim, CA, pp 677–680
23.
Pillans B, Coryell L, Malczewski A, Moody C, Morris F, Brown A (2012) Advances in RF MEMS phase shifters from 15 to 35 GHz. In: IEEE MTT-S international microwave symposium on digest. Montreal, QC, Canada, pp 1–3
24.
Unlu M, Demir S, Akin T (2013) A 15–40 GHz frequency reconfigurable RF MEMS phase shifter. IEEE Trans Microw Theory Tech 61(8):2397–2402CrossRef
25.
Dey S, Koul SK (2014) Design, development and characterization of an x-band 5 bit DMTL phase shifter using an inline MEMS bridge and MAM capacitors. J Micromech Microeng 24(1):15
26.
Dey S, Koul SK, Poddar A, Rodhe U (2018) Reliable and compact 3-Bit and 4-bit phase shifters using MEMS SP4T and SP8T switches. J Microelectromech Syst 27(1):113–124CrossRef
27.
Rebeiz GM, Theory RFMEMS (2003) Design, and technology. Wiley, Hoboken, NJ
28.
Schindler MJ, Miller MF (1988) A 3-bit K/Ka band MMIC phase shifter. In: IEEE MTT-S international microwave symposium digest, pp 95–98
29.
Taniguchi E, Hieda M, Kurusu H, Funada M, Iyama Y, Takagi T (1999) A Kuband matched embedded-FET phase shifter. In: 29th European microwave conference, Munich, Germany, pp 357–360
30.
Morton MA, Papapolymerou J (2008) A packaged MEMS-based 5-bit X-band high-pass/low-pass phase shifter. IEEE Trans Microw Theory Tech 56(9):2025–2031CrossRef
31.
Koul SK, Dey S (2018) MEMS K-band 4-bit phase shifter using two back-to-back SP16T switching networks. IEEE J Microelectromech Syst 27(4):643–655CrossRef
32.
Choi JY, Cho M-K, Baek D, Kim J-G (2013) A 5–20 GHz 5-bit true time delay circuit in 0.18 μm CMOS technology. J Semicond Tech Sci 13(3):193–19
33.
Tan G-L, Mihailovich R, Hacker J, DeNatale J, Rebeiz GM (2003) 4-bit miniature X-band MEMS phase shifter using switched-LC networks. In: IEEE MTT-S international microwave symposium, vol 3, Philadelphia, PA, pp 1477–1480
34.
Chen C-L, Courtney WE, Mahoney LJ, Manfra MJ, Chu A, Atwater HA (1987) A low-loss Ku-band monolithic analog phase shifter. IEEE Trans Microw Theory Tech 35(3):315–320CrossRef
35.
Rizk JB, Rebeiz GM (2003) W-band microstrip RF-MEMS switches and phase shifters. In: 2003 IEEE MTT-S international microwave symposium, pp 1485–1488
36.
Rizk JB, Rebeiz GM (2003) W-band CPW RF MEMS circuits on quartz substrates. IEEE Trans Microw Theory Tech 51(7):1857–1862CrossRef
37.
Barker NS, Rebeiz GM (2003) Optimization of distributed MEMS transmission-line phase shifters-U-band and W-band designs. IEEE Trans Microw Theory Tech, part 1 48(11):1957–1966
38.
Farinelli P, Margesin B, Giacomozzi F, Rantakari P, Vaha-Heikkila T (2007) Continuously tunable millimeter wave MEMS phase shifter. In: International joint conference of the 8th MINT millimeter-wave international symposium (MINT-MIS2007), the 9th topical symposium on millimetre waves (TSMMW2007), and millilab workshop on millimetre-wave technology and applications, Seoul Korea
39.
Mahameed R, Rebeiz GM (2010) A high-power temperature stable electrostatic RF MEMS capacitive switch based on thermal buckle-beam design. J Microelectromech Syst 19(4):816–826CrossRef
40.
Muller S, Scheele P, Weil C, Wittek M, Hock C, Jakoby R (2004) Tunable passive phase shifter for microwave applications using highly anisotropic liquid crystals. In: IEEE MTT-S international microwave symposium digest, Fort Worth, TX, USA, pp 1153–1156
41.
Qingjiang C, Li Q, Ziyang Z, Min Q, Tong Y, Yikai S (2003) A tunable broadband photonic RF phase shifter based on a silicon microring resonator. IEEE Photon Technol Lett 21(1):60–62CrossRef
42.
Erker EG, Nagra AS, Yu L, Periaswamy P, Taylor TR, Speck J, York RA (2000) Monolithic Ka-band phase shifter using voltage tunable BaSrTiO3 parallel plate capacitors. IEEE Microw Guid Wave Lett 10(1):10–12CrossRef
43.
Hongjoon K, Kozyrev AB, Karbassi A, Van Der Weide DW (2005) Linear tunable phase shifter using a left-handed transmission line. IEEE Microw Wirel Compon Lett 15(5):366–368CrossRef
44.
Kang D-W, Lee HD, Kim C-H, Hong S (2006) Ku-band MMIC phase shifter using a parallel resonator with 0.18 µm CMOS technology. IEEE Trans Microw Theory Techn 54(1):294–301
45.
Kwang-Jin K, Rebeiz GM (2007) 0.13 µm CMOS phase shifters for X-, Ku-, and K-band phased arrays. IEEE J Solid-State Circ 42(11):2535–2546
46.
Koh K-J, Rebeiz GM (2010) A 6–18 GHz 5-bit active phase shifter. In: IEEE MTT-S international microwave symposium digest, Montreal, Anaheim, CA, pp 792–795
47.
Lee S, Park J-H, Kim H-T, Kim J-M, Kim Y-K, Kwon Y (2004) Low-loss analog and digital reflection-type MEMS phase shifters with 1:3 bandwidth. IEEE Trans Microw Theory Tech 52(1):211–219
48.
Pillans B, Coryell L, Malczewski A, Moody C, Morris F, Brown A (2012) Advances in RF MEMS phase shifters from 15 to 35 GHz. In: IEEE MTT-S international microwave symposium digest, Montreal, QC, Canada, pp 1–3
49.
Vähä-Heikkilä T, Van Caekenberghe K, Varis J, Tuovinen J, Rebeiz GM (2007) RF MEMS impedance tuners for 6–24 GHz applications. Int J RF Microw Comput Aided Eng 17(3):265–278
50.
Hung J-J, Dussopt L, Rebeiz GM (2004) Distributed 2- and 3-bit W-band MEMS phase shifters on glass substrates. IEEE Trans Microw Theory Tech 52(2):600–606CrossRef
51.
Hayden JS, Rebeiz GM (2003) Very low loss distributed X-band and Ka-band MEMS phase shifters using metal–air–metal capacitors. IEEE Trans Microw Theory Tech 51(1):309–314CrossRef
52.
Barker NS, Rebeiz GM (2000) Optimization of distributed MEMS transmission line phase shifters—U-band and W-band design. IEEE Trans Microw Theory Tech 48(11):1957–1966CrossRef
53.
Goins DA, Nelson RD, McKillop JS (2007) Design of a 20 GHz low loss ohmic contact RF MEMS switch. In: IEEE MTT-S international microwave symposium digest, Honolulu, HI, pp 371–374
54.
Majumder S, Lampen J, Morrison R, Maciel J (1938) A packaged, high-lifetime ohmic MEMS RF switch. In: IEEE MTT-S international microwave symposium digest, Philadelphia, PA, pp 1935–1938
55.
Unlu M, Demir S, Akin T (2013) A 15–40 GHz frequency reconfigurable RF MEMS phase shifter. IEEE Trans Microw Theory Tech 61(8):2397–2402CrossRef
56.
Koul SK, Dey S (2013) Radio frequency micro electromechanical system—An overview. J Smart Struct Syst 2(2):27–75
57.
Koul S, Dey S (2014) RF MEMS true-time-delay phase shifter. In: Vinoy KJ, Ananthasuresh GK, Pratap R, Krupanidhi AB (eds) Micro and smart devices and system. Springer. ISBN 0-978-81-322-1912-5
58.
Singh T, Mansour RR (2020) Loss compensated PCM GeTe-based latching wideband 3-bit switched true-time-delay phase shifters for mmWave phased arrays. IEEE Trans Microw Theory Tech 68(9):3745–3755CrossRef
59.
Singh T, Khaira NK, Mansour RR (2021) Thermally actuated SOI RF MEMS-based fully integrated passive reflective-type analog phase shifter for mmWave applications. IEEE Trans Microw Theory Tech 69(1):119–131CrossRef
60.
Koul SK, Dey S (2019) Radio-frequency micromachined switches, switching networks and phase shifters. by CRC Press, Taylor and Francis Group, United Kingdom. ISBN: 978-0-8153-6143-5
61.
Dey S, Koul SK (2015) 10–25 GHz frequency reconfigurable MEMS 5-bit phase shifter using push–pull actuator based toggle mechanism. J Micromech Microeng 25(6):19
62.
Koul SK, Dey S (2014) RF MEMS single-pole-multi-throw switching circuit. In: Vinoy KJ, Ananthasuresh GK, Pratap R, Krupanidhi AB (eds) Micro and smart devices and system. Springer, New Delhi, ISBN:0-978-81-322-1912-5
63.
Dey S, Koul SK (2014) 10–35 GHz frequency reconfigurable RF MEMS 5-Bit DMTL phase shifter using push-pull actuation based toggle mechanism. In: 2nd microwave and RF conference, 2014 IEEE MTT-S international (IMaRC 2014), Bangalore, India
64.
Koul SK, Dey S, Poddar AK, Rodhe U (2016)Micromachined switches and phase shifters for transmit/receive module applications. In: 46th IEEE European microwave conference (EuMC-2016), London, United Kingdom
65.
Dey S, Koul SK, Poddar AK, Rohde UL (2017)Ku-V-band 4-bit MEMS phase shifters using high isolation SP4T switches and DMTL structures. J Micromech Microeng 27(10):10
Metadaten
Titel
Micromachined Phase Shifters
verfasst von
Shiban Kishen Koul
Sukomal Dey
Copyright-Jahr
2022
Verlag
Springer Singapore
Buch
Micromachined Circuits and Devices

Print ISBN: 978-981-16-9442-4

Electronic ISBN: 978-981-16-9443-1

Copyright-Jahr: 2022

DOI
https://doi.org/10.1007/978-981-16-9443-1_6

Neuer Inhalt

    Bildnachweise