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The International Journal of Advanced Manufacturing Technology
Erschienen in: The International Journal of Advanced Manufacturing Technology 3-4/2022

14.06.2022 | ORIGINAL ARTICLE

Characteristics of DLC films doped with multi-element alloy

verfasst von: Xiuyan Li, Chun-Sheng Chen, Chung-Chen Tsao, Chih-Chung Hu, Cihai Chen, Chun-Yao Hsu

Erschienen in: The International Journal of Advanced Manufacturing Technology | Ausgabe 3-4/2022

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Abstract

Multi-element alloy doped diamond-like carbon (DLC) films were coated using sputtering with a (AlCrNbSiTiV) target. TEM and XRD results indicated DLC film had an amorphous compound feature incorporating polycrystalline phases around the face-centered cubic structure, which were embedded into the amorphous carbon matrix. The Raman spectra and mechanical characteristics of the DLC film sample were associated with concentration changes in the carbon and the multi-element alloy doped in the DLC films, which depended on the DC power. This investigation indicated that improved mechanical properties, including hardness and the elastic recovery rate, can be obtained from the multi-element alloy doped DLC film coated with proper DC sputtering power. These results demonstrated a proper DC power modifies the structure of multi-element alloy doped DLC film and improves its mechanical performance. This study should pave the way for the development of DLC film and elevate its application in various industries.
Vorheriger Artikel Thickness distribution uniformity improvement and forming pressure reduction of stepped tubular components by axial hydro-pressing method
Nächster Artikel Milling cutter wear prediction method under variable working conditions based on LRCN

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Literatur
1.
Yeldose BC, Ramamoorthy B (2008) Characterization of DC magnetron sputtered diamond-like carbon (DLC) nano coating. Int J Adv Manuf Technol 38:705–717CrossRef
2.
Wang CJ, Cheng LD, Liu Y, Zhang H, Wang Y, Shan DB, Guo B (2019) Research on micro-deep drawing process of concial part with ultra-thin copper foil using multi-layered DLC film-coated die. Int J Adv Manuf Technol 100:569–575CrossRef
3.
Campos Rubio JC, Guasca Gonzalez AG, Barcelos DJ, Camara MA, Mata Cabrera F, de Oliveira LW (2021) Tribological analysis and performance of a DLC coating on tungsten carbide micro-tools to use at tantalum precision machining. Int J Adv Manuf Technol 116(1):719–732CrossRef
4.
Hao T, Du J, Su G, Zhang P, Sun Y, Zhang J (2020) Mechanical and cutting performance of cemented carbide tools with Cr/x/DLC composite coatings. Int J Adv Manuf Technol 106(11):5241–5254CrossRef
5.
Peckus D, Meskinis S, Vasiliauskas A, Rajackaite E, Andrulevicius M, Kopustinskas V, Tamulevicius S (2020) Structure and optical properties of diamond like carbon films containing aluminium and alumina. Appl Surf Sci 529:7040–147053CrossRef
6.
Imai T, Harigai T, Tanimoto T, Isono R, Iijima Y, Suda Y, Ito M (2019) Hydrogen-free fluorinated DLC films with high hardness prepared by using T-shape filtered arc deposition system. Vacuum 167:536–541CrossRef
7.
Li X, Tang W, Chen C, Xu C (2021) Effect of the methane flow ratio on the structural and mechanical properties of high-entropy alloy co-doped DLC films. Diam Relat Mat 117:108486–108496CrossRef
8.
Ren Z, Chiang R, Qin H, Vasudevan VK, Doll GL, Dong Y, Ye C (2020) Tribological performance of 52,100 steel subjected to boron-doped DLC coating and ultrasonic nanocrystal surface modification. Wear 458–459:203398–203409CrossRef
9.
Onodera S, Fujii S, Moriguchi H, Tsujioka M, Hirakuri K (2020) Antibacterial property of F doped DLC film with plasma treatment. Diam Relat Mat 107:107835–107842CrossRef
10.
Xu X, Guo P, Li X, Lee KR, Cui P, Wang A (2021) Exploring the tribological behavior of Ti/Al-DLC/PAO/graphene oxide nanocomposite system. Ceram Int 47:11052–11062CrossRef
11.
Ji L, Wu Y, Li H, Song H, Liu X, Ye Y, Chen J, Zhou H, Liu L (2015) The role of trace Ti concentration on the evolution of microstructure and properties of duplex doped Ti (Ag) /DLC films. Vacuum 115:23–30CrossRef
12.
Bouabibsa I, Lamri S, Alhussein A, Minea T, Sanchette F (2018) Plasma investigations and deposition of Me-DLC (Me=Al, Ti or Nb) obtained by a magnetron sputtering-RFPECVD hybrid process. Surf Coat Technol 354:351–359CrossRef
13.
Yetim AF, Kovac H, Kasapoglu AE, Bozkurt YB, Celik A (2021) Influences of Ti, Al and V metal doping on the structural, mechanical and tribological properties of DLC films. Diam Relat Mat 120:108639–108648CrossRef
14.
Sun L, Guo P, Ke P, Li X, Wang A (2016) Synergistic effect of Cu/Cr co-doping on the wettability and mechanical properties of diamond-like carbon films. Diam Relat Mat 68:1–9CrossRef
15.
Liu ZW, Hsu CY, Wu MC, Tsao CC (2019) The effect of substrate temperature on the properties of (AlCrNbSiTiV)N films deposited by HIPIMS. Int J Adv Manuf Technol 104:4509–4516CrossRef
16.
Chang CH, Li PW, Wu QQ, Wang MH, Sung CC, Hsu CY (2019) Nanostructured and mechanical properties of high-entropy alloy nitride films prepared by magnetron sputtering at different substrate temperatures. Mater Technol 34(6):343–349CrossRef
17.
Wan SF, Zuo DL, Hsiao RC, Kao JY, Yu ZH, Hsu CY (2018) Structure and mechanical properties of (AlCrNbSiTiV)N thin films deposited using reactive direct current magnetron sputtering. Sci Adv Mater 10:1–6CrossRef
18.
Wu CY, Hsiao RC, Hsu CH, Hsieh TH, Kao JY, Hsu CY (2019) Microstructure and mechanical performance of (AlCrNbSiTiV)N films coated by reactive magnetron sputtering. Bull Mat Sci 42:17–26CrossRef
19.
Shahsavari F, Ehteshamzadeh M, Jamal MRN, Irannejad A (2016) Nanoindentation and nanoscratch behaviors of DLC films growth on different thickness of Cr nanolayers. Diam Relat Mat 70:76–82CrossRef
20.
Sha G, Cerezo A (2004) Early-stage precipitation in Al–Zn–Mg–Cu alloy (7050). Acta Mater 52:4503–4516CrossRef
21.
Dhandapani VS, Kang KM, Seo KJ, Kim CL, Kim DE (2019) Enhancement of tribological properties of DLC by incorporation of amorphous titanium using magnetron sputtering process. Ceram Int 45:11971–11981CrossRef
22.
Bouabibsa I, Lamri S, Sanchette F (2018) Structure, mechanical and tribological properties of Me-doped diamond-like carbon (DLC) (Me = Al, Ti, or Nb) hydrogenated amorphous carbon coatings. Coatings 8:370–385CrossRef
23.
Dai W, Kwon SH, Wang Q, Liu J (2018) Influence of frequency and C2H2 flow on growth properties of diamond-like carbon coatings with AlCrSi co-doping deposited using a reactive high power impulse magnetron sputtering. Thin Solid Films 647:26–32CrossRef
24.
Pauschitz A, Kvasnica S, Jisa R, Bernardi J, Koch T, Roy M (2008) Tribological behaviour of Ti containing nanocomposite DLC films under milli-Newton load range. Diam Relat Mat 17:2010–2018CrossRef
25.
Li H, Hu J, Lin G, Dong C (2010) V and N co-doped diamond-like carbon films deposited by pulsed bias arc ion plating. Int J Refract Met Hard Mat 28:544–549CrossRef
26.
Chang KS, Chen KT, Hsu CY, Hong PD (2018) Growth (AlCrNbSiTiV)N thin films on the interrupted turning and properties using DCMS and HIPIMS system. Appl Surf Sci 440:1–7CrossRef
27.
Dai W, Liu J, Geng D, Guo P, Zheng J, Wang Q (2016) Microstructure and property of diamond-like carbon films with Al and Cr co-doping deposited using a hybrid beams system. Appl Surf Sci 388:503–509CrossRef
28.
Jin Y, Wu W, Li L, Chen J, Zhang J, Zuo Y, Fu J (2009) Effect of sputtering power on surface topography of dc magnetron sputtered Ti thin films observed by AFM. Appl Surf Sci 255:4673–4679CrossRef
29.
Zhang M, Xie T, Qian X, Zhu Y, Liu X (2020) Mechanical properties and biocompatibility of Ti-doped diamond like carbon films. ACS Omega 5:22772–22777CrossRef
30.
Dai W, Gao X, Liu J, Kwon SH, Wang Q (2017) Compositionally modulated multilayer diamond-like carbon coatings with AlTiSi multi-doping by reactive high power impulse magnetron sputtering. Appl Surf Sci 425:855–861CrossRef
31.
Pardo A, Aleixandre CG (2011) Metal incorporation strategies in DLC (fullerene-like) thin films grown by ECR-CVD. Vacuum 85:1140–1143CrossRef
32.
Kong W, Yu Z, Hu J (2021) Effect of carburizing treatment on microstructural, mechanical and tribological performances of Cr doped DLC coating deposited on Ti6Al4V alloy. Ceram Int 47:34425–34436CrossRef
33.
Shia X, Guo L, Bai Y, Qiao L (2011) Characterization of coating probe with Ti-DLC for electrical scanning probe Microscope. Appl Surf Sci 257:7238–7244CrossRef
34.
Liu L, Wang T, Huang J, He Z, Yi Y, Du K (2016) Diamond-like carbon thin films with high density and low internal stress deposited by coupling DC/RF magnetron sputtering. Diam Relat Mat 70:151–158CrossRef
35.
Yang W, Guo Y, Xu D, Li J, Wang P, Ke P, Wang A (2015) Microstructure and properties of (Cr:N)-DLC films deposited by a hybrid beam technique. Surf Coat Technol 261:398–403CrossRef
36.
Chen JL, Ji PY, Yang Y, Jin CG, Zhuge LJ, Wu XM (2020) The structure and properties of amorphous diamond-like carbon films deposited by helicon wave plasma chemical vapor deposition. Thin Solid Films 709:138167–138173CrossRef
37.
Wang Q, Zhou F, Zhou Z, Li LKY, Yan J (2017) An investigation on the crack resistance of CrN, CrBN and CrTiBN coatings via nanoindentation. Vacuum 145:186–193CrossRef
38.
Jian SR, Tasi CH, Huang SY, Luo CW (2015) Nanoindentation pop-in effects of Bi2Te3 thermoelectric thin films. J Alloy Comp 622:601–605CrossRef
39.
Wang Z, Zhong X, Jiang L, Qi F, Ouyang X, Wang J, Liao B, Luo J (2020) Effect of interfacial delamination on coating crack in thick diamond-like carbon coatings under indentation. Acta Mech Sin 36:524–535MathSciNetCrossRef
40.
Konkhunthot N, Photongkam P, Wongpanya P (2019) Improvement of thermal stability, adhesion strength and corrosion performance of diamond-like carbon films with titanium doping. Appl Surf Sci 469:471–486CrossRef
41.
Qiang L, Zhang B, Zhou Y, Zhang J (2013) Improving the internal stress and wear resistance of DLC film by low content Ti doping. Solid State Sci 20:17–22CrossRef
42.
Li X, Guo P, Sun L, Zuo X, Zhang D, Ke P, Wang A (2017) Ti/Al co-doping induced residual stress reduction and bond structure evolution of amorphous carbon films: an experimental and ab initio study. Carbon 111:467–475CrossRef
43.
He D, He C, Li W, Shang L, Wang L, Zhang G (2020) Tribological behaviors of in-situ textured DLC films under dry and lubricated conditions. Appl Surf Sci 525:146581–146590CrossRef
44.
Santiago JA, Fernandez-Martinez I, Sanchez-Lopez JC, Rojas TC, Wennberg A, Bellido-Gonzalez V, Molina-Aldareguia JM, Monclus MA, Gonzalez-Arrabal R (2020) Tribomechanical properties of hard Cr-doped DLC coatings deposited by low-frequency HiPIMS. Surf Coat Technol 382:124899–124909CrossRef
45.
Jin J, Duan H, Li X (2017) The influence of plasma nitriding on microstructure and properties of CrN and CrNiN coatings on Ti6Al4V by magnetron sputtering. Vacuum 136:112–120CrossRef
46.
Cai X, Xu Y, Zhao N, Zhong L, Zhao Z, Wang J (2016) Investigation of the adhesion strength and deformation behaviour of in situ fabricated NbC coatings by scratch testing. Surf Coat Technol 299:135–142CrossRef
47.
Ghabchi A, Sampath S, Holmberg K, Varis T (2014) Damage mechanisms and cracking behavior of thermal sprayed WC–CoCr coating under scratch testing. Wear 313:97–105CrossRef
48.
Liu ZY, Guo YB, Sealy MP, Liu ZQ (2016) Energy consumption and process sustainability of hard milling with tool wear progression. J Mater Process Technol 229:305–312CrossRef
Metadaten
Titel
Characteristics of DLC films doped with multi-element alloy
verfasst von
Xiuyan Li
Chun-Sheng Chen
Chung-Chen Tsao
Chih-Chung Hu
Cihai Chen
Chun-Yao Hsu
Publikationsdatum
14.06.2022
Verlag
Springer London
Erschienen in
The International Journal of Advanced Manufacturing Technology / Ausgabe 3-4/2022
Print ISSN: 0268-3768
Elektronische ISSN: 1433-3015
DOI
https://doi.org/10.1007/s00170-022-09519-z

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