Design and manufacturing of micromechanism elements of 2-DOF micromanipulator

Studies on optical switches have been researched and developed for optical information networks for a highly developed information technology society. In reality, however, a manipulator cannot apply for multi input and output due to a rather small output displacement at the mirror parts inside the manipulator. Therefore, in order to develop optical switches capable of switching to multi input and output, we suggested an electrostatic driving-type 2-DOF micro-manipulator that was composed of one mirror with four screw type beams, four screw type electrodes on a substrate and one mirror support pyramid situated under the mirror. One mirror with four screw type beams for support of the mirror and four screw electrodes on the substrate with a one mirror support pyramid were made separately. In the final step of the manufacturing process, these two parts were combined. The four beams are able to move by the electrostatic forces between the screw beams and the four screw electrodes on the substrate. We call this four beam type actuator an electrostatic suction actuator. In the results, the micro mirror is capable of a large angular output displacement about plus or minus 30° in theory. The manufactured mirror and beams and the manufactured screw electrodes and mirror support pyramid, respectively are manufactured. In this research, after having studied the shapes and dimensions of micro-manipulators capable of a large angular displacement based on theoretical analysis, we also discovered that the suggested micro-manipulator can have a large angular displacement though the use of the suction phenomena. Moreover, our study suggested a manufacturing process using a semiconductor manufacturing process and then discussed the concerns of the dimension of the manufactured mirror and beams, and the manufactured screw electrodes, and mirror support pyramid for the optical switch.