Insect-type MEMS microrobot with mountable bare chip IC of artificial neural networks

This paper discussed insect-type MEMS microrobot system which could locomote without using computer programs. Locomotion of the MEMS microrobot was generated using the analog circuit of artificial neural networks. We constructed the artificial neural networks as a bare chip integrated circuit (IC) which could mount on top of the MEMS microrobot. As a result, the MEMS microrobot system could perform the locomotion using constructed bare chip IC of artificial neural networks. The insect-type MEMS microrobot system was 0.079 g in weight and less than 5.0 mm in size. Only the power source was outside of the robot. In addition, we analyze the heat conduction of the shape memory alloy-type actuator. It was shown that the heat of shape memory alloy conducts to the mechanical parts of the MEMS microrobot; therefore, locomotion becomes slowly after 30 s. The slow locomotion was 2 mm/min. We constructed the less conduction shape memory alloy-type actuator. The locomotion speed of the insect-type MEMS microrobot using less conduction shape memory alloy-type actuator was 90.8 mm/min.