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Erschienen in: Journal of Materials Science 5/2018

09.11.2017 | Electronic materials

Improving the high-frequency magnetic properties of as-deposited CoFe films by ultra-low gas pressure

verfasst von: XiaoLi Tang, You Yu, Hua Su, HuaiWu Zhang, ZhiYong Zhong, YuLan Jing

Erschienen in: Journal of Materials Science | Ausgabe 5/2018

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Abstract

CoFe films without buffer layers were deposited at different ultra-low argon pressures ranging from 0.085 to 0.847 mTorr. This pressure range was one to two orders lower than the normal sputtering pressure. As a consequence, the static magnetic properties, including coercivity and magnetic anisotropy field, were improved with decrease argon pressure. The high-frequency permeability spectra showed that the resonance frequency and the damping factor of the films also reached optimal values at ultra-low pressure. Basing on atomic force microscopy observations, we attributed the excellent properties to the improved morphologies of the films and released internal stress.

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Metadaten
Titel
Improving the high-frequency magnetic properties of as-deposited CoFe films by ultra-low gas pressure
verfasst von
XiaoLi Tang
You Yu
Hua Su
HuaiWu Zhang
ZhiYong Zhong
YuLan Jing
Publikationsdatum
09.11.2017
Verlag
Springer US
Erschienen in
Journal of Materials Science / Ausgabe 5/2018
Print ISSN: 0022-2461
Elektronische ISSN: 1573-4803
DOI
https://doi.org/10.1007/s10853-017-1794-y

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