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Erschienen in:
2012 | OriginalPaper | Buchkapitel
Pull-In Parameters of Contact Electrostatic Microswitches Using Equilibrium Stability Analysis
verfasst von : Hao-qun Li, Zhi-jie Zhang, Li-hua Chen, Jin-hong Fan
Verlag: Springer Berlin Heidelberg
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Pull-in parameters analysis, such as pull-in voltage and pull-in displacement, of contact type electrostatically actuated MEMS switches is investigated. Using Euler-Bernoulli beam theory, a cantilever beam model is established. Based on the method of Galerkin decomposition, the model is changed to a discrete modal equations, including nonlinear electrostatic force. Based on the equilibrium stability analysis, pull-in voltage and pull-in displacement are discussed. The simulation results can be used as design tools and rules to improve switch performance.