Skip to main content
Fachgebiete
Automobil + Motoren Bauwesen + Immobilien Business IT + Informatik Elektrotechnik + Elektronik Energie + Nachhaltigkeit Finance + Banking Management + Führung Marketing + Vertrieb Maschinenbau + Werkstoffe Versicherung + Risiko
DE
EN
Themenseiten
Organisationspsychologie Projektmanagement Marketing Smart Manufacturing
Bücher
Zeitschriften
Weitere Formate
Podcasts Webinare Technik Webinare Wirtschaft Kongresse Veranstaltungskalender Awards
Jetzt Einzelzugang starten
Zugang für Unternehmen
Referenzkunden
MTZ-Fachkongress

Antriebe und Energiesysteme von morgen


Austausch von Automobil- und Energiewirtschaft

Am 14./15. Mai geht es in Chemnitz um die Mobilitätswende durch Elektro- und Wasserstofffahrzeuge.
Erweiterte Suche
Anmelden
nach oben
Erschienen in:
Buchtitelbild

2017 | OriginalPaper | Buchkapitel

1. Non-traditional Micromachining Processes: Opportunities and Challenges

verfasst von : S. Debnath, S. Kunar, S. S. Anasane, B. Bhattacharyya

Erschienen in: Non-traditional Micromachining Processes

Verlag: Springer International Publishing

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

The high demand and stringent design requirements in developing fields of microengineering as well as various needs of society and nation require the utilization of suitable techniques of non-traditional machining processes on different existing and newly developed metals, non metals, alloys, polymers, ceramics, rubber and composites, etc. Presently, nontraditional machining techniques have expanded their applicability in the field of micromachining and offer better opportunities with several inherent advantages that make these processes superior as well as more efficient than conventional one. Non-traditional mechanical micromachining processes include abrasive jet machining (AJM), water jet machining (WJM), ultrasonic machining (USM), ion beam machining (IBM), etc. Non-traditional thermal micromachining processes include micromachining by electro discharge machining (EDM), laser beam machining (LBM), electron beam machining (EBM), etc. Non-traditional chemical and electrochemical micromachining processes have been used successfully to generate micro features of high quality. Hybrid micromachining can also be utilized effectively for generating more intricate shapes and complex parts. Advanced finishing processes using non-traditional machining like abrasive flow finishing (AFF), magnetic abrasive finishing (MAF), etc. are also gaining popularity to cope up the steep demand in finishing intricate, complex, durable and sophisticated shapes that are highly economical and posses better surface quality and property. The opportunities and challenges of each non-traditional micromachining and finishing processes are to be investigated considering various practical applications in different micro engineering fields. These non-traditional micromachining techniques as well as advanced finishing processes can be improved further and utilized more successfully in the near future for numerous microengineering applications.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Jetzt informieren

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Jetzt informieren
Nächstes Kapitel Recent Advancement on Ultrasonic Micro Machining (USMM) Process
Literatur
1.
Liu X., DeVor R.E., Kapoor S.G., Ehmann K.F., The mechanics of machining at the micro-scale: assessment of the current state of the science, J. Manuf. Sci. Eng. 126 (2004) 666–678.
2.
Mecomber J. S., Hurd D., Limbach P.A., Enhanced machining of micron-scale features in microchip molding masters by CNC milling, International Journal of Machine Tools & Manufacture 45(2005) 1542–1550.
3.
Chae J., Park S.S., Freiheit T., Investigation of micro-cutting operations, International Journal of Machine Tools & Manufacture 46(2006) 313–332.
4.
Filiz S., Conley C.M., Wasserman M.B., Burak Ozdoganlar N., An experimental investigation of micromachinability of copper 101 using tungsten carbide micro-endmills, International Journal of Machine Tools and Manufacture 47(2007)1088–1100.
5.
Masuzawa T., State of the art of micromachining, Annals of the CIRP 49 (2000) 473–488.
6.
Benedict G. F., Non-traditional Manufacturing Processes, Marcel Dekker Inc., New York, 1987.
7.
Getu H., Ghobeity A., Spelt J.K., Papini M., Abrasive jet micromachining of polymethylmethacrylate, Wear 263(2007)1008–1015.
8.
9.
Belloy E., Thurre S., Walckiers E., Sayah A., Gijs, M. A. M., The introduction of powder blasting for sensor and microsystems applications, Sens. Actuators: A: Phys. 84 (2000) 330–337.
10.
Pawlowski A., Belloy E., Sayah A., Gijs M. A. M., Powder blasting patterning technology for microfabrication of complex suspended structures in glass, Microelectronic Engineering 67-68 (2003) 557–565.
11.
Cooley W.E., Clipp L.L, High pressure water jets for undersea rock excavation, Journal of Engineering for Industry, Trans. ASME, Series B 92(1970)281.
12.
Sun X. Q., Masuzawa T., Fujino M., Micro ultrasonic machining and its applications in MEMS, Sensors and Actuators, A 57(1996)159–164.
13.
Egashira K., Masuzawa T., Fujino M., Sun, X. Q., Application of USM to micromachining by on-the-machine tool fabrication, International Journal of Electrical Machining, IJEM, 2(1997)31–36.
14.
Tseng A. A., Topical review: Recent developments in micro milling using focused ion beam technology, Journal of Micromechanics and Micro engineering 14(2004)R15-R34.
15.
Vasile M. J. et al., Micro fabrication techniques using focused ion beam and emergent applications, Micron 30(1999) 235–244.
16.
Jain R.K., Jain V. K., Abrasive Fine Finishing Process-A Review, The Intl. J. Mfg. Sc. Prod. 2(1999)55–68.
17.
Shinmura T., Takazawa K., Hatano E. Study on Magnetic Abrasive Finishing, Annals CIRP 39(1990)325–328.
18.
Puranik M. S., Joshi S. S., Analysis of accuracy of high-speed aspect ratio holes generated using micro-EDM drilling, Proceedings of Institution of Mechanical Engineering, Part B, Journal of Engineering Manufacture 222 (2008)1453–1464.
19.
Alemohammad H. Toyserkani E. Pinkerton A.J., Femtosecond laser micromachining of fiber Bragg gratings for simultaneous measurement of temperature and concentration of liquids, Journal of physics D: Applied Physics 41 (2008) 1–9.
20.
Sugioka K. Cheng Y, Midorikawa K., Three-dimensional micromachining of glass using femtosecond laser for lab-on-a-chip device manufacture, Applied Physics A 81(2005) 1–10.
21.
Rathod V., Doloi B., Bhattacharyya B., Influence of electrochemical micromachining parameters during generation of microgrooves, Int J Adv Manuf Technol. 76(2015)51–60.
22.
Ghoshal B., Bhattacharyya B., Shape control in micro borehole generation by EMM with the assistance of vibration of tool, Precision Engineering 38 (2014) 127–137.
23.
McGeough J.A, (Ed.), Micromachining of Engineering Materials, Marcel Dekker Inc, NY (USA) 2002.
24.
Bhattacharyya B., Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology, William Andrew Applied Science Publishers, Imprint of Elsevier Inc., Massachusetts, pp. 270, 2015.
25.
Egashira K., Masuzawa T., Microultrasonic machining by the application of workpiece vibration, CIRP Annals—Manufacturing Technology 48(1999)131–134.
26.
Egashira K., Mizutani K., Micro-drilling of Monocrystalline Silicon Using a Cutting Tool, Precision Engineering 26(2002)263–268.
27.
Egashira K., Masuzawa T., Fujino M., Sun X. Q., Application of USM to micromachining by on-the-machine tool fabrication, International Journal of Electrical Machining 2(1997) 31–36.
28.
Komaraiah M., Reddy P. N., A study on the influence of work piece properties in ultrasonic machining, International Journal of Machine Tools and Manufacture 33(1993) 495–505.
29.
Singh R., Khamba J. S., Ultrasonic machining of titanium and its alloys: a review, Journal of Materials Processing Technology 173(2006)125–135.
30.
Egashira K., Taniguchi T., Tsuchiya H., Miyazaki M., Microultrasonic machining using multitools, in Proceedings of the 7th International Conference on Progress Machining Technology (ICPMT ‘04), pp. 297–301, December 2004.
31.
Sun X. Q., Masuzawa T., Fujino M., Micro ultrasonic machining and its applications in MEMS, Sensors and Actuators A 57(1996)159–164.
32.
Sun X. Q., Masuzawa T., Fujino M., Micro ultrasonic machining and self-aligned multilayer machining/assembly technologies for 3D micromachines, in Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS’96), pp. 312–317, 1996.
33.
Boy J. J., Andrey E., Boulouize A., Khan-Malek C., Developments in microultrasonic machining (MUSM) at FEMTO-ST, International Journal of Advanced Manufacturing Technology 47(2010)37–45.
34.
Yu Z. Y., Rajurkar K. P., Tandon A., Study of 3D microultrasonic machining, Journal of Manufacturing Science and Engineering, Transactions of the ASME 126(2004)727–732.
35.
Zhang C., Rentsch R., Brinksmeier E., Advances in micro ultrasonic assisted lapping of microstructures in hard-brittle materials: a brief review and outlook, International Journal of Machine Tools and Manufacture 45(2005)881–890.
36.
Curodeau A., Guay J., Rodrigue D., Brault L., Gagn´e D., Beaudoin L. P., Ultrasonic abrasive μ-machining with thermoplastic tooling, International Journal of Machine Tools and Manufacture 48 (2008) 1553–1561.
37.
Jameson E.C., Description and development of electrical discharge machining (EDM), in: Electrical Discharge Machining, Society of Manufacturing Engineers, Dearbern, Michigan, pp. 12, 2001.
38.
Allen D.M., Lecheheb A., Micro electro-discharge machining of ink jet nozzles: optimum selection of material and machining parameters, Journal of Materials Processing Technology 58 (1996) 53–66.
39.
Newman S. T., Ho K. H., The state of art – Electrical discharge machining, International Journal of machine Tools and Manufacture 43 (2003)1287–1300.
40.
Koch O., Ehrfeld W., Michel F., Gruber H. P., Recent progress in micro-electro discharge machining technology – Part 1, Proceedings of the 13th International Symposium for Electromachining ISEM XIII, Bilbao, Spain, 2001.
41.
Takezawa H., Hamamatsu H., Mohri N., Saito N., Development of micro-EDM with rapidly sharpened electrode, Journal of Materials Processing Technology 149(2004)112–116.
42.
Imai Y., Nakagawa T., Miyake H., Hidai H., Tokura H., Local actuator module for highly accurate micro-EDM, Journal of Materials Processing Technology 149(2004) 328–333
43.
Yan B. H., Wang A. C., Huang C.Y., Huang F.Y., Study of precision micro-holes in borosilicate glass using micro-EDM combined with micro ultrasonic vibration machining, International Journal of machine Tools and Manufacture 42(2002)1105–1112
44.
Chern G., Wu Y. E., Liu S., Development of micro-punching machine and study on the influence of vibration machining in micro-EDM, Journal of Materials Processing Technology, 180(2006)102–109.
45.
Hung J. C., Ling J. K., Yan B. H., Liu H. S., Ho P. H., Using a helical micro-tool in micro-EDM combined with ultrasonic vibration for micro-hole machining, Journal of Micromechanics and Microengineering 16(2006) 2705–2713.
46.
Aspiwall D. K., Soo S. L., Berrisford A. E., Walder G., Workpiece Surface Roughness and Integrity after WEDM of Ti-6Al-4 V and Inconel 718 Using Minimum Damage Generator Technology, CIRP Annals - Manufacturing Technology 57(2008) 187–190.
47.
Patel K.M., Pandey P.M., Rao P. V., Surface integrity and material removal mechanisms associated with the EDM of Al2O3 ceramic composite, International Journal of Refractory Metals and Hard Materials 27(2009) 892–899.
48.
Jahan M.P., Rahman M., Wong Y.S., Fuhua L., On-machine fabrication of high- aspect-ratio microelectrodes and application in vibration-assisted micro- EDM drilling of tungsten carbide, Proceedings of the Institution of Mechanical Engineers, Part B: Journal of Engineering Manufacture 224 (2010) 795–814.
49.
Takahata K., Shibaike N., Guckel H., High-aspect-ratio WC–Co microstructure produced by the combination of LIGA and micro-EDM, Microsystem Technologies 6 (2000) 175–178.
50.
Liu K., Lauwers B., Reynaerts D., Process capabilities of Micro-EDM and its applications, The International Journal of Advanced Manufacturing Technology 47(2010) 11–19.
51.
Liao Y.S. et al., Fabrication of high aspect ratio microstructure arrays by micro reverse wire-EDM, Journal of Micromechanics and Microengineering 15(2005) 1547.
52.
Lin C.S. et al., Fabrication of micro ball joint by using micro- EDM and electroforming, Microelectronic Engineering 87(2010) 1475–1478.
53.
Gao G., Zhao W., Wang Z., Gou Y., Instantaneous fabrication of tungsten microelectrode based on single electrical discharge, Journal of Materials Processing Technology 168(2005) 83–88.
54.
Sen A., Doloi B., Bhattacharyya B., Experimental Studies on Fibre Laser Micromachining of Ti-6Al-4V. 5th International & 26th All India Manufacturing Technology, Design and Research Conference (AIMTDR 2014) December 14th, 2014.
55.
Föehl C., Dausinger F., High precision deep drilling with ultra short pulses, Proceedings of SPIE2003; 5063: 346–51.
56.
Dausinger F., Hugel H., Konov VI., Micromachining with ultra short laser pulses: from basic understanding to technical applications, Proceedings of SPIE 2003; 5147: 106–15.
57.
Meijer J., Laser beam machining (LBM) state of the art and new opportunities, J Mater Process Technol 149 (2004)2–17.
58.
Breitling D., Ruf A., Dausinger F., Fundamental aspects in machining of metals with short and ultra short laser pulses, Proceedings of SPIE 2004; 5339: 49–63.
59.
Rizvi N.H., Femtosecond laser micromachining: current status and applications, Riken Review 50(2003) 107–112.
60.
Loeschner U., Mauersberger S., Ebert R. et al., Micromachining of glass with short ns-pulses and highly repetitive fs-laser pulses, in Proceedings of the 27th International Congress on Applications of Lasers and Electro-Optics (ICALEO ’08), pp. 193–201, October 2008.
61.
Rizvi N., Femtosecond Laser Micromachining: Current Status and Applications. Riken Rev 50(2003) 77–82.
62.
Gower M. C., Industrial application of laser micromachining, Opt Express 7(2000) 56–67.
63.
Mishra S., Yadava V., Laser Beam Micro Machining (LBMM) – A review, Optics and Lasers in Engineering 73(2015) 89–122
64.
Ren J., Kelly M., Hesselink L., Laser ablation of silicon in water with nanosecond and femtosecond pulses, Optics Letters 30(2005) 1740–1742.
65.
Kruusing A., Underwater and water-assisted laser processing: part 2—etching, cutting and rarely used methods, Optics and Lasers in Engineering 41(2004) 329–352.
66.
Tao Y. L., Chen H., Zhang W., Time scale effects in laser material removal: a review, Int J Adv Manuf Technol 26(2005) 598–608.
67.
Hanemann T., Pfleging W., Haubelt J., Gahr K. H. Z., Laser micromachining and light induced reaction injection molding as suitable process sequence for the rapid fabrication of micro component, Microsyst Technol 7(2002) 209–14.
68.
Bhavsar S.N., Aravindan S., Rao P.V., A Critical Review on Microtools Fabrication by Focused Ion Beam (FIB) Technology, Proc. of the World Congress on Eng. (2009).
69.
Raffa V., Castrataro P., Menciassi A., Dario P., Focused Ion Beam as a Scanning Probe: Methods and Applications, Applied NanoScience and Technology (2006) 361–412.
70.
Lucille A., Stevie G., Fred A., Introduction to focused ion beams, instrumentation, theory, techniques and practice, Springer Inc, Boston, USA. 2005.
71.
Sadoh T., Eguchi H., Kenjo A., Miyao M., Etching characteristics of SiO2 irradiated with focused ion beam, Nucl Instrum Meth B 206 (2003) 478.
72.
Kang H.J., Ahn S.H., Lee J.S., Lee J.H., Surface modification of aluminum by nitrogen-ion implantation, Int J Precis Eng Man 7(2005) 1.
73.
Villanueva G., Plaza J.A., Sanchez-Amores A., Bausells J., Martinez E., Samitier J., et al. Deep reactive ion etching and focused ion beam combination for nanotip fabrication, Mater Sci Eng C-Mater 26(2006) 164.
74.
Venugopal G., Fabrication and Characteristics of Submicron Stacked-Junctions on Thin Graphite Flakes, J. Nanosci. Nanotechnol 11(2011) 1405–1408.
75.
Park C.M., Bain J.A., Focused ion beam induced grain growth in magnetic materials for recording heads, J. Appl. Phys. 91(2002) 6380–6832.
76.
Nastasi M., Mayer J.W., Hirvonen J.K., Ion- Solid Interactions: Fundamentals and Applications (Cambridge University Press, Cambridge, UK, 1996).
77.
Nellen P.M., Callegari V., Bronnimann R., FIB-milling photonic structures and sputtering simulation, Microelectron Eng 83(2006)1805.
78.
Miller M.K., Russell K.F., Atom probe specimen preparation with a dual beam SEM/FIB miller, Ultramicroscopy 107(2007)761.
79.
Ali M.Y., Ong A.S., Fabricating micromilling tool using wire electrodischarge grinding and focused ion beam sputtering, Int J Precis Eng Man 31(2006)501.
80.
Hopman W.C.L., Ay F., Hu W., Gadgil V.J, Kuipers L., Pollnau M., et al. Focused ion beam scan routine, dwell time and dose optimizations for submicrometer period planar photonic crystal components and stamps in silicon, Nanotechnology 18(2007)195305.
81.
Li W., Minev R., Dimov S., Lalev G., Patterning of amorphous and polycrystalline Ni78B14Si8 with a focused-ion-beam, Appl Surf Sci 253(2007)5404.
82.
Malek C.K., Hartley F.T., Neogi J., Fast prototyping of high-aspect ratio, high resolution X-ray masks by gas-assisted focused ion beam, Microsyst Technol 9(2003)409.
83.
Hosokawa H., Shimojima K., Chino Y., Yamada Y., Wen C.E., Mabuchi M., Fabrication of nanoscale Ti honeycombs by focused ion beam, Mater Sci Eng A-Struct 344(2003)365.
84.
Youn S.W., Okuyama C., Takahashi M., Maeda R., A study on fabrication of silicon mold for polymer hot-embossing using focused ion beam milling, J Mater Process Tech 201(2008)548.
85.
Li H.W., Kang D.J., Blamire M.G., Huck W.T.S., Focused ion beam fabrication of silicon print masters, Nanotechnology 14(2003)220.
86.
Igaki J., Kometani R., Nakamatsu K., Kanda K., Haruyama Y., Ochiai Y., et al., Three dimensional rotor fabrication by focused-ion-beam chemical-vapor deposition, Microelectron Eng 83(2006)1221.
87.
Kometani R., Funabiki R., Hoshino T., Kanda K., Haruyama Y., Kaito T., et al., Cell wall cutting tool and nano-net fabrication by FIB-CVD for sub-cellular operations and analysis, Microelectron Eng 83(2006)1642.
88.
Reyntjens S., Puers R., A review of focused ion beam applications in microsystem technology, Journal of micromechanics and microengineering 11 (2001) 287–300
89.
Fujii T., Iwasaski M., Munekane M., Takeuchi T., Hasuda M., Asahata T., et al., A nanofactory by focused ion beam, J Micromech Microeng 11(2005)S286.
90.
Ding X., Lim G.C., Cheng C.K., Butler D.L., Shaw K.C., Liu K., Fong W.S., Fabrication of a micro-size diamond tool using a focused ion beam, J. Micromech. Microeng. 18 (2008).
91.
Selada A., Manaia A., Vieira M.T., Pouzada A.S., Effect of LBM and large-area EBM finishing on micro-injection moulding surfaces, Int J Adv Manuf Technol 52 (2011) 171–182.
92.
Desilets B. H., Mechanism of cavity formation in unfired ceramic by electron beam machining, Journal of vacuum science technology 15(1978)3.
93.
Moarrefzadeh A., Finite-Element Simulation of Electron Beam Machining (EBM) Process, International Journal of Multidisciplinary Sciences And Engineering 2(2011).
94.
Chryssolouris G., Anifantis N., Karagiannis S., Electron Assisted Machining: an Overview, ASME Journal of Manufacturing Science and Engineering 119 (1997) 766–769.
95.
Biamino S., Penna A., Ackelid U., Sabbadini S., Tassa O., Fino P., Pavese M., Gennaro P., Badini C., Electron beam melting of Ti-48Al-2Cr-2Nb alloy: microstructure and mechanical properties investigation, Intermetallics 19 (2010) 776–781.
96.
Uno Y., Okada A., Uemura K., Raharjo P., Sano S., Yu Z., Mishima S, A new polishing method of metal mold with large-area electron beam irradiation, J Mat Process Technol 187–188(2007) 77–80.
97.
Utke, Hoffmann, and Melngailis, Gas-assisted focused electron beam and ion beam processing, J. Vac. Sci. Technol. 26(2008).
98.
Jain V. K., Advanced Machining Processes, Allied Publishers, Delhi, 2002.
99.
Blak J.T., et. al., DeGarmo’s Materials and Processes in Manufacturing, John Wiley & Sons, Inc, Tenth ed. 2007.
100.
Drozda T.J., Tool and Manufacturing Engineers, Handbook (Chapter 14: Nontraditional Machining), SME Publishing, 1989.
101.
Fadaei T. A., A New Etchant For The Chemical Machining of St304, Journal of Materials Processing Technology 149(2004) 404–408.
102.
Al-Ethari A. H., Alsultani K. F., Dakhil N., Variables Affecting the Chemical Machining of Stainless Steel 420, International Journal of Engineering and Innovative Technology (IJEIT) 3(2013).
103.
Allen D.M., Talib T.N., Manufacture of stainless steel edge filters: an application of electrolytic photopolishing, precision engineering (1983) 57–59.
104.
Bhattacharyya B., Munda J., Malapati M., Advancement in electrochemical micro-machining, International Journal of Machine Tools & Manufacture 44 (2004) 1577–1589.
105.
Lohrengel M. M., Kluppel I., Rosenkranz C., Bettermann H., Schultze J. W., Microscopic investigations of electrochemical machining of Fe in NaNO3, Electrochimia Acta 48 (2003) 3203–3211
106.
Kozak J., Rajurkar K. P., Wei B., Modeling and analysis of pulse electrochemical machining, Transactions of ASME, 116 (1994) 316–323.
107.
Munda J., Malapati M., Bhattacharyya B., Control of micro-spark and stray –current effect during EMM process, Journal of Materials Processing Technology 194(2007) 151–158.
108.
Kock M., Kirchner V., Schuster R., Electrochemical micro machining with ultra short voltage pulses-a versatile method with lithographic precision, Electrochimia Acta 48(2003) 3213–3219.
109.
Rathod V., Doloi B., Bhattacharyya B., Parametric Investigation into the Fabrication of Disk Microelectrodes by Electrochemical Micromachining, Journal of Micro- and Nano-Manufacturing, Vol. 1/ 041005-1-041005-11, December 2013
110.
Wang J.J.J., et al., Fabrication of wedge-shape tool via electrochemical micromachining with diamond-like carbon coating, Journal of Materials Processing Technology 187–188[2007]264–269.
111.
Landolt D., Chauvy P. F., Zinger O., Electrochemical micro machining, polishing and surface structuring of metals: fundamental aspects and new developments, Electrochimia Acta 48(2003) 3185–3201.
112.
Datta M., Landolt D., Fundamental aspects and applications of electrochemical micro fabrication, Electrochimia Acta 45(2000) 2535–2558
113.
Bassu M., Strambini L.M., Barillaro G., Advances in Electrochemical Micromachining of Silicon: Towards MEMS Fabrication, Procedia Engineering 25(2011) 1653–1656.
114.
Munda J., Malapati M., Bhattacharyya B., Control of microspark and stray-current effect during EMM process, Journal of Materials Processing Technology 194(2007) 151–158.
115.
Wang M., et al., Electrochemical machining of the spiral internal turbulator, International Journal of Advanced Manufacturing Technology 49(2010) 969–973.
116.
Jo C.H., Kim B.H., Chu C.N., Micro electrochemical machining for complex internal micro features, CIRP Annals -Manufacturing Technology 58(2009) 181–184.
117.
Bo Hyun K., Byung Jin P., Chong Nam C., Fabrication of multiple electrodes by reverse EDM and their application in micro ECM, Journal of Micromechanics and Microengineering 16(2006) 843.
118.
Nguyen M.D., Rahman M., Wong Y.S., Enhanced surface integrity and dimensional accuracy by simultaneous micro- ED/EC milling, CIRP Annals - Manufacturing Technology 61(2012) 191–194.
119.
Kunieda M., et al., Electrochemical micromachining using flat electrolyte jet, CIRP Annals - Manufacturing Technology 60(2011) 251–254.
120.
Hong Shik S., Hyun K. B., Chong Nam C., Analysis of the side gap resulting from micro electrochemical machining with a tungsten wire and ultrashort voltage pulses, Journal of Micromechanics and Microengineering 18(2008)075009.
121.
Kunieda M., Mizugai K., Watanabe S., Shibuya N., Iwamoto N., Electrochemical Micromachining using Flat Electrolyte Jet, CIRP Annals, Manufacturing Technology 60(2011) 251–254.
122.
Zinger O., Chauvy P.F., Landolt D., Scale-Resolved Electrochemical Surface Structuring of Titanium for Biological Applications, J. Electrochem. Soc., 150(2003) B495.
123.
Kock M., Kirchner V., Schuster R., Electrochemical Micromachining with Ultrashort Voltage Pulses - a Versatile Method with Lithographical Precision, Electrochemical Acta 48 (2003) 3213–3219.
124.
Trimmer A. L., Hudson J. L., Kock M., Schuster R., Single-step Electrochemical Machining of Complex Nanostructures with Ultrashort Voltage Pulses, Applied Physics Letters 82 (2003) 3327–3329.
125.
Karunakaran K., Pushpa V., Akula S., Suryakumar S., Techno-economic analysis of hybrid layered manufacturing, International Journal of Intelligent Systems Technologies and Applications 4(2008) 161–176.
126.
Heisel U., Wallaschek J., Eisseler R., Potthast C., Ultrasonic deep hole drilling in electrolytic copper ECu 57, CIRP Annals-Manufacturing Technology 57(2008) 53–56.
127.
Lauwers B., Klocke F., Klink A., Hybrid processes in manufacturing, CIRP Ann-Manuf Techn 63(2014) 561–583.
128.
Curtis D.T., Soo S.L., Aspinwall D.K., Electrochemical superabrasive machining of a nickel-based aeroengine alloy using mounted grinding points, CIRP Ann-Manuf Techn 58(2009) 173–176.
129.
Tehrani A.F., Atkinson J., Overcut in pulsed electrochemical grinding, P I Mech Eng B-J Eng 214(2000) 259–269.
130.
Bhattacharyya B., Doloi B., Sorkhel S.K, Experimental investigations into electrochemical discharge machining (ECDM) of non-conductive ceramic material, Journal of Materials Processing Technology 95(1999) 145–154.
131.
Jain V.K., Adhikary S., On the mechanism of material removal in electrochemical spark machining of quartz under different polarity conditions, Journal of Materials Processing Technology 200(2008) 460–470.
132.
Allesu K., Ghosh A., Muju M.K., Preliminary qualitative approach of a proposed mechanism of material removal in electrical machining of glass, Eur. J. Mech. Eng. 36 (1992) 202–207.
133.
Fascio V., Wüthrich R., Bleuler H., Spark assisted chemical engraving in the light of electrochemistry, Electrochim. Acta 49 (2004) 3997–4003.
134.
Tandon S., Jain V.K., Kumar P., Rajurkar K.P., Investigations into machining of composites, Precis. Eng. 12 (1990) 227–238.
135.
Langen H., Breguet J.M., Bleuler H., Renaud Ph, Masuzawa T., Micro electrochemical discharge machining of glass, Int. J. Electr. Mach. 3 (1998) 65–69.
136.
Crichton I.M., Mcgeough J.A., Studies of the discharge mechanisms in electrochemical arc machining, J. Appl. Electrochem. 15 (1985) 113–119.
137.
Cook N.H., Foote G.B., Jordan P., Kalyani B.N., Experimental studies in electro machining, J. Eng. Ind. 95 (1973) 945–950.
138.
Khairy A.B.E., Mcgeough J.A., Die-sinking by electro erosion-dissolution machining, CIRP Ann. Manuf. Technol. 39 (1990) 191–195.
139.
Didar T.F., Dolatabadi A., Wüthrich R., Characterization and modeling of 2D glass micro-machining by spark-assisted chemical engraving (SACE) with constant velocity, J. Micromech. Micro Eng. 18 (2008) 9.
140.
Jain V.K., Chak S.K., Electrochemical spark trepanning of alumina and quartz, Mach. Sci. Technol. 4 (2000) 277–290.
141.
Furutani K., Maeda H., Machining a glass rod with a lathe-type electro-chemical discharge machine, J. Micromech. Microeng. 18 (2008) 8.
142.
Schöpf M., Beltram I., Boccadoro M., Kramer D., ECDM (Electrochemical discharge machining) a new method for trueing and dressing of metal bonded diamond grinding tools, CIRP Ann. Manuf. Technol. 50 (2001) 125–128.
143.
Peng W.Y., Liao Y.S., Study of electrochemical discharge machining technology for slicing non-conductive brittle materials, J. Mater. Process. Technol. 149 (2004) 363–369.
144.
Solignac D., Sayah A., Constantin S., Freitag Rand M., Giijs M. A., Powder blasting for realization of microchips for bio-analytic applications, Sensors Actuators A 92(2001) 388–93.
145.
Liu C., Chen J., Engel J., Zou J., Wang X., Fan Z., Ryu K., Shaikh K., Bullen D., Polymer micromachining and applications in sensors, microfluidics, and nanotechnology, 226th National Meeting of the American Chemical Society (ACS) 2003 (NewYork, September 11–17).
146.
Mills C. A., Martinez E., Bessueille F., Villanueva G., Bausells J., Samitier J., Errachid A., Production of structures for micro fluidic using polymer imprint techniques, Microelectron. Eng. 78–9(2005) 695–700.
147.
Holger B., Laurie E. L., Polymer micro fluidic devices, Talanta 56(2002) 267–87.
148.
Lai S., Lee L. J., Yu L., Koelling K. W., Madou M. J. Micro-and nano-fabrication of polymer based micro fluidic platforms for bioMEMS applications Proc. Materials Research Society Symp. 729(2002) (U1.7.1-U1.7.11)
149.
Getu H., Ghobeity A., Spelt J. K., Papini M. Abrasive jet micromachining of polymethylmethacrylate, Wear 263(2007) 1008–15.
150.
151.
Singh R., Walia R. S., Study the effects of centrifugal force on abrasive flow machining process. International Journal of Research in Mechanical Engineering and Technology 2(2012) 34–39.
152.
Singh R., Walia R. S., Suri N. M., Study of parametric effect on surface roughness improvement for hybrid centrifugal force assisted abrasive flow machining process, International Journal of Latest Research in Science and Technology 1(2012) 198–201.
153.
Nouraei H., Kowsari K., Papini M., Spelt J.K., Operating parameters to minimize feature size in abrasive slurry jet micro-machining, Precision Engineering 44 (2016) 109–123.
154.
Liu Z., Nouraei H., Papini M., Spelt J.K., Abrasive enhanced electrochemical slurry jet micro-machining: Comparative experiments and synergistic effects, Journal of Materials Processing Technology 214 (2014) 1886–1894.
155.
Shukla R., Singh D., Experimentation investigation of abrasive water jet machining parameters using Taguchi and Evolutionary optimization techniques, Swarm and Evolutionary Computation, doi:10.​1016/​j.​swevo.​2016.​07.​002.
156.
Thoe T.B., Aspinwall D.K., Wise M. L.H., Review on Ultrasonic Machining, International Journal of Machine Tools & Manufacture. 38(1998) 239–355.
157.
Yu Z., Rajurkar K.P., Tandon A., Study of 3D Micro-Ultrasonic Machining, Journal of Manufacturing Science and Engineering Vol. 126; 2004.
158.
Markov A.I., Neppiras E., Ultrasonic machining of intractable materials, Iliffe, London, 1966.
159.
Lv Z., Huang C.Z., Zhu H.T, Wang J., Wang Y., Yao P., A research on ultrasonic assisted abrasive water jet polishing of hard-brittle materials, Int. J. Adv. Manuf. Technol. 78 (2015) 1361–1369.
160.
Rhoades L., Abrasive flow machining: a case study, Journal of Material Processing Technology 28 (1991) 107–116.
161.
Davies P.J., Fletcher A.J., The assessment of the rheological characteristics of various polyborosilixane/grit mixtures as utilized in the abrasive flow machining, Proceedings of Institute of Mechanical Engineers 209 (1995) 409–418.
162.
Raju H.P., Narayanasamy K., Srinivasa Y.G., Krishnamurthy R., Characteristics of extrude honed SG iron internal primitives, Journal of Materials Processing Technology 166 (2005) 455–464.
163.
Rajesha S., G Venkatesh., Sharma A.K., Kumar P., Performance study of a natural polymer based media for abrasive flow machining, Indian Journal of Engineering & Materials Sciences 17 (2010) 407–413.
164.
Kumar R., Murtaza Q., Walia R.S., Three Start Helical Abrasive Flow Machining for Ductile Materials, 3rd International Conference on Materials Processing and Characterization 6 (2014) 1884–1890.
165.
Steigerwald J. M., Murarka S. P., Gutmann R. J., Chemical Mechanical Planarization of Microelectronic Materials Wiley, New York, 1997, pp. 1–12.
166.
Mori Y., Yamauchi K., Endo K., Mechanism of atomic removal in elastic emission machining, Precision Engineering 10(1)(1988) 24–28
167.
Hiraoka D., Hamazaki K., Matsumura K., Research on developing a prototype NC EEM machine for machining high-power laser mirrors, Koyo Engineering Journal, 155E(1999) 42–47.
168.
Mori Y., Ikawa N., Okuda T., Yamagata K., Numerically Controlled Elastic Emission Machining; Technology reports of the Osaka University 26(1976) 283–294.
169.
Endo K., Namba H., New machining method for making precise and very smooth mirror surfaces made from Cu and Al alloys for synchrotron radiation optics, Rev Sci ln- strum 60(1989)2.120-2.123.
170.
Chang G.W., Yan B.H., Hsu R.T., Study on cylindrical magnetic abrasive finishing using unbonded magnetic abrasives, Int. J. of Mach. Tool & Manuf 2002; 42: 575–583.
171.
Yan B.H., Chang G.W., Cheng J.T., Hsu R.T., Electrolytic magnetic abrasive finishing, Int J of Mach Tool & Manuf 43(2003) 1355–1365.
172.
Yin S., Shinmura T., Vertical vibration-assisted magnetic abrasive finishing and deburring for magnesium alloy, Int J of Mach Tool & Manuf 44(2004) 1297–1303.
173.
Yamaguchi H., Shinmura T., Sekine M., Uniform Internal Finishing of SUS304 Stainless Steel Bent Tube Using a Magnetic Abrasive Finishing Process, J of Manuf Sci & Eng. 127(2005) 605–611.
174.
Shinmura T., Takazawa K., Hatano E., Study on magnetic abrasive finishing – effects of various types of magnetic abrasives on finishing characteristics, Bull Japan Soc of Prec Eng 21 (1987) 139–141.
175.
Shinmura T., Takazawa K., Hatano E., Matsunaga M., Study on magnetic abrasive finishing, Annals of the CIRP 39(1990) 325–328.
Metadaten
Titel
Non-traditional Micromachining Processes: Opportunities and Challenges
verfasst von
S. Debnath
S. Kunar
S. S. Anasane
B. Bhattacharyya
Copyright-Jahr
2017
Buch
Non-traditional Micromachining Processes

Print ISBN: 978-3-319-52008-7

Electronic ISBN: 978-3-319-52009-4

Copyright-Jahr: 2017

DOI
https://doi.org/10.1007/978-3-319-52009-4_1

Premium Partner

    Marktübersichten

    Die im Laufe eines Jahres in der „adhäsion“ veröffentlichten Marktübersichten helfen Anwendern verschiedenster Branchen, sich einen gezielten Überblick über Lieferantenangebote zu verschaffen. 

    Zur Marktübersicht
    Bildnachweise