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Journal of Materials Science

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23.05.2016 | Original Paper

Optical and microstructural characterization of multilayer Pb(Zr_0.52Ti_0.48)O₃ thin films correlating ellipsometry and nanoscopy

Erschienen in: Journal of Materials Science | Ausgabe 17/2016

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Abstract

Optical and microstructural characteristics of sol–gel-deposited multilayer Pb(Zr_0.52Ti_0.48)O₃ thin films were investigated employing several analytical techniques both invasive and non-destructive types. Optical responses probed by variable angle spectroscopic ellipsometry (VASE) were used to derive the optical properties and geometrical parameters of the multilayer thin films. STEM and TEM studies were performed to verify the nano-structural specifics and to correlate the results obtained using VASE. Crystallographic orientation and epitaxial interrelations of the layers were also investigated using selected area diffraction patterns with compositional profiles derived from energy dispersive X-ray analysis. Ferroelectric domain switching of the sol–gel-deposited films were studied by Piezoelectric Force Microscopy (PFM) revealing both the polarization–electric field hysteresis (P-E loop) relation and the butterfly-shaped surface displacement amplitude responses. The advantages and limitations of the non-invasive VASE characterization technique in terms of resolving a multilayer structure of thin films were explored in detail.

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Titel: Optical and microstructural characterization of multilayer Pb(Zr0.52Ti0.48)O3 thin films correlating ellipsometry and nanoscopy
Publikationsdatum: 23.05.2016
Erschienen in: Journal of Materials Science / Ausgabe 17/2016
Print ISSN: 0022-2461
Elektronische ISSN: 1573-4803
DOI: https://doi.org/10.1007/s10853-016-0064-8

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