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Erschienen in:
2007 | OriginalPaper | Buchkapitel
Miniaturized Metal-Oxide Sensors
Erschienen in: CMOS Hotplate Chemical Microsensors
Verlag: Springer Berlin Heidelberg
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As already mentioned in the introduction, a so-called microhotplate (µHP) for metal-oxide-based gas sensing consists of a thermally isolated stage fabricated using microtechnological processes. The integrated heating element provides the typical operation temperature on the order of several 100 °C, and the temperature sensor measures the microhotplate temperature. Two or more electrodes are used to perform resistance or impedance measurements of the sensing material. The microhotplate becomes a chemical sensor through the deposition of a sensitive layer. Several reviews on micromachined metal-oxide sensors are available [7,9]. The scheme in Fig. 2.1 gives an overview on the design and development considerations for monolithic sensor systems.