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Erschienen in:
2007 | OriginalPaper | Buchkapitel
Thermal Modelling of CMOS Microhotplates
Erschienen in: CMOS Hotplate Chemical Microsensors
Verlag: Springer Berlin Heidelberg
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The main goals of improving microhotplate designs include (a) reducing its power consumption and (b) increasing the hotplate temperature homogeneity, i.e., an optimization towards a minimum temperature gradient in the sensitive area. To reach these goals, novel device and hotplate designs usually undergo an extensive simulation process such as thermal modelling using finite-element simulations. Modelling the transducer and hotplate behavior is an important step towards establishing a compact sensor model for monolithic system realizations [91]. The parameters of interest include the hotplate thermal resistance and the thermal time constant, a prediction of which facilitates and accelerates the design of monolithic systems for a given microhotplate design.