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Erschienen in:
1989 | OriginalPaper | Buchkapitel
Particle Identification By Auger Electron Spectroscopy
verfasst von : Kenneth D. Bomben, William F. Stickle
Erschienen in: Particles on Surfaces 2
Verlag: Springer US
Enthalten in: Professional Book Archive
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The use of Auger Electron Spectroscopy (AES) as a method for particle characterization has grown in importance, particularly as semiconductor geometries have become smaller. The surface sensitivity and small analysis size of AES makes it the technique of choice for the characterization of sub-micron particles because X-ray techniques approach the limit of their spatial and depth resolution. AES provides particle identification with a minimum of interference from the surrounding matrix. The analysis and identification of particles found during the processing of electronic circuits is discussed. A comparison of surface and near-surface techniques for applicability to sub-micron particle analysis is also made.