Optimization of micro-thermal actuator for flying height control

In this paper, a three dimensional finite element model of an entire thermal flying height control slider (TFC) with a detailed read/write transducer structure is created. We used the model to perform a thermal-structural coupled field analysis in order to investigate the transient thermal and protrusion response of the TFC slider. Parameter studies are conducted to identify the dominant parameters to reduce the response time of the heat transfer and thermal protrusion of the actuator. The simulation results show that increasing the heat transfer on the air bearing surface (ABS), reducing the distance from the heater to the ABS, reducing the thickness of alumina of the slider body and replacing the slider materials with Si/SiO₂ can reduce the response time of the heat transfer and thermal protrusion around the actuator. But the effects of the input power and modifying the thermal properties of the shield materials are very small.