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Erschienen in: Microsystem Technologies 1/2020

03.05.2019 | Technical Paper

Design and simulation of an ultrasonic linear motor with dual piezoelectric actuators

verfasst von: Cheng-Ping Yang, Kun-Ju Xie, Jen-Yuan Chang

Erschienen in: Microsystem Technologies | Ausgabe 1/2020

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Abstract

In this study, an ultrasonic linear motor with dual piezoelectric (PZT) actuators is developed. A traveling wave motion is generated on the stator by a double-sided excitation of the stator of the ultrasonic linear motor, which drives the slider that is connected to the stator. The development and design processes are described. In this paper, the principle of using an ultrasonic motor to drive a traveling wave type is presented. The structure for the ultrasonic linear motor is then demonstrated with its dimensions, driving conditions and material parameters, so that Computer-Aided Engineering (CAE) can be used to simulate the driving performance. The simulation results show the differences to the characteristics that are achieved by adjusting the critical parameters, such as the PZT boned positions, the excitation frequency and the preload, in order to derive the best design. A prototype that uses the best parameter design is presented, and a method to improve development processes is presented in the final section.

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Metadaten
Titel
Design and simulation of an ultrasonic linear motor with dual piezoelectric actuators
verfasst von
Cheng-Ping Yang
Kun-Ju Xie
Jen-Yuan Chang
Publikationsdatum
03.05.2019
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 1/2020
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-019-04448-6

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