Ausgabe 6-7/2004
Inhalt (28 Artikel)
Two-dimensional modeling of nickel electrodeposition in LIGA microfabrication
K. S. Chen, G. H. Evans
Effects of microstructure on the mechanical properties of copper films for high aspect ratio structures
M. J. Cordill, T. Muppidi, N. R. Moody, D. F. Bahr
Micro gas bearings fabricated by deep X-ray lithography
D. Kim, S. Lee, Y. Jin, Y. Desta, M. D. Bryant, J. Goettert
Combination of thick resist and electroforming technologies for monolithic inkjet application
C. K. Chung, C. J. Lin, C. C. Chen, Y. J. Fang, M. Q. Tsai
Selection of mold materials for electroforming of monolithic two-layer microstructure
C. K. Chung, C. J. Lin, L. H. Wu, Y. J. Fang, Y. Z. Hong
Active positioning device for a perimodiolar cochlear electrode array
B. Y. Arcand, P. T. Bhatti, N. V. Butala, J. Wang, C. R. Friedrich, K. D. Wise
Determination of mechanical properties of slip cast, micro powder injection moulded and microcast high aspect ratio microspecimens
M. Auhorn, T. Beck, V. Schulze, D. Löhe
Electrodeposited nickel–manganese: an alloy for microsystem applications
S. H. Goods, J. J. Kelly, N. Y. C. Yang
The mechanical properties, dimensional tolerance and microstructural characterization of micro-molded ceramic and metal components
T. J. Garino, A. M. Morales, B. L. Boyce
The role of microstructure in the electrical and thermal conductivity of Ni-alloys for LIGA microsystems
S. Graham, J. Kelley, N. Yang, T. Borca-Tasciuc
High density and through wafer copper interconnections and solder bumps for MEMS wafer-level packaging
C.-J. Lin, M.-T. Lin, S.-P. Wu, F.-G. Tseng
A Micro corona motor fabricated by a SU-8 built-on X-ray mask
S. Lee, D. Kim, Y. Jin, Y. Han, Y. Desta, M. D. Bryant, J. Goettert
Shape deviations in masks for optical structures produced by electron beam lithography
A. Last, H. Hein, J. Mohr
Fabrication of grids and collimators using SU-8 as a mold
O. V. Makarova, V. N. Zyryanov, R. Divan, D. C. Mancini, C.-M. Tang
Fabrication of focused two-dimensional grids
O. V. Makarova, D. C. Mancini, N. Moldovan, R. Divan, V. N. Zyryanov, C.-M. Tang
Replication of micro components by different variants of injection molding
V. Piotter, N. Holstein, K. Plewa, R. Ruprecht, J. Hausselt
Production of identical pyramid wavefront sensors for multi-conjugate adaptive optic systems using the LIGA process
F. Pérennès, M. Ghigo, M. Tormen, S. Cabrini
Evaluation of optical qualities of a LIGA-spectrometer in SU-8
T. Mappes, S. Achenbach, A. Last, J. Mohr, R. Truckenmüller
High aspect ratio spiral and vertical meander micro coils for actuator applications
V. Seidemann, T. Kohlmeier, M. Föhse, H. H. Gatzen, S. Büttgenbach
High-aspect-ratio microstructure filling by centrifugal force field modeling
T.-H. Tsai, H. Yang, R. Chein