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Erschienen in: Optical and Quantum Electronics 14/2023

01.12.2023

Characterizing graphene/HfO2 and HfO2/graphene interfaces through Raman spectroscopy analysis

verfasst von: Yosra Ben Maad, Hosni Ajlani, Alan Durnez, Ali Madouri, Mehrez Oueslati, Abdelaziz Meftah

Erschienen in: Optical and Quantum Electronics | Ausgabe 14/2023

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Abstract

In this paper, we present a comparative analysis of the Raman spectra of two heterostructures: Si/SiO2/HfO2/Graphene and Si/SiO2/Graphene/HfO2. In the former configuration, the Graphene layer is transferred onto the 5 nm-thick HfO2 layer, while the latter configuration involves the growth of à 5 nm-thick HfO2 layer by atomic layer deposition (ALD) on the Graphene layer. The analysis of the Raman spectra has demonstrated significant differences between the interfaces Graphene/HfO2 and HfO2/Graphene. The distinct Raman signatures observed emphasize the critical role played by the specific order and arrangement of the Graphene and HfO2 layers within the heterostructure, which impacts the charge transfer between these two materials and the presence or absence of strains. The Raman spectra corresponding to different thickness of the HfO2 layer (5, 10, 15, and 20 nm) in Si/SiO2/Graphene/HfO2 heterostructure shows the appearance of a small shoulder on the low-frequency side of the G band around 1523 cm-1. Furthermore, it was observed that the intensity of this shoulder diminishes as the thickness of the HfO2 layer increases. The observed discrepancies between spectra, related to the experimental conditions employed for sample preparation, are attributed to the interplay of two phenomena: the transfer of charges among Graphene, HfO2, and SiO2, as well as the emergence of constraints.

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Metadaten
Titel
Characterizing graphene/HfO2 and HfO2/graphene interfaces through Raman spectroscopy analysis
verfasst von
Yosra Ben Maad
Hosni Ajlani
Alan Durnez
Ali Madouri
Mehrez Oueslati
Abdelaziz Meftah
Publikationsdatum
01.12.2023
Verlag
Springer US
Erschienen in
Optical and Quantum Electronics / Ausgabe 14/2023
Print ISSN: 0306-8919
Elektronische ISSN: 1572-817X
DOI
https://doi.org/10.1007/s11082-023-05536-8

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