Skip to main content
Erschienen in: Optical and Quantum Electronics 2/2017

01.02.2017

Mutual influence of Auger and non-radiative recombination processes under silicon femtosecond laser irradiation

verfasst von: Alexandra Shamova, Galina Shandybina, Evgeny Yakovlev, Alexandra Georgieva

Erschienen in: Optical and Quantum Electronics | Ausgabe 2/2017

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

The results of theoretical study of the contribution of recombination processes in additional heating of the surface of monocrystalline silicon during multipulse femtosecond laser processing are presented to discussion. The numerical evaluations are made in regimes of the laser radiation below the ablation threshold, when the microgeometry of the surface is formed due to the processes of self-organization. The influence of Auger recombination processes on the photoexcitation of the semiconductor during the pulse and relaxation after the pulse is studied in detail. It is shown that the additional heating of the surface due to non-radiative recombination is extremely small at pulse repetition rate 10 Hz–1 MHz. Mutual influence of recombination processes of both types is shown.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Wirtschaft"

Online-Abonnement

Mit Springer Professional "Wirtschaft" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 340 Zeitschriften

aus folgenden Fachgebieten:

  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Versicherung + Risiko




Jetzt Wissensvorsprung sichern!

Literatur
Zurück zum Zitat Ashitkov, S.I., Ovchinnikov, A.V., Agranat, M.B.: Recombination of an electron-hole plasma in silicon under the action of femtosecond laser pulses. JETP Lett. 79, 529–531 (2004)ADSCrossRef Ashitkov, S.I., Ovchinnikov, A.V., Agranat, M.B.: Recombination of an electron-hole plasma in silicon under the action of femtosecond laser pulses. JETP Lett. 79, 529–531 (2004)ADSCrossRef
Zurück zum Zitat Beck, J.D., Conradt, R.: Auger-recombination in Si. Solid State Commun. 13, 93–95 (1973)ADSCrossRef Beck, J.D., Conradt, R.: Auger-recombination in Si. Solid State Commun. 13, 93–95 (1973)ADSCrossRef
Zurück zum Zitat Cerami, L., Mazur, L.E., Nolte, S., Schaffer, C.B.: Femtosecond laser Micromachining. Ultrafast Nonlinear Optics, Chapter 12. Springer, New York (2013) Cerami, L., Mazur, L.E., Nolte, S., Schaffer, C.B.: Femtosecond laser Micromachining. Ultrafast Nonlinear Optics, Chapter 12. Springer, New York (2013)
Zurück zum Zitat Gerlach, W., Schlangenotto, H., Maeder, H.: On the radiative recombination rate in silicon. Phys. Status Solidi A 13, 277–283 (1972)ADSCrossRef Gerlach, W., Schlangenotto, H., Maeder, H.: On the radiative recombination rate in silicon. Phys. Status Solidi A 13, 277–283 (1972)ADSCrossRef
Zurück zum Zitat Guk, I., Shandybina, G., Yakovlev, E.: Infuence of accumulation effects on heating of silicon surface by femtosecond laser pulses. Appl. Surf. Sci. 335, 851–855 (2015)ADSCrossRef Guk, I., Shandybina, G., Yakovlev, E.: Infuence of accumulation effects on heating of silicon surface by femtosecond laser pulses. Appl. Surf. Sci. 335, 851–855 (2015)ADSCrossRef
Zurück zum Zitat Guk, I.V., Shandybina, G.D., Yakovlev, E.B., Shamova, A.A.: Role of recombination processes during multipulse femtosecond microstructuring of silicon surface. Opt. Quantum Electron. 48, 1–10 (2016)CrossRef Guk, I.V., Shandybina, G.D., Yakovlev, E.B., Shamova, A.A.: Role of recombination processes during multipulse femtosecond microstructuring of silicon surface. Opt. Quantum Electron. 48, 1–10 (2016)CrossRef
Zurück zum Zitat Harzic, R., Schuck, H., Sauer, D., Anhut, T., Riemann, I., König, K.: Sub-100 nm nanostructuring of silicon by ultrashort laser pulses. Opt. Express 13, 6651–6656 (2005)ADSCrossRef Harzic, R., Schuck, H., Sauer, D., Anhut, T., Riemann, I., König, K.: Sub-100 nm nanostructuring of silicon by ultrashort laser pulses. Opt. Express 13, 6651–6656 (2005)ADSCrossRef
Zurück zum Zitat Hawley M.J.: High pressure studies of strained layer semiconductor’ lasers. Ph.D. thesis, University of Surrey, (1993) Hawley M.J.: High pressure studies of strained layer semiconductor’ lasers. Ph.D. thesis, University of Surrey, (1993)
Zurück zum Zitat Hopkins, P.E., Barnat, E.V., Cruz-Campa, J.L., Grubbs, R.K., Okandan, M., Nielson, G.N.: Excitation rate dependence of Auger recombination in silicon. J. Appl. Phys. 107, 1–6 (2010)CrossRef Hopkins, P.E., Barnat, E.V., Cruz-Campa, J.L., Grubbs, R.K., Okandan, M., Nielson, G.N.: Excitation rate dependence of Auger recombination in silicon. J. Appl. Phys. 107, 1–6 (2010)CrossRef
Zurück zum Zitat Li, C.-M., Sjodin, T., Dai, H.-L.: Photoexcited carrier diffusion near a Si(111) surface: non-negligible consequence of carrier-carrier scattering. Phys. Rev. B 56, 15252–15255 (1997)ADSCrossRef Li, C.-M., Sjodin, T., Dai, H.-L.: Photoexcited carrier diffusion near a Si(111) surface: non-negligible consequence of carrier-carrier scattering. Phys. Rev. B 56, 15252–15255 (1997)ADSCrossRef
Zurück zum Zitat Martsinovsky, G.A., Shandybina, G.D., Dement’eva, Y.S., Dyukin, R.V., Zabotnov, S.V., Golovan’, L.A., Kashkarov, P.K.: Generation of surface electromagnetic waves in semiconductors under the action of femtosecond laser pulses. Semiconductors 43, 1298–1304 (2009)ADSCrossRef Martsinovsky, G.A., Shandybina, G.D., Dement’eva, Y.S., Dyukin, R.V., Zabotnov, S.V., Golovan’, L.A., Kashkarov, P.K.: Generation of surface electromagnetic waves in semiconductors under the action of femtosecond laser pulses. Semiconductors 43, 1298–1304 (2009)ADSCrossRef
Zurück zum Zitat Ruzicka, B.A.: Ultrafast optical studies of electronic dynamics in semiconductors. Ph.D. thesis, University of Kansas (2012) Ruzicka, B.A.: Ultrafast optical studies of electronic dynamics in semiconductors. Ph.D. thesis, University of Kansas (2012)
Zurück zum Zitat Tan, B., Venkatakrishnan, K.: A femtosecond laser-induced periodical surface structure on crystalline silicon. J. Micromech. Microeng. 16, 1–6 (2006)CrossRef Tan, B., Venkatakrishnan, K.: A femtosecond laser-induced periodical surface structure on crystalline silicon. J. Micromech. Microeng. 16, 1–6 (2006)CrossRef
Zurück zum Zitat Veiko, V.P., Libenson, M.N., Chervyakov, G.G., Yakovlev, E.B.: Vzaimodeistvie Lazernogo Izlucheniya s Veshchestvom [Interaction of Laser Radiation with Matter]. Fizmatlit, Moscow (2008) Veiko, V.P., Libenson, M.N., Chervyakov, G.G., Yakovlev, E.B.: Vzaimodeistvie Lazernogo Izlucheniya s Veshchestvom [Interaction of Laser Radiation with Matter]. Fizmatlit, Moscow (2008)
Zurück zum Zitat Willardson, R.K., Weber, E.R., Tsen, K.T.: Ultrafast Physical Processes in Semiconductors. Elsevier, Amsterdam (2000) Willardson, R.K., Weber, E.R., Tsen, K.T.: Ultrafast Physical Processes in Semiconductors. Elsevier, Amsterdam (2000)
Zurück zum Zitat Yakovlev, E.B., Sergaeva, O.N., Svirina, V.V., Yarchuk, M.V.: Modeling of thin Cr film oxidation under the action of ultrashort laser pulses. SPIE 9065, 906509-1-906509-6 (2013) Yakovlev, E.B., Sergaeva, O.N., Svirina, V.V., Yarchuk, M.V.: Modeling of thin Cr film oxidation under the action of ultrashort laser pulses. SPIE 9065, 906509-1-906509-6 (2013)
Zurück zum Zitat Zhu, J., Li, W., Zhao, M., Yin, G., Chen, X., Chen, D., Zhao, L.: Silicon microstructuring using ultrashort laser pulses. Lasers in Material Processing and Manufacturing II. Proc. SPIE, 5629, 276–283 (2005)ADSCrossRef Zhu, J., Li, W., Zhao, M., Yin, G., Chen, X., Chen, D., Zhao, L.: Silicon microstructuring using ultrashort laser pulses. Lasers in Material Processing and Manufacturing II. Proc. SPIE, 5629, 276–283 (2005)ADSCrossRef
Metadaten
Titel
Mutual influence of Auger and non-radiative recombination processes under silicon femtosecond laser irradiation
verfasst von
Alexandra Shamova
Galina Shandybina
Evgeny Yakovlev
Alexandra Georgieva
Publikationsdatum
01.02.2017
Verlag
Springer US
Erschienen in
Optical and Quantum Electronics / Ausgabe 2/2017
Print ISSN: 0306-8919
Elektronische ISSN: 1572-817X
DOI
https://doi.org/10.1007/s11082-017-0911-0

Weitere Artikel der Ausgabe 2/2017

Optical and Quantum Electronics 2/2017 Zur Ausgabe

Neuer Inhalt