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Erschienen in: Archive of Applied Mechanics 10/2021

18.06.2021 | Original

Design of a robust control scheme for path tracking and beyond pull-in stabilization of micro/nano-positioners in the presence of Casimir force and external disturbances

verfasst von: Mohammad Reza Salehi Kolahi, Mohammad Reza Gharib, Ali Koochi

Erschienen in: Archive of Applied Mechanics | Ausgabe 10/2021

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Abstract

In this paper, attention was given to position control and path tracking of cantilever micro/nano-positioners subjected to Casimir force within and beyond the pull-in range. The material size dependency was incorporated in the model based on the modified couple stress theory. Using single-mode assumption, the system’s governing nonlinear partial differential equation (PDE) was transformed into a nonlinear state-space form. To verify the mathematical model, open-loop oscillations and the pull-in parameters were compared with the finite element simulation as well as experimental data. A robust non-singular terminal sliding mode controller with finite time convergence was designed to overcome the extending traveling rang problem in the presence of external disturbance. Finally, to compare the performance of the proposed controller, an optimal proportional integral derivative (PID) controller is designed and applied to the system. The achievements demonstrate that the designed controller can stabilize the system within and beyond the pull-in range without any fluctuation.

Graphic abstract

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Zurück zum Zitat M. Moghimi Zand and M. Ahmadian, "Dynamic pull-in instability of electrostatically actuated beams incorporating Casimir and van der Waals forces," Proc. Inst. Mech. Eng., Part C: J. Mech. Eng. Sci., vol. 224, no. 9, pp. 2037–2047, 2010. https://doi.org/10.1243/09544062JMES1716 M. Moghimi Zand and M. Ahmadian, "Dynamic pull-in instability of electrostatically actuated beams incorporating Casimir and van der Waals forces," Proc. Inst. Mech. Eng., Part C: J. Mech. Eng. Sci., vol. 224, no. 9, pp. 2037–2047, 2010. https://​doi.​org/​10.​1243/​09544062JMES1716​
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Metadaten
Titel
Design of a robust control scheme for path tracking and beyond pull-in stabilization of micro/nano-positioners in the presence of Casimir force and external disturbances
verfasst von
Mohammad Reza Salehi Kolahi
Mohammad Reza Gharib
Ali Koochi
Publikationsdatum
18.06.2021
Verlag
Springer Berlin Heidelberg
Erschienen in
Archive of Applied Mechanics / Ausgabe 10/2021
Print ISSN: 0939-1533
Elektronische ISSN: 1432-0681
DOI
https://doi.org/10.1007/s00419-021-02002-3

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