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2021 | OriginalPaper | Buchkapitel

3. Stages of MEMS Product Development

verfasst von : Alissa M. Fitzgerald, Carolyn D. White, Charles C. Chung

Erschienen in: MEMS Product Development

Verlag: Springer International Publishing

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Abstract

The MEMS field may be rapidly maturing, but there are still few shortcuts through the stages of MEMS product development. Whether you are launching a breakthrough product or a next-generation design of an existing product, your product must go through multiple stages of development to achieve commercialization. This chapter outlines the significance and the challenges of five stages of MEMS product development: proof-of-concept prototype, advanced prototypes, foundry feasibility, foundry pilot production, and foundry production. Understanding why you need these stages, when these stages occur, and what evaluation gates exist between stages can ease your company through the MEMS product development process and, most importantly, ensure you have enough resources to reach your final goal.

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Fußnoten
1
In this book, we have assumed that process qualification occurs at the start of the pilot production stage. At some foundries, this is done at the end of the feasibility stage and the pilot production stage consists only of fabrications runs based on the final process flow.
 
2
In this book, we have generally assumed that the wafer production for a MEMS product company will take place at a MEMS foundry. However, the concepts and advice provided in this book would also be valid for products made within a company’s captive MEMS fab (see Chap. 2 for more information on captive fabs vs. foundries). Many large integrated companies run their captive fab as a separate business unit and would regard you as an internal customer.
 
3
A MEMS foundry platform process is a foundry-defined process flow for a given type of MEMS device, usually a pressure sensor or motion sensor, with accompanying design rules that must be rigidly followed.
 
Literatur
1.
Zurück zum Zitat McDonald CJ (1998) The evolution of Intel’s Copy EXACTLY! technology transfer method. Intel SEMATECH McDonald CJ (1998) The evolution of Intel’s Copy EXACTLY! technology transfer method. Intel SEMATECH
2.
Zurück zum Zitat Huff M (2020) Process variations in microsystems manufacturing. Springer Nature, SwitzerlandCrossRef Huff M (2020) Process variations in microsystems manufacturing. Springer Nature, SwitzerlandCrossRef
Metadaten
Titel
Stages of MEMS Product Development
verfasst von
Alissa M. Fitzgerald
Carolyn D. White
Charles C. Chung
Copyright-Jahr
2021
DOI
https://doi.org/10.1007/978-3-030-61709-7_3

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