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Erschienen in: Journal of Materials Science: Materials in Electronics 5/2020

31.01.2020

Microstructure, optical, electrical, and magnetic properties of ZnO/CuO thin films prepared using two-stage magnetron sputtering and diffusion doping process

verfasst von: Tai-Hsiang Liu, Fei-Yi Hung, Cheng-Hung Chen, Kuan-Jen Chen

Erschienen in: Journal of Materials Science: Materials in Electronics | Ausgabe 5/2020

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Abstract

In this study, CuZnO (CZO) films were fabricated by two-stage magnetron sputtering. The film crystallization and the diffusion of the copper layer were enhanced by 1 h heat treatment (500 ℃); then the nanowire was grown from the CZO film system using an aqueous solution method. After 2 h of heat treatment (500 ℃), the film and the nanowire system were observed. The morphology and microstructure were analyzed and their optical and electromagnetic properties were analyzed. The CZO thin film is doped with copper atoms by zinc oxide so that the concentration of the carrier is increased and the ferromagnetism is enhanced and the electrical properties are improved. There are many oxygen vacancies and interstitial zinc on the nanowire, which increases the concentration of zinc oxide carriers. The carriers improve electrical and magnetic properties. After heat treatment, copper atoms were diffused into the ZnO film layer in ZnO/CuZnO system, which can greatly improve the electrical and magnetic properties of the structure.

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Metadaten
Titel
Microstructure, optical, electrical, and magnetic properties of ZnO/CuO thin films prepared using two-stage magnetron sputtering and diffusion doping process
verfasst von
Tai-Hsiang Liu
Fei-Yi Hung
Cheng-Hung Chen
Kuan-Jen Chen
Publikationsdatum
31.01.2020
Verlag
Springer US
Erschienen in
Journal of Materials Science: Materials in Electronics / Ausgabe 5/2020
Print ISSN: 0957-4522
Elektronische ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-020-02949-z

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