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2015 | Buch

Introduction Kapitel lesen Erstes Kapitel lesen

Buildings for Advanced Technology

herausgegeben von: Ahmad Soueid, E. Clayton Teague, James Murday

Verlag: Springer International Publishing

Buchreihe : Science Policy Reports

Enthalten in: Springer Professional "Wirtschaft+Technik" , Springer Professional "Technik" , Springer Professional "Wirtschaft"

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SUCHEN

Über dieses Buch

This book deals with the design and construction of buildings for nanoscale science and engineering research. The information provided in this book is useful for designing and constructing buildings for such advanced technologies as nanotechnology, nanoelectronics and biotechnology. The book outlines the technology challenges unique to each of the building environmental challenges outlined below and provides best practices and examples of engineering approaches to address them:
• Establishing and maintaining critical environments: temperature, humidity, and pressure
• Structural vibration isolation
• Airborne vibration isolation (acoustic noise)
• Isolation of mechanical equipment-generated vibration/acoustic noise
• Cost-effective power conditioning
• Grounding facilities for low electrical interference
• Electromagnetic interference (EMI)/Radio frequency interference (RFI) isolation
• Airborne particulate contamination
• Airborne organic and chemical contamination
• Environment, safety and health (ESH) considerations
• Flexibility strategies for nanotechnology facilities
The authors are specialists and experts with knowledge and experience in the
control of environmental disturbances to buildings and experimental apparatus.

Inhaltsverzeichnis

Frontmatter
Chapter 1. Introduction
Abstract
Nanotechnology is the understanding and control of matter at dimensions between approximately 1 and 100 nm. Encompassing nanometer-scale science, engineering, and technology, nanotechnology involves imaging, measuring, modeling, and manipulating matter at this length scale. Nanostructured materials can exhibit unusual physical, chemical, and biological properties and can enable novel applications not possible in bulk materials of the same chemical composition.
Ahmad Soueid, E. Clayton Teague, James Murday
Chapter 2. Design Criteria
Abstract
In the context of advanced technology laboratories, the “environment” is defined as the surrounding conditions under which sensitive laboratory equipment must be maintained for optimal performance. The cutting edge science of measurement and manipulation on an atomic scale requires extraordinary environmental stability. In large measure, many of the nanotechnology research accomplishments are due to facilities built to meet the stringent requirements compelled by nanometer-scale research programs. This chapter addresses the state of emerging guidelines and recommended practices, and discusses the array of technical and human criteria that emerge in the design of laboratories and cleanrooms supporting nanoscale science and technology laboratories. It sets the stage for the subsequent chapters.
Ahmad Soueid, E. Clayton Teague, James Murday
Chapter 3. Temperature and Humidity Control
Abstract
The instruments to manipulate atoms or observe their motions require stricter environmental specifications than prior generations of equipment. The primary focus of this chapter is temperature and humidity control, two of the most critical variables that affect work at the nanometer scale. In basic science laboratories, environmental control to an accuracy of ±0.5 to 0.25 °C and ±5 to 10 % relative humidity (RH) is adequate. For atomic-scale measurements, a much more highly controlled environment is required. Because test equipment is extremely sensitive to temperature and humidity variations, ±0.1 to 0.01 °C and as close to ±1 % RH as possible is needed. The preferred standard air condition for nanoscale research is 20 °C at 40–45 % RH. This chapter addresses the various design tradeoffs and control systems needed to accomplish these standards.
Ahmad Soueid, E. Clayton Teague, James Murday
Chapter 4. Vibration Isolation
Abstract
Vibration control involves designing architectural, structural, mechanical, and electrical systems, both independently and in combination, to not generate or propagate vibration that is detrimental to research activities. The environment itself must be considered as an experimental variable and constrained to known and closely controlled values. For “routine measurements” the requirement is root mean square (RMS) amplitude displacement of 0.025 micrometer (μm) at frequencies between 1 and 20 Hz and RMS velocity amplitude of 3 μm/s at frequencies between 20 and 100 Hz. The metrology requirements are RMS velocity amplitude of 3 μm/s at frequencies below 4 Hz; RMS velocity amplitude of 0.75 μm/s at frequencies between 4 and 100 Hz. This chapter addresses the structural design of the building, the layout of the process and mechanical equipment, and the equipment layout in the laboratory or production spaces that are critical to achieving an acceptable level of vibration within specific areas.
Ahmad Soueid, E. Clayton Teague, James Murday
Chapter 5. Acoustic Noise
Abstract
Research and manufacturing instruments are sensitive to internal vibration that can be excited by the external acoustic environment. The degree to which acoustic excitation occurs depends on many factors, but it happens primarily when there is correspondence between the resonance characteristics of the instrument and the frequency content of the acoustic environment. For high performance measurement and imaging laboratories, a noise criteria of NC 25 is recommended; standard laboratories use NC 40. This chapter addresses the various sources of acoustic noise; the mechanisms by which it can interfere with instruments; an approach to determining sources of noise generated in and propagated by the building; and techniques used to isolate the lab or instrument from these sources.
Ahmad Soueid, E. Clayton Teague, James Murday
Chapter 6. Disturbances due to Building Mechanical Systems
Abstract
Today’s advanced technology buildings require extensive mechanical equipment for building heating, cooling, ventilation, and filtration. The challenge is to design, construct, and maintain an environment that is relatively quiet and relatively free of vibration, both for research personnel, research equipment, and neighboring facilities. Reduced thresholds for both noise and vibration levels from all sources, including systems effects such as flow turbulence in ducts and air inlets have required that every aspect of building mechanical systems be carefully studied and designed to minimize such effects. This chapter addresses the vibration and noise induced by building mechanical systems and presents several cases in which these problems were solved.
Ahmad Soueid, E. Clayton Teague, James Murday
Chapter 7. Electric Power Grounding and Conditioning
Abstract
Minimization of electrical noise is a critical factor in the design and construction of all sensitive electrical instruments. This chapter addresses two important sources of electrical noise commonly found in laboratory equipment and hardware, and methods for their minimization. First, electrical noise generated from improper grounding of system components and associated hardware. Appropriate National Electrical Code is referenced for such terms as grounding conductors, grounded conductors, equipment grounding conductors and grounding electrode systems. Basic grounding requirements for every facility and a methodology for reducing electrical interference in facility design are provided. Second, common problems arising because of the instability of power source voltages, means to measure these power source variations and how they can be prevented by applying power conditioning devices to critical circuitry are described.
Ahmad Soueid, E. Clayton Teague, James Murday
Chapter 8. EMI/RFI: Electromagnetic and Radio-Frequency Interference
Abstract
A myriad of man-made and extra-terrestrial sources in the non-ionizing electromagnetic (EM) energy range (0 Hz to 750 THz) emanate electromagnetic and radio-frequency interference (EMI/RFI). All sources with emissions throughout this broad frequency range can potentially degrade the performance of high-resolution imaging instruments such as SEM, TEM, FIB, and STM. This chapter discusses: (a) the most effective methods to measure ambient EMI/RFI emission levels around proposed and existing building sites; (b) units of measurement and susceptibility; (c) recommended minimal EMI/RFI thresholds for scientific tools; and (d) AC Extremely Low Frequency (ELF) magnetic flux density simulations at power frequencies. Finally, corrective strategies and costs to attenuate and control elevated EMI/RFI environments will be presented including active cancellation systems, zero milligauss shielding systems, Rigid Galvanized Sheet (RGS)/Electrical Metallic Tubing (EMT) conduits for electrical power distribution, and other mitigation techniques.
Ahmad Soueid, E. Clayton Teague, James Murday
Chapter 9. Airborne Contamination
Abstract
This chapter provides a broad overview of the sources of airborne contamination that may occur in buildings designed for advanced technology instruments and fabrication facilities. International standards for classifying levels of cleanliness of the air in these spaces in terms of particle size and particle concentration are briefly described. This is followed by an overview of cleanroom design principles and the filtering systems employed to achieve the various standards of air cleanliness in the cleanrooms.
Ahmad Soueid, E. Clayton Teague, James Murday
Chapter 10. Bio-containment
Abstract
This chapter compares and contrasts the design of nanotechnology cleanrooms and bio-containment Biological Safety Laboratories. As examples, suiting up in a cleanroom is necessary to protect product or test specimens, while suiting up in a bio-containment facility is necessary to protect people. A parallel important difference between the two types of spaces is that nanotechnology cleanrooms typically have a slight over pressurization with respect to adjacent building spaces to prevent outside contamination from coming into the clean room while Biological Safety rooms are under pressurized to be sure that nothing gets out of the rooms. Design considerations for space organization, construction, ventilation requirements, space outfitting, furnishings, finishes, and fine details are also compared and contrasted. Finally, considerations for collocating cleanrooms and Biological Safety Laboratories are covered and the Birck Nanotechnology Center at Purdue University is used as an example of the trade-offs that must be made when collocating.
Ahmad Soueid, E. Clayton Teague, James Murday
Chapter 11. Case Studies and Building Statistics
Abstract
This chapter is divided into two parts. Part A gives detailed case studies of four completed facilities for research at the nanoscale; each is designed to technical criteria specific to the particular science program conducted at the facility. Part B provides short building statistics summaries of a number of completed facilities for nanotechnology R&D, including metrics and design criteria for the sake of comparison.
Ahmad Soueid, E. Clayton Teague, James Murday
Backmatter
Metadaten
Titel
Buildings for Advanced Technology
herausgegeben von
Ahmad Soueid
E. Clayton Teague
James Murday
Copyright-Jahr
2015
Electronic ISBN
978-3-319-24892-9
Print ISBN
978-3-319-24890-5
DOI
https://doi.org/10.1007/978-3-319-24892-9