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Erschienen in: Journal of Materials Engineering and Performance 9/2012

01.09.2012

Influence of Al Contents on the Microstructure, Mechanical, and Wear properties of Magnetron Sputtered CrAlN Coatings

verfasst von: Hetal N. Shah, R. Jayaganthan

Erschienen in: Journal of Materials Engineering and Performance | Ausgabe 9/2012

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Abstract

CrAlN (0 < x < 0.1) coatings were deposited on SA304 substrate by a reactive magnetron sputtering. The microstructure and composition of the as-deposited coatings were systematically characterized by field emission scanning electron microscopy/EDS and atomic force microscopy, and the phase formation by x-ray diffraction (XRD). The hardness of the coatings was investigated using nanoindentation, while wear properties were investigated using pin-on-disk tribometer. XRD study reveals that the deposited CrAlN coatings crystallized in the cubic B1 NaCl structure. The minimum and maximum hardness of the coatings are found to be 15.28 and 18.81 GPa, respectively. The COF and wear rate are found to be 0.48 and 2.25 × 10−5 mm3/N · m, which is lower than the CrN coatings deposited and characterized under the same environment (0.63 and 2.25 × 10−5 mm3/Nm).

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Literatur
1.
Zurück zum Zitat M. Kawate, A.K. Hashimoto, and T. Suzuki, Oxidation Resistance of CrAlN and TiAlN Films, Surf. Coat. Technol., 2003, 165, p 163–167CrossRef M. Kawate, A.K. Hashimoto, and T. Suzuki, Oxidation Resistance of CrAlN and TiAlN Films, Surf. Coat. Technol., 2003, 165, p 163–167CrossRef
2.
Zurück zum Zitat M. Uchida, N. Nihira, A. Mitsuo, K. Toyoda, K. Kubota, and T. Aizawa, Friction and Wear Properties of CrAlN and CrVN Films Deposited by Cathodic Arc Ion Plating Method, Surf. Coat. Technol., 2004, 177–178, p 627–630CrossRef M. Uchida, N. Nihira, A. Mitsuo, K. Toyoda, K. Kubota, and T. Aizawa, Friction and Wear Properties of CrAlN and CrVN Films Deposited by Cathodic Arc Ion Plating Method, Surf. Coat. Technol., 2004, 177–178, p 627–630CrossRef
3.
Zurück zum Zitat J. Romero, M.A. Gómez, J. Esteve, F. Montalà, L. Carreras, M. Grifol, and A. Lousa, CrAlN Coatings Deposited by Cathodic Arc Evaporation at Different Substrate Bias, Thin Solid Films, 2006, 515, p 113–117CrossRef J. Romero, M.A. Gómez, J. Esteve, F. Montalà, L. Carreras, M. Grifol, and A. Lousa, CrAlN Coatings Deposited by Cathodic Arc Evaporation at Different Substrate Bias, Thin Solid Films, 2006, 515, p 113–117CrossRef
4.
Zurück zum Zitat X.Z. Ding and X.T. Zeng, Structural, Mechanical and Tribological Properties of CrAlN Coatings Deposited by Reactive Unbalanced Magnetron Sputtering, Surf. Coat. Technol., 2005, 200, p 1372–1376CrossRef X.Z. Ding and X.T. Zeng, Structural, Mechanical and Tribological Properties of CrAlN Coatings Deposited by Reactive Unbalanced Magnetron Sputtering, Surf. Coat. Technol., 2005, 200, p 1372–1376CrossRef
5.
Zurück zum Zitat H.C. Barshilia, N. Selvakumar, B. Deepthi, and K.S. Rajam, A Comparative Study of Reactive Direct Current Magnetron Sputtered CrAlN and CrN Coatings, Surf. Coat. Technol., 2006, 201, p 2193–2201CrossRef H.C. Barshilia, N. Selvakumar, B. Deepthi, and K.S. Rajam, A Comparative Study of Reactive Direct Current Magnetron Sputtered CrAlN and CrN Coatings, Surf. Coat. Technol., 2006, 201, p 2193–2201CrossRef
6.
Zurück zum Zitat S.R. Pulugurtha and D.G. Bhat, A Study of AC Reactive Magnetron Sputtering Technique for the Deposition of Compositionally Graded Coating in the Cr–Al–N System, Surf. Coat. Technol., 2006, 201, p 4411–4418CrossRef S.R. Pulugurtha and D.G. Bhat, A Study of AC Reactive Magnetron Sputtering Technique for the Deposition of Compositionally Graded Coating in the Cr–Al–N System, Surf. Coat. Technol., 2006, 201, p 4411–4418CrossRef
7.
Zurück zum Zitat T. Li, M. Li, and Y. Zhou, Phase Segregation and its Effect on the Adhesion of Cr–Al–N Coatings on K38G Alloy Prepared by Magnetron Sputtering Method, Surf. Coat. Technol., 2007, 201, p 7692–7698CrossRef T. Li, M. Li, and Y. Zhou, Phase Segregation and its Effect on the Adhesion of Cr–Al–N Coatings on K38G Alloy Prepared by Magnetron Sputtering Method, Surf. Coat. Technol., 2007, 201, p 7692–7698CrossRef
8.
Zurück zum Zitat P.H. Mayrhofer, D. Music, Th Reeswinkel, H.-G. Fuß, and J.M. Schneider, Structure, Elastic Properties and Phase Stability of Cr1−xAlxN, Acta Mater., 2008, 56, p 2469–2475CrossRef P.H. Mayrhofer, D. Music, Th Reeswinkel, H.-G. Fuß, and J.M. Schneider, Structure, Elastic Properties and Phase Stability of Cr1−xAlxN, Acta Mater., 2008, 56, p 2469–2475CrossRef
9.
Zurück zum Zitat M. Brizuela, A. Garcia-Luis, I. Braceras, J.I. Oñate, J.C. Sánchez-López, D. Martínez-Martínez, C. López-Cartes, and A. Fernández, Corrosion Resistance of CrAlN and TiAlN Coatings Deposited by Lateral Rotating Cathode Arc, Surf. Coat. Technol., 2005, 200, p 192–197CrossRef M. Brizuela, A. Garcia-Luis, I. Braceras, J.I. Oñate, J.C. Sánchez-López, D. Martínez-Martínez, C. López-Cartes, and A. Fernández, Corrosion Resistance of CrAlN and TiAlN Coatings Deposited by Lateral Rotating Cathode Arc, Surf. Coat. Technol., 2005, 200, p 192–197CrossRef
10.
Zurück zum Zitat X.Z. Ding, A.L.K. Tan, X.T. Zeng, C. Wang, T. Yue, and C.Q. Sun, Corrosion Resistance of CrAlN and TiAlN Coatings Deposited by Lateral Rotating Cathode Arc, Thin Solid Films, 2008, 516, p 5716–5720CrossRef X.Z. Ding, A.L.K. Tan, X.T. Zeng, C. Wang, T. Yue, and C.Q. Sun, Corrosion Resistance of CrAlN and TiAlN Coatings Deposited by Lateral Rotating Cathode Arc, Thin Solid Films, 2008, 516, p 5716–5720CrossRef
11.
Zurück zum Zitat Y. Sun, Y.H. Wang, and H.P. Seow, Effect of Substrate Material on Phase Evolution in Reactively Sputtered Cr-Al-N Films, J. Mater. Sci., 2004, 39, p 7369–7371CrossRef Y. Sun, Y.H. Wang, and H.P. Seow, Effect of Substrate Material on Phase Evolution in Reactively Sputtered Cr-Al-N Films, J. Mater. Sci., 2004, 39, p 7369–7371CrossRef
12.
Zurück zum Zitat Y. Chunyan, T. Linhai, W. Yinghui, W. Shebin, L. Tianbao, and X. Bingshe, The Effect of Substrate Bias Voltages on Impact Resistance of CrAlN Coatings Deposited by Modified Ion Beam Enhanced Magnetron Sputtering, Appl. Surf. Sci., 2009, 255, p 4033–4038CrossRef Y. Chunyan, T. Linhai, W. Yinghui, W. Shebin, L. Tianbao, and X. Bingshe, The Effect of Substrate Bias Voltages on Impact Resistance of CrAlN Coatings Deposited by Modified Ion Beam Enhanced Magnetron Sputtering, Appl. Surf. Sci., 2009, 255, p 4033–4038CrossRef
13.
Zurück zum Zitat J.E. Sanchéz, O.M. Sanchéz, L. Ipaz, W. Aperador, J.C. Caicedo, C. Amaya, M.A. Hernández Landaverde, F. Espinoza Beltran, J. Muñoz-Saldaña, and G. Zambrano, Mechanical, Tribological, and Electrochemical Behavior of CrAlN Coatings Deposited by r.f. Reactive Magnetron Co-Sputtering Method, Appl. Surf. Sci., 2010, 256, p 2380–2387CrossRef J.E. Sanchéz, O.M. Sanchéz, L. Ipaz, W. Aperador, J.C. Caicedo, C. Amaya, M.A. Hernández Landaverde, F. Espinoza Beltran, J. Muñoz-Saldaña, and G. Zambrano, Mechanical, Tribological, and Electrochemical Behavior of CrAlN Coatings Deposited by r.f. Reactive Magnetron Co-Sputtering Method, Appl. Surf. Sci., 2010, 256, p 2380–2387CrossRef
14.
Zurück zum Zitat Y. Makino and K. Nogi, Synthesis of Pseudobinary CrAlN Films with B1 Structure by rf-Assisted Magnetron Sputtering Method, Surf. Coat. Technol., 1998, 98, p 1008–1012CrossRef Y. Makino and K. Nogi, Synthesis of Pseudobinary CrAlN Films with B1 Structure by rf-Assisted Magnetron Sputtering Method, Surf. Coat. Technol., 1998, 98, p 1008–1012CrossRef
15.
Zurück zum Zitat O. Banakh, P.E. Schmid, R. Sanjine’s, and F. Lévy, High-Temperature Oxidation Resistance of CrAlN Thin Films Deposited by Reactive Magnetron Sputtering, Surf. Coat. Technol., 2003, 163–164, p 57–61CrossRef O. Banakh, P.E. Schmid, R. Sanjine’s, and F. Lévy, High-Temperature Oxidation Resistance of CrAlN Thin Films Deposited by Reactive Magnetron Sputtering, Surf. Coat. Technol., 2003, 163–164, p 57–61CrossRef
16.
Zurück zum Zitat S. Ulrich, H. Holleck, J. Ye, H. Leiste, R. Loos, M. Stuber, P. Pesch, and S. Sattel, Influence of Low Energy Ion Implantation on Mechanical Properties of Magnetron Sputtered Metastable (Cr, Al)N Thin Films, Thin Solid Films, 2003, 437, p 164–169CrossRef S. Ulrich, H. Holleck, J. Ye, H. Leiste, R. Loos, M. Stuber, P. Pesch, and S. Sattel, Influence of Low Energy Ion Implantation on Mechanical Properties of Magnetron Sputtered Metastable (Cr, Al)N Thin Films, Thin Solid Films, 2003, 437, p 164–169CrossRef
17.
Zurück zum Zitat M.A. Baker, P.J. Kench, M.C. Joseph, C. Tsotsos, A. Leyland, and A. Matthews, The Nanostructure and Mechanical Properties of PVD CrCu (N) Coatings, Surf. Coat. Technol., 2003, 162, p 222–227CrossRef M.A. Baker, P.J. Kench, M.C. Joseph, C. Tsotsos, A. Leyland, and A. Matthews, The Nanostructure and Mechanical Properties of PVD CrCu (N) Coatings, Surf. Coat. Technol., 2003, 162, p 222–227CrossRef
18.
Zurück zum Zitat Y.L. Su, S.H. Yao, Z.L. Leu, C.S. Wei, and C.T. Wu, Comparison of Tribological Behavior of Three Films-TiN, TiCN and CrN-Grown by Physical Vapor Deposition, Wear, 1997, 213, p 165–174CrossRef Y.L. Su, S.H. Yao, Z.L. Leu, C.S. Wei, and C.T. Wu, Comparison of Tribological Behavior of Three Films-TiN, TiCN and CrN-Grown by Physical Vapor Deposition, Wear, 1997, 213, p 165–174CrossRef
19.
Zurück zum Zitat O. Knotek, F.L. Sffier, and H.-J. Scholl, Properties of Arc-Evaporated CrN and (Cr, Al)N Coatings, Surf. Coat. Technol., 1991, 45, p 53–58CrossRef O. Knotek, F.L. Sffier, and H.-J. Scholl, Properties of Arc-Evaporated CrN and (Cr, Al)N Coatings, Surf. Coat. Technol., 1991, 45, p 53–58CrossRef
20.
Zurück zum Zitat H. Schulz and E. Bergmann, Properties and Applications of Ion-Plated Coatings in the System Cr–C–N, Surf. Coat. Technol., 1991, 50, p 53–56CrossRef H. Schulz and E. Bergmann, Properties and Applications of Ion-Plated Coatings in the System Cr–C–N, Surf. Coat. Technol., 1991, 50, p 53–56CrossRef
21.
Zurück zum Zitat M.G. Fleming and M.S.J. Hashmi, A Comparison of the Magnetron Sputtered and Arc Evaporated PVD Thin-Films for Wear Applications in Multipoint Cutting Tools, J. Mater. Process. Technol., 1992, 32, p 481–488CrossRef M.G. Fleming and M.S.J. Hashmi, A Comparison of the Magnetron Sputtered and Arc Evaporated PVD Thin-Films for Wear Applications in Multipoint Cutting Tools, J. Mater. Process. Technol., 1992, 32, p 481–488CrossRef
22.
Zurück zum Zitat R. Wuhrer and W.Y. Yeung, A Comparative Study of Magnetron Co-Sputtered Nanocrystalline Titanium Aluminium and Chromium Aluminium Nitride Coatings, Scripta Mater., 2004, 50, p 1461–1466CrossRef R. Wuhrer and W.Y. Yeung, A Comparative Study of Magnetron Co-Sputtered Nanocrystalline Titanium Aluminium and Chromium Aluminium Nitride Coatings, Scripta Mater., 2004, 50, p 1461–1466CrossRef
23.
Zurück zum Zitat S.R. Pulugurtha, D.G. Bhat, M.H. Gordon, J. Shultz, M. Staia, S.V. Joshi, and S. Govindarajan, Mechanical and Tribological Properties of Compositionally Graded CrAlN Films Deposited by AC Reactive Magnetron Sputtering, Surf. Coat. Technol., 2007, 202, p 1160–1166CrossRef S.R. Pulugurtha, D.G. Bhat, M.H. Gordon, J. Shultz, M. Staia, S.V. Joshi, and S. Govindarajan, Mechanical and Tribological Properties of Compositionally Graded CrAlN Films Deposited by AC Reactive Magnetron Sputtering, Surf. Coat. Technol., 2007, 202, p 1160–1166CrossRef
24.
Zurück zum Zitat L. Wang, X. Nie, J. Housden, E. Spain, J.C. Jiang, E.I. Meletis, A. Leyland, and A. Matthews, Material Transfer Phenomena and Failure Mechanisms of a Nanostructured Cr–Al–N Coating in Laboratory Wear Tests and an Industrial Punch Tool Application, Surf. Coat. Technol., 2008, 203, p 816–821CrossRef L. Wang, X. Nie, J. Housden, E. Spain, J.C. Jiang, E.I. Meletis, A. Leyland, and A. Matthews, Material Transfer Phenomena and Failure Mechanisms of a Nanostructured Cr–Al–N Coating in Laboratory Wear Tests and an Industrial Punch Tool Application, Surf. Coat. Technol., 2008, 203, p 816–821CrossRef
25.
Zurück zum Zitat M. Zhou, Y. Makino, M. Nose, and K. Nogi, Phase Transition and Properties of Ti-Al-N Thin Films Prepared by r.f.-Plasma Assisted Magnetron Sputtering, Thin Solid Films, 1999, 339, p 203–208CrossRef M. Zhou, Y. Makino, M. Nose, and K. Nogi, Phase Transition and Properties of Ti-Al-N Thin Films Prepared by r.f.-Plasma Assisted Magnetron Sputtering, Thin Solid Films, 1999, 339, p 203–208CrossRef
26.
Zurück zum Zitat A. Kayani, T.L. Buchanan, M. Kopczyk, C. Collins, J. Lucas, K. Lund, R. Hutchison, P.E. Gannon, M.C. Deibert, R.J. Smith, D.S. Choi, and V.I. Gorokhovsky, Oxidation Resistance of Magnetron-Sputtered CrAlN Coatings on 430 Steel at 800°C, Surf. Coat. Technol., 2006, 201, p 4460–4466CrossRef A. Kayani, T.L. Buchanan, M. Kopczyk, C. Collins, J. Lucas, K. Lund, R. Hutchison, P.E. Gannon, M.C. Deibert, R.J. Smith, D.S. Choi, and V.I. Gorokhovsky, Oxidation Resistance of Magnetron-Sputtered CrAlN Coatings on 430 Steel at 800°C, Surf. Coat. Technol., 2006, 201, p 4460–4466CrossRef
27.
Zurück zum Zitat T. Li, Y. Zhou, M. Li, and Z. Li, High Temperature Corrosion Behavior of a Multilayer CrAlN Coating Prepared by Magnetron Sputtering Method on a K38G Alloy, Surf. Coat. Technol., 2008, 202, p 1985–1993CrossRef T. Li, Y. Zhou, M. Li, and Z. Li, High Temperature Corrosion Behavior of a Multilayer CrAlN Coating Prepared by Magnetron Sputtering Method on a K38G Alloy, Surf. Coat. Technol., 2008, 202, p 1985–1993CrossRef
28.
Zurück zum Zitat C. Feng, X. Huang, Q. Yang, R. Wei, and D. Nagy, Microstructure and Tribological Properties of CrN and CrSiCN Coatings, Surf. Coat. Technol., 2010, 205, p 182–188CrossRef C. Feng, X. Huang, Q. Yang, R. Wei, and D. Nagy, Microstructure and Tribological Properties of CrN and CrSiCN Coatings, Surf. Coat. Technol., 2010, 205, p 182–188CrossRef
29.
Zurück zum Zitat J.C. Sánchez-López, D. Martínez-Martínez, C. López-Cartes, A. Fernández, M. Brizuela, A. García-Luis, and J.I. Oñate, Mechanical Behavior and Oxidation Resistance of CrAlN Coatings, J. Vac. Sci. Technol. A, 2005, 23, p 681–686CrossRef J.C. Sánchez-López, D. Martínez-Martínez, C. López-Cartes, A. Fernández, M. Brizuela, A. García-Luis, and J.I. Oñate, Mechanical Behavior and Oxidation Resistance of CrAlN Coatings, J. Vac. Sci. Technol. A, 2005, 23, p 681–686CrossRef
30.
Zurück zum Zitat X.Z. Ding, X.T. Zeng, Y.C. Liu, F.Z. Fang, and G.C. Lim, Cr1−xAlxN Coatings Deposited by Lateral Rotating Cathode Arc for High Speed Machining Applications, Thin Solid Films, 2008, 516, p 1710–1715CrossRef X.Z. Ding, X.T. Zeng, Y.C. Liu, F.Z. Fang, and G.C. Lim, Cr1−xAlxN Coatings Deposited by Lateral Rotating Cathode Arc for High Speed Machining Applications, Thin Solid Films, 2008, 516, p 1710–1715CrossRef
31.
Zurück zum Zitat B. Tlili, N. Mustapha, C. Nouveau, Y. Benlatreche, G. Guillemot, and M. Lambertin, Correlation Between Thermal Properties and Aluminum Fractions in CrAlN Layers Deposited by PVD Technique, Vacuum, 2010, 84, p 1067–1074CrossRef B. Tlili, N. Mustapha, C. Nouveau, Y. Benlatreche, G. Guillemot, and M. Lambertin, Correlation Between Thermal Properties and Aluminum Fractions in CrAlN Layers Deposited by PVD Technique, Vacuum, 2010, 84, p 1067–1074CrossRef
32.
Zurück zum Zitat S. PalDey and S.C. Deevi, Single Layer and Multilayer Wear Resistant Coatings of (Ti Al)N: A Review, Mater. Sci. Eng. A, 2002, 342, p 58–79 S. PalDey and S.C. Deevi, Single Layer and Multilayer Wear Resistant Coatings of (Ti Al)N: A Review, Mater. Sci. Eng. A, 2002, 342, p 58–79
33.
Zurück zum Zitat P.H. Mayrhofer, C. Mitterer, L. Hultman, and H. Clemens, Microstructural Design of Hard Coatings, Prog. Mater. Sci., 2006, 51, p 1032–1114CrossRef P.H. Mayrhofer, C. Mitterer, L. Hultman, and H. Clemens, Microstructural Design of Hard Coatings, Prog. Mater. Sci., 2006, 51, p 1032–1114CrossRef
34.
Zurück zum Zitat H.C. Ong, A.X.E. Zhu, and G.T. Du, Dependence of the Excitonic Transition Energies and Mosaicity on Residual Strain in ZnO Thin Films, Appl. Phys. Lett., 2002, 80, p 941–943CrossRef H.C. Ong, A.X.E. Zhu, and G.T. Du, Dependence of the Excitonic Transition Energies and Mosaicity on Residual Strain in ZnO Thin Films, Appl. Phys. Lett., 2002, 80, p 941–943CrossRef
35.
Zurück zum Zitat P. Singh and D. Kaur, Influence of Film Thickness on Texture and Electrical and Optical Properties of Room Temperature Deposited Nanocrystalline V2O5 Thin Film, J. Appl. Phys., 2008, 103, p 043507-1–043507-9 P. Singh and D. Kaur, Influence of Film Thickness on Texture and Electrical and Optical Properties of Room Temperature Deposited Nanocrystalline V2O5 Thin Film, J. Appl. Phys., 2008, 103, p 043507-1–043507-9
36.
Zurück zum Zitat V. Chawla, R. Jayagnathan, and R. Chandra, Microstructural Characteristics and Mechanical Properties of Magnetron Sputtered Nanocrystalline TiN Films on Glass Substrate, Bull. Mater. Sci., 2009, 32(2), p 117–123CrossRef V. Chawla, R. Jayagnathan, and R. Chandra, Microstructural Characteristics and Mechanical Properties of Magnetron Sputtered Nanocrystalline TiN Films on Glass Substrate, Bull. Mater. Sci., 2009, 32(2), p 117–123CrossRef
37.
Zurück zum Zitat C. Gautier and J. Machet, Study of the Growth Mechanisms of Chromium Nitride Films Deposited by Vacuum ARC Evaporation, Thin Solid Films, 1997, 295, p 43–52CrossRef C. Gautier and J. Machet, Study of the Growth Mechanisms of Chromium Nitride Films Deposited by Vacuum ARC Evaporation, Thin Solid Films, 1997, 295, p 43–52CrossRef
38.
Zurück zum Zitat J. Pelleg, L.Z. Zevin, S. Lungo, and N. Croitoru, Reactive Sputter Deposited TiN Films on Glass Substrates, Thin Solid Films, 1991, 197, p 117–128CrossRef J. Pelleg, L.Z. Zevin, S. Lungo, and N. Croitoru, Reactive Sputter Deposited TiN Films on Glass Substrates, Thin Solid Films, 1991, 197, p 117–128CrossRef
39.
Zurück zum Zitat N. Schell, J.H. Petersen, J. Bøttiger, A. Mucklich, J. Chevallier, K.P. Andreasen, and F. Eichhorn, On the Development of Texture During Growth of Magnetron-Sputtered CrN Thin Solid Films, 2003, 436, p 100–110CrossRef N. Schell, J.H. Petersen, J. Bøttiger, A. Mucklich, J. Chevallier, K.P. Andreasen, and F. Eichhorn, On the Development of Texture During Growth of Magnetron-Sputtered CrN Thin Solid Films, 2003, 436, p 100–110CrossRef
40.
Zurück zum Zitat E. Lugscheider, K. Bobzin, Th Hornig, and M. Maes, Investigation of the Residual Stresses and Mechanical Properties of (Cr, Al)N arc PVD Coatings Used for Semi-Solid Metal (SSM) Forming Dies, Thin Solid Films, 2002, 420–421, p 318–323CrossRef E. Lugscheider, K. Bobzin, Th Hornig, and M. Maes, Investigation of the Residual Stresses and Mechanical Properties of (Cr, Al)N arc PVD Coatings Used for Semi-Solid Metal (SSM) Forming Dies, Thin Solid Films, 2002, 420–421, p 318–323CrossRef
41.
Zurück zum Zitat L. Cunha, M. Andritschky, K. Pischow, and Z. Wang, Microstructure of CrN Coatings Produced by PVD Techniques, Thin Solid Films, 1999, 355–356, p 465–471CrossRef L. Cunha, M. Andritschky, K. Pischow, and Z. Wang, Microstructure of CrN Coatings Produced by PVD Techniques, Thin Solid Films, 1999, 355–356, p 465–471CrossRef
42.
Zurück zum Zitat J. Lin, J.J. Moore, B. Mishra, M. Pinkas, W.D. Sproul, and J.A. Rees, Effect of Asynchronous Pulsing Parameters on the Structure and Properties of CrAlN Films Deposited by Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS), Surf. Coat. Technol., 2008, 202, p 1418–1436CrossRef J. Lin, J.J. Moore, B. Mishra, M. Pinkas, W.D. Sproul, and J.A. Rees, Effect of Asynchronous Pulsing Parameters on the Structure and Properties of CrAlN Films Deposited by Pulsed Closed Field Unbalanced Magnetron Sputtering (P-CFUBMS), Surf. Coat. Technol., 2008, 202, p 1418–1436CrossRef
43.
Zurück zum Zitat A.B. Cheikh Larbi and B. Tlili, Fretting Wear of Multilayered PVD TiAlCN/TiAlN/TiAl on AISI, 4140 Steel, Surf. Coat. Technol., 2006, 201, p 1511–1518CrossRef A.B. Cheikh Larbi and B. Tlili, Fretting Wear of Multilayered PVD TiAlCN/TiAlN/TiAl on AISI, 4140 Steel, Surf. Coat. Technol., 2006, 201, p 1511–1518CrossRef
44.
Zurück zum Zitat Q. Luo, Origin of Friction in Running-in Sliding Wear of Nitride Coatings, Tribol. Lett., 2010, 37, p 529–539CrossRef Q. Luo, Origin of Friction in Running-in Sliding Wear of Nitride Coatings, Tribol. Lett., 2010, 37, p 529–539CrossRef
45.
Zurück zum Zitat Q. Yang, L.R. Zhao, F. Cai, S. Yang, and D.G. Teer, Wear, Erosion and Corrosion Resistance of CrTiAlN Coating Deposited by Magnetron Sputtering, Surf. Coat. Technol., 2008, 202(16), p 3886–3892CrossRef Q. Yang, L.R. Zhao, F. Cai, S. Yang, and D.G. Teer, Wear, Erosion and Corrosion Resistance of CrTiAlN Coating Deposited by Magnetron Sputtering, Surf. Coat. Technol., 2008, 202(16), p 3886–3892CrossRef
Metadaten
Titel
Influence of Al Contents on the Microstructure, Mechanical, and Wear properties of Magnetron Sputtered CrAlN Coatings
verfasst von
Hetal N. Shah
R. Jayaganthan
Publikationsdatum
01.09.2012
Verlag
Springer US
Erschienen in
Journal of Materials Engineering and Performance / Ausgabe 9/2012
Print ISSN: 1059-9495
Elektronische ISSN: 1544-1024
DOI
https://doi.org/10.1007/s11665-011-0112-0

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    Die im Laufe eines Jahres in der „adhäsion“ veröffentlichten Marktübersichten helfen Anwendern verschiedenster Branchen, sich einen gezielten Überblick über Lieferantenangebote zu verschaffen.