Ausgabe 4/1999
Inhalt (10 Artikel)
Role of the film texturing on the response of particle detectors based on CVD diamond
G. Faggio, G. Messina, S. Santangelo, G. V. Rinati
Manufacture of diffraction grating on tiny parts by means of ultraprecision milling
K. Sawada, S. Odaka, T. Kawai, T. Hirai, Y. Takeuchi, T. Sata
Multilayer polyimide film substrates for interconnections in microsystems
A. Fach, Y. Athanassov, U. Brunner, D. Hablützel, B. Ketterer, J. Link
A study of the effect of the fabrication process on diffusion in a layered thin film
T. Hirasawa, H. Kotera, T. Yamamoto, S. Shima
Electrostatic comb-drive actuators made of polyimide for actuating micromotion convert mechanisms
D. Kamiya, T. Hayama, M. Horie
Control tribological and mechanical properties of MEMS surfaces. Part 2: nanomechanical behavior of self-lubricating ultrathin films
Z. Rymuza, M. Misiak, L. Kuhn, K. Schmidt-Szałowski, Z. Rżanek-Boroch
Applications and simulation of unconventional bulk-micromachining using underetching of {100} silicon planes
G. Schröpfer, M. de Labachelerie, C. R. Tellier
Finite element investigation into proposed bearing mechanism for a fluid driven micro actuator
R. S. Dhariwal, S. M. Flockhart