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Erschienen in: Journal of Materials Science: Materials in Electronics 11/2017

07.03.2017

Influence of P doping on transparent conductive property of SnO2:P thin film

Erschienen in: Journal of Materials Science: Materials in Electronics | Ausgabe 11/2017

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Abstract

P doped SnO2 (PTO) thin films had been prepared by sol–gel dip coating method. The effect of phosphorus doping content, annealing temperature and coating times on microstructure and phase composition and optoelectrical properties of the PTO thin films were investigated by X-ray diffraction (XRD), Scanning electron microscope (SEM), four-point probe and UV–Vis spectrophotometer. The results showed that the PTO thin films exhibited the tetragonal rutile structure under all the experimental conditions. The square resistance of the PTO thin films decreased firstly and then increased with the increase of phosphorus doping content, annealing temperature and coating times. The surface smoothness and grain compactness were increased when annealing temperature increased. The PTO thin films had an optimal square sheet resistance of 8.9 kΩ/□ and high transparency of 95% in the visible region when P/Sn ratio was 2 mol% and annealing temperature was 450 °C and coating times was 14 layer.

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Literatur
1.
Zurück zum Zitat X.F. Liu, X.P. Wang, L.J. Wang, et al., Research progress in transparent conducting films. Laser Optoelectron. Prog. 49, 1–10 (2012). in Chinese X.F. Liu, X.P. Wang, L.J. Wang, et al., Research progress in transparent conducting films. Laser Optoelectron. Prog. 49, 1–10 (2012). in Chinese
2.
Zurück zum Zitat X. H. Zhou, Study on property of ATO nanoparticles and films by Sol–gel routes. Lanzhou: Lanzhou University of Technology, (2011). in Chinese X. H. Zhou, Study on property of ATO nanoparticles and films by Sol–gel routes. Lanzhou: Lanzhou University of Technology, (2011). in Chinese
3.
Zurück zum Zitat W. Zhou, T.P. Li, B. H. Dong, et al, Preparation and characterization of graphene/ATO nano composites Chin. J. Colloid Polym. 31(4), 164–167 (2013). in Chinese W. Zhou, T.P. Li, B. H. Dong, et al, Preparation and characterization of graphene/ATO nano composites Chin. J. Colloid Polym. 31(4), 164–167 (2013). in Chinese
4.
Zurück zum Zitat Y.L. Wu, H.F. Cheng, G. Yu, et al., Relationship between optical/electrical properties and the thickness of the ITO films. J. Mater Sci. Eng. 36(1), 14–16 (2012) Y.L. Wu, H.F. Cheng, G. Yu, et al., Relationship between optical/electrical properties and the thickness of the ITO films. J. Mater Sci. Eng. 36(1), 14–16 (2012)
5.
Zurück zum Zitat M.R. Golobostanfard, H. Abdizadeh, S. Mohammadi, M.A. Baghchesara, Carbon nanotube/indium tin oxide hybrid transparent conductive film: effect of nanotube diameter. Sol. Energy Mater. Sol. Cells 132, 418–424 (2015)CrossRef M.R. Golobostanfard, H. Abdizadeh, S. Mohammadi, M.A. Baghchesara, Carbon nanotube/indium tin oxide hybrid transparent conductive film: effect of nanotube diameter. Sol. Energy Mater. Sol. Cells 132, 418–424 (2015)CrossRef
6.
Zurück zum Zitat H. Wang, C.P. Wei, C.J. Peng, et al., Preparation of SnO2: Sb transparent conducting thin films and photoelectric properties. J. Chin. Ceram. Soc. 40(7), 945–949 (2012). in Chinese H. Wang, C.P. Wei, C.J. Peng, et al., Preparation of SnO2: Sb transparent conducting thin films and photoelectric properties. J. Chin. Ceram. Soc. 40(7), 945–949 (2012). in Chinese
7.
Zurück zum Zitat X. Bie, Preparation and performance optimization of ZnO transparent conductive films. Zhejiang: Zhejiang University, (2010). in Chinese X. Bie, Preparation and performance optimization of ZnO transparent conductive films. Zhejiang: Zhejiang University, (2010). in Chinese
8.
Zurück zum Zitat D.L. Wang, Preparation of SnO2: F films by ultrasonic spray pyrolysis process and analyze. Xi’an: Xi’an University of Technology, (2009). in Chinese D.L. Wang, Preparation of SnO2: F films by ultrasonic spray pyrolysis process and analyze. Xi’an: Xi’an University of Technology, (2009). in Chinese
9.
Zurück zum Zitat J. Ning, Doped tin oxide transparent conductive films prepared by RF magnetron sputtering. Liaoning: University of Science and Technology Liaoning, (2013). in Chinese J. Ning, Doped tin oxide transparent conductive films prepared by RF magnetron sputtering. Liaoning: University of Science and Technology Liaoning, (2013). in Chinese
10.
Zurück zum Zitat C.Y. Tsay, S.C. Liang, Fabrication of p-type conductivity in SnO2 thin films through Ga doping. J. Alloys Compds. 622, 644–650 (2015)CrossRef C.Y. Tsay, S.C. Liang, Fabrication of p-type conductivity in SnO2 thin films through Ga doping. J. Alloys Compds. 622, 644–650 (2015)CrossRef
11.
Zurück zum Zitat H.Y. Liu, Y. Yan, Y.L. Wang, et al., Recent progress in study of transparent conducting oxide films. J. Aeronaut. Mater. 4(35), 63–82 (2015) H.Y. Liu, Y. Yan, Y.L. Wang, et al., Recent progress in study of transparent conducting oxide films. J. Aeronaut. Mater. 4(35), 63–82 (2015)
12.
Zurück zum Zitat X.J. Feng, Preparation and characterization of high quality SnO2 films. Jinan: Shandong University, (2008). in Chinese X.J. Feng, Preparation and characterization of high quality SnO2 films. Jinan: Shandong University, (2008). in Chinese
13.
Zurück zum Zitat J. Mazlooma, F.E. Ghodsia, M. Gholamib, Fiber-like stripe ATO (SnO2:Sb) nanostructured thin films grown by sol–gel method: optical, topographical and electrical properties. J. Alloys Compd. 579, 384–393 (2013)CrossRef J. Mazlooma, F.E. Ghodsia, M. Gholamib, Fiber-like stripe ATO (SnO2:Sb) nanostructured thin films grown by sol–gel method: optical, topographical and electrical properties. J. Alloys Compd. 579, 384–393 (2013)CrossRef
14.
Zurück zum Zitat Z.G. Zang, A.S. Nakamura, J. Temmyo, Single cuprous oxide films synthesized by radical oxidation at low temperature for PV application. Opt. Express 21, 11448–11456 (2013)CrossRef Z.G. Zang, A.S. Nakamura, J. Temmyo, Single cuprous oxide films synthesized by radical oxidation at low temperature for PV application. Opt. Express 21, 11448–11456 (2013)CrossRef
15.
Zurück zum Zitat Y.Q. Liao, Y. J. Li, T. M. Huang, Status and development tendency of transparent conductive films. Dongfang Electric Rev. 109 (28), 13–18(2014). in Chinese Y.Q. Liao, Y. J. Li, T. M. Huang, Status and development tendency of transparent conductive films. Dongfang Electric Rev. 109 (28), 13–18(2014). in Chinese
16.
Zurück zum Zitat H.S. So, J.W. Park, D.H. Jung, K.H. Ko, H. Lee, Optical properties of amorphous and crystalline Sb-doped SnO2 thin films studied with spectroscopic ellipsometry: optical gap energy and effective mass. J. Appl. Phys. 118, 83–95 (2015)CrossRef H.S. So, J.W. Park, D.H. Jung, K.H. Ko, H. Lee, Optical properties of amorphous and crystalline Sb-doped SnO2 thin films studied with spectroscopic ellipsometry: optical gap energy and effective mass. J. Appl. Phys. 118, 83–95 (2015)CrossRef
17.
Zurück zum Zitat P.T. Mwathe, R.S. Musembi, M.T. Munji, et al., Effect of surface passivation on electrical properties of Pd-F:SnO2 thin films prepared by spray pyrolysis technique. Coatings 4(4), 747–755 (2014)CrossRef P.T. Mwathe, R.S. Musembi, M.T. Munji, et al., Effect of surface passivation on electrical properties of Pd-F:SnO2 thin films prepared by spray pyrolysis technique. Coatings 4(4), 747–755 (2014)CrossRef
18.
Zurück zum Zitat S. Xing, Z.X. Liu, H. Jiang, et al., Performance of Sb-doped SnO2 thin films fabricated by atmospheric pressure CVD. Mater. Rev. 29(4),19–24 (2015). in Chinese S. Xing, Z.X. Liu, H. Jiang, et al., Performance of Sb-doped SnO2 thin films fabricated by atmospheric pressure CVD. Mater. Rev. 29(4),19–24 (2015). in Chinese
19.
Zurück zum Zitat S.C. Lee, J.H. Lee, T.S. Oh et al., Fabrication of tin oxide film by sol–gel method for photovoltaic solar cell system. Sol. Energy Mater. Sol. Cells 75, 481–487 (2003)CrossRef S.C. Lee, J.H. Lee, T.S. Oh et al., Fabrication of tin oxide film by sol–gel method for photovoltaic solar cell system. Sol. Energy Mater. Sol. Cells 75, 481–487 (2003)CrossRef
20.
Zurück zum Zitat A.T. Sandeep, T.H. Vilas, G.J. Shashikant, et al., Structural and optical properties of compact SnO2 thin films by Sol–Gel dip coating. Adv. Sci. Lett. 20, 1039–1043 (2014)CrossRef A.T. Sandeep, T.H. Vilas, G.J. Shashikant, et al., Structural and optical properties of compact SnO2 thin films by Sol–Gel dip coating. Adv. Sci. Lett. 20, 1039–1043 (2014)CrossRef
21.
Zurück zum Zitat J. Mazloom, F.E. Ghodsi, Spectroscopic, microscopic, and electrical characterization of nanostructured SnO2:Co thin films prepared by sol–gel spin coating technique. Mater. Res. Bull. 48, 1468–1476 (2013)CrossRef J. Mazloom, F.E. Ghodsi, Spectroscopic, microscopic, and electrical characterization of nanostructured SnO2:Co thin films prepared by sol–gel spin coating technique. Mater. Res. Bull. 48, 1468–1476 (2013)CrossRef
22.
Zurück zum Zitat M.M. Koebel, D.Y. Nadargi, G. Jimenez-Cadena, Y.E. Romanyuk, Transparent, conducting ATO thin films by epoxide-initiated Sol–Gel chemistry: a highly versatile route to mixed-metal oxide films. ACS Appl. Mater. Interfaces 4(5), 2464–2473 (2012)CrossRef M.M. Koebel, D.Y. Nadargi, G. Jimenez-Cadena, Y.E. Romanyuk, Transparent, conducting ATO thin films by epoxide-initiated Sol–Gel chemistry: a highly versatile route to mixed-metal oxide films. ACS Appl. Mater. Interfaces 4(5), 2464–2473 (2012)CrossRef
23.
Zurück zum Zitat S. Chen, X. R. Zhao, L.B. Duan, et al., Effect of SiO2 buffer layers on the optical and electrical properties of Sb-doped SnO2 thin films by Sol–gel process. Mater. Rev. 265, 27–29 (2012). in Chinese S. Chen, X. R. Zhao, L.B. Duan, et al., Effect of SiO2 buffer layers on the optical and electrical properties of Sb-doped SnO2 thin films by Sol–gel process. Mater. Rev. 265, 27–29 (2012). in Chinese
24.
Zurück zum Zitat W.F. Mao, B.Y. Xiong, Q.C. Li et al., Influences of defects and Sb valence states on the temperature dependent conductivity of Sb doped SnO2 thin films. Phys. Lett. A 379, 1946–1950 (2015)CrossRef W.F. Mao, B.Y. Xiong, Q.C. Li et al., Influences of defects and Sb valence states on the temperature dependent conductivity of Sb doped SnO2 thin films. Phys. Lett. A 379, 1946–1950 (2015)CrossRef
25.
Zurück zum Zitat J.A. Galaviz-pérez, F. Chen, Q. Shen et al., Enhancement and optimization of ATO nano-crystalline films properties by the addition of acetylacetone as modifier in the Sol-gel process. J. Wuhan Univ. Technol. Mater. 27, 873–881 (2015)CrossRef J.A. Galaviz-pérez, F. Chen, Q. Shen et al., Enhancement and optimization of ATO nano-crystalline films properties by the addition of acetylacetone as modifier in the Sol-gel process. J. Wuhan Univ. Technol. Mater. 27, 873–881 (2015)CrossRef
26.
Zurück zum Zitat Q.P. Tran, J.S. Fang, T.S. Chin, Propertiesof fluorine-doped SnO2 thin films by a green sol–gel method. Mater. Sci. Semicond. Process. 40, 664–669 (2015) Q.P. Tran, J.S. Fang, T.S. Chin, Propertiesof fluorine-doped SnO2 thin films by a green sol–gel method. Mater. Sci. Semicond. Process. 40, 664–669 (2015)
27.
Zurück zum Zitat J. P. Upadhyay, S.R. Vishwakarma, H.C. Prasad, Studies of electrical and optical properties of SnO2:P films. Thin Solid Films, 169(2), 195–204 (1989)CrossRef J. P. Upadhyay, S.R. Vishwakarma, H.C. Prasad, Studies of electrical and optical properties of SnO2:P films. Thin Solid Films, 169(2), 195–204 (1989)CrossRef
28.
Zurück zum Zitat W. X. Luo, F. L. Li, Transparency, conductivity and structure of doped SnO2 films prepared by MOCVD technique. J. Inorg Mater. 5(2), 185–188 (1990). in Chinese W. X. Luo, F. L. Li, Transparency, conductivity and structure of doped SnO2 films prepared by MOCVD technique. J. Inorg Mater. 5(2), 185–188 (1990). in Chinese
29.
Zurück zum Zitat X.W. Zhang, Transparent conductive oxide films prepared by Sol–Gel method. Xi’an: Xi’an University of Technology, (2002). in Chinese X.W. Zhang, Transparent conductive oxide films prepared by Sol–Gel method. Xi’an: Xi’an University of Technology, (2002). in Chinese
Metadaten
Titel
Influence of P doping on transparent conductive property of SnO2:P thin film
Publikationsdatum
07.03.2017
Erschienen in
Journal of Materials Science: Materials in Electronics / Ausgabe 11/2017
Print ISSN: 0957-4522
Elektronische ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-017-6451-3

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