1990 | OriginalPaper | Buchkapitel
The LIGA Process for Microsystems
verfasst von : W. Ehrfeld
Erschienen in: Micro System Technologies 90
Verlag: Springer Berlin Heidelberg
Enthalten in: Professional Book Archive
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Threedimensional microstructures can be fabricated from metals, metal alloys, plastics and ceramic materials with submicron tolerances by means of the socalled LIGA process which is based on a combination of lithography, electroforming and molding processes. Since a large variety of materials can be processed without any restrictions in the cross-sectional shape of the microstructures, a wide range of applications exists. Present development work deals with sensors for automotive technology, optical components for satellite experiments, optical demultiplexers and fiber-chip coupling elements for optical communications, micronozzles and microvalves for fluid technology, microfiltration devices, detachable electrical micro-connectors, ultrasonic sensors for medical diagnosis, and various further microstructure products. In view of the versatility of the LIGA process, it is to be expected that it will play a major role in realizing future innovative microsystems.