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Erschienen in:

2013 | OriginalPaper | Buchkapitel

1. Laser-Assisted Scanning Probe Alloying Nanolithography (LASPAN)

verfasst von : Luohan Peng, Huiliang Zhang, Philip Hemmer, Hong Liang

Erschienen in: Scanning Probe Microscopy in Nanoscience and Nanotechnology 3

Verlag: Springer Berlin Heidelberg

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Abstract

Nanoscale science and technology demands novel approaches and new knowledge for further development. Nanofabrication has been widely employed in modern science and engineering. Probe-based nanolithography is a common technique to manufacture nanostructures. This research contributes fundamental understanding in surface science through development of a new methodology. A delicate hardware system was designed and constructed to realize the nanometer-scale direct writing. A simple and unique process, namely, laser-assisted scanning probe alloying nanolithography (LASPAN), to fabricate well-defined nanostructures has been developed. The LASPAN system, process, and the application in gold-silicon (Au-Si) binary system have been discussed in this chapter.

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^†Currently at Harvard University

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Titel: Laser-Assisted Scanning Probe Alloying Nanolithography (LASPAN)
verfasst von: Luohan Peng
Huiliang Zhang
Philip Hemmer
Hong Liang
Verlag: Springer Berlin Heidelberg
Buch: Scanning Probe Microscopy in Nanoscience and Nanotechnology 3
Print ISBN: 978-3-642-25413-0

Electronic ISBN: 978-3-642-25414-7

Copyright-Jahr: 2013
DOI: https://doi.org/10.1007/978-3-642-25414-7_1

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