2007 | OriginalPaper | Buchkapitel
Introduction
Erschienen in: CMOS Hotplate Chemical Microsensors
Verlag: Springer Berlin Heidelberg
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In recent years, there has been increasing interest and development efforts in miniaturizing gas sensors and systems. Particularly strong efforts have been made to monitor environmentally relevant gases like carbon-monoxide (CO), methane (CH4) and ozone (O3). Commonly used chemically sensitive materials for these target gases are wide-bandgap semiconducting oxides such as tin oxide, tungsten oxide or indium oxide, which are operated at elevated temperatures of 200–400 °C [1–3]. At those high temperatures, these oxides show considerable resistance changes upon exposure to a multitude of inorganic gases and volatile organics. The most prominent example is tin oxide (SnO2), which shows large electrical resistance changes upon exposure to the above-mentioned gases at operating temperatures between 250 °C–350 °C and has been engineered to provide sufficient long-term stability [4–6]. The miniaturization efforts in the field of metal-oxide-based gas sensors follow several major trends: (a)the development of micromachined sensor platforms [7–9],(b)the micro- and nanotechnological fabrication of the sensing materials [10, 11], and(c)the design and co-integration of application-specific circuits with the transducer leading to smart sensor systems [8, 12–14].