1 Introduction
2 Methodology
3 Data Acquisition
3.1 Initial Residual Stress
3.2 Machining Stress
Machine | Pressure (psi) | Upper plate rotation speed (r/min) | Lower plate rotation speed (r/min) | Slurry | Processing time (min) |
---|---|---|---|---|---|
Double-sided lapping | 1.5 | 40 | 40 | Water | 30 |
3.3 Double-Sided Removal Rate
4 Simulation Results
4.1 Double-Sided Removal Rate
Parameter | Value |
---|---|
Young’s modulus (MPa) | 119000 |
Poisson’ s ratio | 0.34 |
Density (kg/m3) | 8960 |
4.2 Effect of Machining Stress
5 Experiment Verification
Effect factors | Initial residual stress | Machining stress | |
---|---|---|---|
Finite element simulation deformation value (μm) | 20.96 | Strategy I | Strategy II |
0.09 | 0.29 | ||
The actual measured deformation value (μm) | 27.12 |
Machine | Pressure (psi) | Upper plate rotation speed (r/min) | Lower plate rotation speed (r/min) | Slurry | Processing time (min) |
---|---|---|---|---|---|
Double-sided lapping | 1.5 | 10 | 40 | Water | 30 |