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Erschienen in:
Nanoscale Scratching with Single and Dual Sources Using Atomic Force Microscopes Kapitel lesen Erstes Kapitel lesen

2011 | OriginalPaper | Buchkapitel

7. Nanofabrication of Functional Nanostructures by Thermochemical Nanolithography

verfasst von : Debin Wang, Vamsi K. Kodali, Jennifer E. Curtis, Elisa Riedo

Erschienen in: Tip-Based Nanofabrication

Verlag: Springer New York

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Abstract

Nanofabrication is the process of building functional structures with nanoscale dimensions, which can be used as components, devices, or systems with high density, in large quantities, and at low cost. Since the invention of scanning tunneling microscopy (STM) and atomic force microscopy (AFM) in 1980s, the application of scanning probe based lithography (SPL) techniques for modification of substrates and creation of functional nanoscale structures and nanostructured materials has been widespread, resulting in the emergence of a large variety of methodologies. In this chapter, we review the recent development of a thermal probe based nanofabrication technique called thermochemical nanolithography (TCNL). We start with a brief review of the evolution of the thermal AFM probes integrated with resistive heaters. We then provide an overview of some established nanofabrication techniques in which thermal probes are used, namely thermomechanical nanolithography, the Millipede project, and thermal dip-pen nanolithography. We discuss the heat transfer mechanisms of the thermal probes in the thermal writing process of TCNL. The remainder of the chapter focuses on the use of TCNL on a variety of systems and thermochemical reactions. TCNL has been successfully used for fabrication of functional nanostructures that are appealing for various applications in nanofluidics, nanoelectronics, nanophotonics, and biosensing devices. Finally, we close this chapter by discussing some future research directions where the capabilities and robustness of TCNL can be further extended.

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Vorheriges Kapitel Nanopattern Formation Using Dip-Pen Nanolithography
Nächstes Kapitel Proton-fountain Electric-field-assisted Nanolithography (PEN)
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Metadaten
Titel
Nanofabrication of Functional Nanostructures by Thermochemical Nanolithography
verfasst von
Debin Wang
Vamsi K. Kodali
Jennifer E. Curtis
Elisa Riedo
Copyright-Jahr
2011
Verlag
Springer New York
Buch
Tip-Based Nanofabrication

Print ISBN: 978-1-4419-9898-9

Electronic ISBN: 978-1-4419-9899-6

Copyright-Jahr: 2011

DOI
https://doi.org/10.1007/978-1-4419-9899-6_7

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