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2015 | OriginalPaper | Buchkapitel

4. Vibration Isolation

verfasst von : Ahmad Soueid, E. Clayton Teague, James Murday

Erschienen in: Buildings for Advanced Technology

Verlag: Springer International Publishing

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Abstract

Vibration control involves designing architectural, structural, mechanical, and electrical systems, both independently and in combination, to not generate or propagate vibration that is detrimental to research activities. The environment itself must be considered as an experimental variable and constrained to known and closely controlled values. For “routine measurements” the requirement is root mean square (RMS) amplitude displacement of 0.025 micrometer (μm) at frequencies between 1 and 20 Hz and RMS velocity amplitude of 3 μm/s at frequencies between 20 and 100 Hz. The metrology requirements are RMS velocity amplitude of 3 μm/s at frequencies below 4 Hz; RMS velocity amplitude of 0.75 μm/s at frequencies between 4 and 100 Hz. This chapter addresses the structural design of the building, the layout of the process and mechanical equipment, and the equipment layout in the laboratory or production spaces that are critical to achieving an acceptable level of vibration within specific areas.

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Vorheriges Kapitel Temperature and Humidity Control

Nächstes Kapitel Acoustic Noise

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Titel: Vibration Isolation
verfasst von: Ahmad Soueid
E. Clayton Teague
James Murday
Verlag: Springer International Publishing
Buch: Buildings for Advanced Technology
Print ISBN: 978-3-319-24890-5

Electronic ISBN: 978-3-319-24892-9

Copyright-Jahr: 2015
DOI: https://doi.org/10.1007/978-3-319-24892-9_4

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