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Erschienen in: The International Journal of Advanced Manufacturing Technology 5-6/2022

23.06.2022 | Critical Review

Review on ultra-precision bonnet polishing technology

verfasst von: Ziwei Wu, Jianyun Shen, Yunfeng Peng, Xian Wu

Erschienen in: The International Journal of Advanced Manufacturing Technology | Ausgabe 5-6/2022

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Abstract

With the development of science and technology, in the fields of national defense, aerospace, medical treatment, automobile, and so on, the demands for ultra-precision parts and molds with complex surfaces such as aspheric or free-form surface are becoming more and more common and demanding. Bonnet polishing technology, which uses a new polishing tool and special form of motion, is a high-precision and high-efficiency optical component processing method. This method is especially suitable for the processing of aspherical and free-form surfaces and has broad application prospects. This paper first introduced the basic principle and development process of bonnet polishing technology. Then the key technology and its state-of-the-art bonnet polishing technology were analyzed. Finally, the development of bonnet polishing technology was summarized and prospected.

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Literatur
1.
Zurück zum Zitat Wang ZZ, Shi CC, Zhang PF, Yang Z, Yi C, Guo J (2021) Latest progress in advanced optical manufacturing technology. J Mech Eng 57:23–56CrossRef Wang ZZ, Shi CC, Zhang PF, Yang Z, Yi C, Guo J (2021) Latest progress in advanced optical manufacturing technology. J Mech Eng 57:23–56CrossRef
2.
Zurück zum Zitat Hall PR (1990) Role of asphericity in optical design. Int Soc Optics Photon 1320:384–393 Hall PR (1990) Role of asphericity in optical design. Int Soc Optics Photon 1320:384–393
3.
Zurück zum Zitat Yuan JL, Wu Z, Lu BH, Ruan DN, Lu HZ, Zhao PP (2012) Research status of aspherical ultra-precision polishing technology. J Mech Eng 48:167–177CrossRef Yuan JL, Wu Z, Lu BH, Ruan DN, Lu HZ, Zhao PP (2012) Research status of aspherical ultra-precision polishing technology. J Mech Eng 48:167–177CrossRef
4.
Zurück zum Zitat Richard G, Bingham WD, Kim D, David B, Richard F, Darren R (2000) Novel automated process for aspheric surfaces. Int Soc Optics Photon 4093:445–450 Richard G, Bingham WD, Kim D, David B, Richard F, Darren R (2000) Novel automated process for aspheric surfaces. Int Soc Optics Photon 4093:445–450
5.
Zurück zum Zitat Cheng H, Dong Z, Ye X, Tam H (2014) Subsurface damages of fused silica developed during deterministic small tool polishing. Opt Express 22(15):18588–18603CrossRef Cheng H, Dong Z, Ye X, Tam H (2014) Subsurface damages of fused silica developed during deterministic small tool polishing. Opt Express 22(15):18588–18603CrossRef
6.
Zurück zum Zitat Xiao H, Dai Y, Duan J, Tian Y, Li J (2021) Material removal and surface evolution of single crystal silicon during ion beam polishing. Appl Surf Sci 544:148954CrossRef Xiao H, Dai Y, Duan J, Tian Y, Li J (2021) Material removal and surface evolution of single crystal silicon during ion beam polishing. Appl Surf Sci 544:148954CrossRef
7.
Zurück zum Zitat Chen M, Feng Y, Wan Y, Li Y, Fan B (2010) Neural network based surface shape modeling of stressed lap optical polishing. Appl Opt 49(8):1350–1354CrossRef Chen M, Feng Y, Wan Y, Li Y, Fan B (2010) Neural network based surface shape modeling of stressed lap optical polishing. Appl Opt 49(8):1350–1354CrossRef
8.
Zurück zum Zitat Barman A, Das M (2018) Nano-finishing of bio-titanium alloy to generate different surface morphologies by changing magnetorheological polishing fluid compositions. Precis Eng 51:145–152CrossRef Barman A, Das M (2018) Nano-finishing of bio-titanium alloy to generate different surface morphologies by changing magnetorheological polishing fluid compositions. Precis Eng 51:145–152CrossRef
9.
Zurück zum Zitat Beaucamp A, Katsuura T, Takata K (2018) Process mechanism in ultrasonic cavitation assisted fluid jet polishing. CIRP Ann 67(1):361–364CrossRef Beaucamp A, Katsuura T, Takata K (2018) Process mechanism in ultrasonic cavitation assisted fluid jet polishing. CIRP Ann 67(1):361–364CrossRef
10.
Zurück zum Zitat Walker D, Brooks D, Freeman R (2001) First aspheric form and texture results from a production machine embodying the precession process. Int Soc Optic Eng 4451:267–276 Walker D, Brooks D, Freeman R (2001) First aspheric form and texture results from a production machine embodying the precession process. Int Soc Optic Eng 4451:267–276
11.
Zurück zum Zitat Walker D, Freeman R, Morton R, McCavana G, Beaucamp A (2006) Use of the ‘Precessions’ process for pre-polishing and correcting 2D & 2(1/2) D form. Opt Express 14:11787–11795CrossRef Walker D, Freeman R, Morton R, McCavana G, Beaucamp A (2006) Use of the ‘Precessions’ process for pre-polishing and correcting 2D & 2(1/2) D form. Opt Express 14:11787–11795CrossRef
12.
Zurück zum Zitat Walker D, Beaucamp H, Doubrovski V, Dunn C, Freeman R, Hobbs G, McCavana G, Morton R, Riley D, Simms J, Wei X (2006) New developments in the precessions process for manufacturing free-form, large-optical, and precision-mechanical surfaces. Int Symp Adv Optic Manuf Test Technol 6148:614801–614805 Walker D, Beaucamp H, Doubrovski V, Dunn C, Freeman R, Hobbs G, McCavana G, Morton R, Riley D, Simms J, Wei X (2006) New developments in the precessions process for manufacturing free-form, large-optical, and precision-mechanical surfaces. Int Symp Adv Optic Manuf Test Technol 6148:614801–614805
13.
Zurück zum Zitat Yu G, Walker D, Li H (2012) Research on fabrication of mirror segments for E-ELT. Int Symp Adv Optic Manuf Test Technol: Adv Optic Manuf Technol 8416:1–6 Yu G, Walker D, Li H (2012) Research on fabrication of mirror segments for E-ELT. Int Symp Adv Optic Manuf Test Technol: Adv Optic Manuf Technol 8416:1–6
14.
Zurück zum Zitat Zeng S, Blunt L, Jiang X (2012) The application of Taguchi approach to optimise the processing conditions on bonnet polishing of CoCr. Key Engineering Materials. Trans Tech Publications Ltd 496:235–240 Zeng S, Blunt L, Jiang X (2012) The application of Taguchi approach to optimise the processing conditions on bonnet polishing of CoCr. Key Engineering Materials. Trans Tech Publications Ltd 496:235–240
15.
Zurück zum Zitat Beaucamp A, Namba Y, Inasaki I, Combrinck H, Freeman R (2011) Finishing of optical moulds to λ/20 by automated corrective polishing. CIRP Ann Manuf Technol 60(1):375–378CrossRef Beaucamp A, Namba Y, Inasaki I, Combrinck H, Freeman R (2011) Finishing of optical moulds to λ/20 by automated corrective polishing. CIRP Ann Manuf Technol 60(1):375–378CrossRef
16.
Zurück zum Zitat Zhu W, Beaucamp A (2019) Ultra-precision finishing of low expansion ceramics by compliant abrasive technologies: a comparative study. Ceram Int 45(9):11527–11538CrossRef Zhu W, Beaucamp A (2019) Ultra-precision finishing of low expansion ceramics by compliant abrasive technologies: a comparative study. Ceram Int 45(9):11527–11538CrossRef
17.
Zurück zum Zitat Li H, Walker D, Zheng X, Yu G (2018) Advanced techniques for robotic polishing of aluminum mirrors. Optical fabrication, testing, and metrology VI. Int Soc Optics Photon 10692:106920N Li H, Walker D, Zheng X, Yu G (2018) Advanced techniques for robotic polishing of aluminum mirrors. Optical fabrication, testing, and metrology VI. Int Soc Optics Photon 10692:106920N
18.
Zurück zum Zitat Ke X, Wu W, Wang C, Yu Y, Zhong B, Wang Z, Wang T, Fu J, Guo J (2022) Material removal and surface integrity analysis of Ti6Al4V alloy after polishing by flexible tools with different rigidity. Materials 15(5):1642CrossRef Ke X, Wu W, Wang C, Yu Y, Zhong B, Wang Z, Wang T, Fu J, Guo J (2022) Material removal and surface integrity analysis of Ti6Al4V alloy after polishing by flexible tools with different rigidity. Materials 15(5):1642CrossRef
19.
Zurück zum Zitat Zeng K, Wu X, Jiang F, Zhang J, Kong J, Shen J, Wu H (2022) Experimental research on micro hole drilling of polycrystalline Nd:YAG. Ceram Int 48:9658–9666CrossRef Zeng K, Wu X, Jiang F, Zhang J, Kong J, Shen J, Wu H (2022) Experimental research on micro hole drilling of polycrystalline Nd:YAG. Ceram Int 48:9658–9666CrossRef
20.
Zurück zum Zitat Su X, Ji P, Jin Y, Li D, Walker D, Yu GY, Li HY, Wang B (2019) Simulation and experimental study on form-preserving capability of bonnet polishing for complex freeform surfaces. Precis Eng 60:54–62CrossRef Su X, Ji P, Jin Y, Li D, Walker D, Yu GY, Li HY, Wang B (2019) Simulation and experimental study on form-preserving capability of bonnet polishing for complex freeform surfaces. Precis Eng 60:54–62CrossRef
21.
Zurück zum Zitat Zhang W, Li HY, Yu GB (2009) Research status of key technology of ultra-precision bonnet polishing for optical components. J Opt 29(01):27–34 (In Chinese) Zhang W, Li HY, Yu GB (2009) Research status of key technology of ultra-precision bonnet polishing for optical components. J Opt 29(01):27–34 (In Chinese)
22.
Zurück zum Zitat Zhang W, Li HY, Jin H (2009) Numerical simulation and experimental study on bonnet polishing removal function. J Mech Eng 45(02):308–312 (In Chinese)CrossRef Zhang W, Li HY, Jin H (2009) Numerical simulation and experimental study on bonnet polishing removal function. J Mech Eng 45(02):308–312 (In Chinese)CrossRef
23.
Zurück zum Zitat Ji SM, Zhang L, Jin MS, Li YB, Wan YH (2010) Bonnet polishing technology and its research status. Electromech Eng 27(05):1–12 (In Chinese) Ji SM, Zhang L, Jin MS, Li YB, Wan YH (2010) Bonnet polishing technology and its research status. Electromech Eng 27(05):1–12 (In Chinese)
24.
Zurück zum Zitat Wang CJ (2015) Research on high-efficiency polishing technology for semi-flexible airbags of large-aperture optical components. Xiamen University, Xiamen, China (In Chinese) Wang CJ (2015) Research on high-efficiency polishing technology for semi-flexible airbags of large-aperture optical components. Xiamen University, Xiamen, China (In Chinese)
25.
Zurück zum Zitat Pan R, Zhang YJ, Ding JB, Huang CQ, Wang ZZ (2016) Optimization strategy on conformal polishing of precision optics using bonnet tool. Int J Precis Eng Manuf 17(3):271–280CrossRef Pan R, Zhang YJ, Ding JB, Huang CQ, Wang ZZ (2016) Optimization strategy on conformal polishing of precision optics using bonnet tool. Int J Precis Eng Manuf 17(3):271–280CrossRef
26.
Zurück zum Zitat Cao ZC, Cheung CF, Ho LT, Liu MY (2017) Theoretical and experimental investigation of surface generation in swing precess bonnet polishing of complex three-dimensional structured surfaces. Precis Eng 50:361–371CrossRef Cao ZC, Cheung CF, Ho LT, Liu MY (2017) Theoretical and experimental investigation of surface generation in swing precess bonnet polishing of complex three-dimensional structured surfaces. Precis Eng 50:361–371CrossRef
27.
Zurück zum Zitat Li Z, Li YB, Jin MS, Pu ZY, Ji SM (2014) Analysis of abrasive field in new airbag polishing for mold free-form surface. China Mech Eng 25(06):832–835 (In Chinese) Li Z, Li YB, Jin MS, Pu ZY, Ji SM (2014) Analysis of abrasive field in new airbag polishing for mold free-form surface. China Mech Eng 25(06):832–835 (In Chinese)
28.
Zurück zum Zitat Cao ZC, Chi FC, Zhao X (2016) A theoretical and experimental investigation of material removal characteristics and surface generation in bonnet polishing. Wear 360:137–146CrossRef Cao ZC, Chi FC, Zhao X (2016) A theoretical and experimental investigation of material removal characteristics and surface generation in bonnet polishing. Wear 360:137–146CrossRef
29.
Zurück zum Zitat Ihara M, Matsubara A, Beaucamp A (2020) Study on removal mechanism at the tool rotational center in bonnet polishing of glass - ScienceDirect. Wear 203321:454–455 Ihara M, Matsubara A, Beaucamp A (2020) Study on removal mechanism at the tool rotational center in bonnet polishing of glass - ScienceDirect. Wear 203321:454–455
30.
Zurück zum Zitat Walker D, Beaucamp A, Brooks D, Doubrovski V, Cassie M, Dunn C, Freeman R, King A, Libert M, McCavana G, Morton R, Riley D, Simms J (2004) New results from the Precessions polishing process scaled to larger sizes. Proc SPIE – Int Soc Optic Eng 5494:71–80CrossRef Walker D, Beaucamp A, Brooks D, Doubrovski V, Cassie M, Dunn C, Freeman R, King A, Libert M, McCavana G, Morton R, Riley D, Simms J (2004) New results from the Precessions polishing process scaled to larger sizes. Proc SPIE – Int Soc Optic Eng 5494:71–80CrossRef
31.
Zurück zum Zitat Walker D, Beaucamp A, Doubrovski V, Dunn C, Evans R, Freeman R, Kelchner J, McCavana G, Morton R, Riley D, Simms J, Yu G, Wei X (2006) Automated optical fabrication: first results from the new Precessions 1.2m CNC polishing machine. Proc SPIE – Int Soc Optic Eng 6273:1–9 Walker D, Beaucamp A, Doubrovski V, Dunn C, Evans R, Freeman R, Kelchner J, McCavana G, Morton R, Riley D, Simms J, Yu G, Wei X (2006) Automated optical fabrication: first results from the new Precessions 1.2m CNC polishing machine. Proc SPIE – Int Soc Optic Eng 6273:1–9
32.
Zurück zum Zitat Yang B (2018) Research on ion beam polishing system and processing technology of large aperture optical elements. University of national defense science and technology, Changsha, China (In Chinese) Yang B (2018) Research on ion beam polishing system and processing technology of large aperture optical elements. University of national defense science and technology, Changsha, China (In Chinese)
33.
Zurück zum Zitat Song JF, Yao YX, Xie DG, Gao B (2008) Experimental research on polishing spot of bonnet polishing. Appl Mech Mater 10:385–389 Song JF, Yao YX, Xie DG, Gao B (2008) Experimental research on polishing spot of bonnet polishing. Appl Mech Mater 10:385–389
34.
Zurück zum Zitat Li Z (2016) Analysis and design of control system of bonnet polishing hybrid machine tool. Harbin University of technology, Harbin, China (In Chinese) Li Z (2016) Analysis and design of control system of bonnet polishing hybrid machine tool. Harbin University of technology, Harbin, China (In Chinese)
35.
Zurück zum Zitat Dong AL (2013) Development of man-machine interface of CNC system based on bonnet polishing process. Harbin University of technology, Harbin, China (In Chinese) Dong AL (2013) Development of man-machine interface of CNC system based on bonnet polishing process. Harbin University of technology, Harbin, China (In Chinese)
36.
Zurück zum Zitat Guo YB, Peng YF, Wang ZZ, Bi G, Yang W, Yang P (2018) Development and application of precision grinding and testing equipment for large-bore optical components. Aviation Manuf Technol 61(06):26–35 (In Chinese) Guo YB, Peng YF, Wang ZZ, Bi G, Yang W, Yang P (2018) Development and application of precision grinding and testing equipment for large-bore optical components. Aviation Manuf Technol 61(06):26–35 (In Chinese)
37.
Zurück zum Zitat Huang XP, Wang ZZ, Lin ZW, Zhong B (2020) Automatic tool alignment accuracy analysis of bonnet polishing machine. J Xiamen Univ (Natural Science Edition) 59(04):560–565 (In Chinese) Huang XP, Wang ZZ, Lin ZW, Zhong B (2020) Automatic tool alignment accuracy analysis of bonnet polishing machine. J Xiamen Univ (Natural Science Edition) 59(04):560–565 (In Chinese)
38.
Zurück zum Zitat Wang ZZ, Wang QJ, Yang X, Chen SP, Zhuang XM, Peng YF (2017) Dressing scheme and process parameters analysis for bonnet tool in bonnet polishing. Proc Inst Mech Eng 231(19):1–10 Wang ZZ, Wang QJ, Yang X, Chen SP, Zhuang XM, Peng YF (2017) Dressing scheme and process parameters analysis for bonnet tool in bonnet polishing. Proc Inst Mech Eng 231(19):1–10
39.
Zurück zum Zitat Pan R, Wang ZZ, Wang CJ, Xie YH, Zhang DX, Guo YB (2014) Research on control optimization for bonnet polishing system. Int J Precis Eng Manuf 15(3):483–488CrossRef Pan R, Wang ZZ, Wang CJ, Xie YH, Zhang DX, Guo YB (2014) Research on control optimization for bonnet polishing system. Int J Precis Eng Manuf 15(3):483–488CrossRef
40.
Zurück zum Zitat Bai ZY (2014) Research on trimming and inspection technology of off-line airbag polishing tool. Xiamen University, Xiamen, China (In Chinese) Bai ZY (2014) Research on trimming and inspection technology of off-line airbag polishing tool. Xiamen University, Xiamen, China (In Chinese)
41.
Zurück zum Zitat Zhang DX, Guo YB, Guo YB, Hong YQ, Hou ZG, Pan R (2018) Research on data fusion technology of the online monitoring system for optics bonnet polishing. Proc Inst Mech Eng Part B: J Eng Manuf 8:1436–1443CrossRef Zhang DX, Guo YB, Guo YB, Hong YQ, Hou ZG, Pan R (2018) Research on data fusion technology of the online monitoring system for optics bonnet polishing. Proc Inst Mech Eng Part B: J Eng Manuf 8:1436–1443CrossRef
42.
Zurück zum Zitat Zhou H (2013) Process optimization of robot bonnet grinding and polishing large aspheric surface. Ningbo University, Ningbo, China (In Chinese) Zhou H (2013) Process optimization of robot bonnet grinding and polishing large aspheric surface. Ningbo University, Ningbo, China (In Chinese)
43.
Zurück zum Zitat Huang Z, Zhou T, Wu X, Liu HT, Wan YJ, Zheng X (2020) Research on processing characteristics of SiC optical elements polished by robotic bonnet. J Xi’an Jiaotong Univ 54(12):22–29 (In Chinese) Huang Z, Zhou T, Wu X, Liu HT, Wan YJ, Zheng X (2020) Research on processing characteristics of SiC optical elements polished by robotic bonnet. J Xi’an Jiaotong Univ 54(12):22–29 (In Chinese)
44.
Zurück zum Zitat Lin ZW, Wang ZZ, Huang XP, Kong LW (2021) Robot bonnet polishing removal function stability analysis. Strong Laser Particle Beam 33(05):24–32 (In Chinese) Lin ZW, Wang ZZ, Huang XP, Kong LW (2021) Robot bonnet polishing removal function stability analysis. Strong Laser Particle Beam 33(05):24–32 (In Chinese)
45.
Zurück zum Zitat Zeng CC (2020) Research on repair control technology based on robot bonnet polisher. Southwest University of Science and Technology, Mianyang, China (In Chinese) Zeng CC (2020) Research on repair control technology based on robot bonnet polisher. Southwest University of Science and Technology, Mianyang, China (In Chinese)
46.
Zurück zum Zitat Qiu L (2021) Key technology research on flexible polishing of bonnet for robot of aluminum alloy. Xiamen Institute of Technology, Xiamen, China (In Chinese) Qiu L (2021) Key technology research on flexible polishing of bonnet for robot of aluminum alloy. Xiamen Institute of Technology, Xiamen, China (In Chinese)
47.
Zurück zum Zitat Wang PF (2018) Research on robot precision bonnet polishing technology for aluminum mirror components. Xiamen Institute of Technology, Xiamen, China (In Chinese) Wang PF (2018) Research on robot precision bonnet polishing technology for aluminum mirror components. Xiamen Institute of Technology, Xiamen, China (In Chinese)
48.
Zurück zum Zitat Li H, Walker D, Zheng X, Su X, Wu L, Reynolds C, Yu G, Li T, Zhang P (2019) Mid-spatial frequency removal on aluminum free-form mirror. Opt Express 27(18):24885–24899CrossRef Li H, Walker D, Zheng X, Su X, Wu L, Reynolds C, Yu G, Li T, Zhang P (2019) Mid-spatial frequency removal on aluminum free-form mirror. Opt Express 27(18):24885–24899CrossRef
49.
Zurück zum Zitat Huang Z, Chen G, Liu H, Rao Z, Wu J (2022) Research on robot bonnet polishing silicon carbide optical element machining method based on improved traveling salesman problem pseudo-random polishing path planning. Opt Eng 61(2):025102CrossRef Huang Z, Chen G, Liu H, Rao Z, Wu J (2022) Research on robot bonnet polishing silicon carbide optical element machining method based on improved traveling salesman problem pseudo-random polishing path planning. Opt Eng 61(2):025102CrossRef
50.
Zurück zum Zitat Walker D, Dunn C, Yu G, Bibby M, Zheng X, Wu H, Li H, Lu C (2015) The role of robotics in computer controlled polishing of large and small optics//Optical Manufacturing and Testing Xi. Int Soc Optics Photon 9575:95750B Walker D, Dunn C, Yu G, Bibby M, Zheng X, Wu H, Li H, Lu C (2015) The role of robotics in computer controlled polishing of large and small optics//Optical Manufacturing and Testing Xi. Int Soc Optics Photon 9575:95750B
51.
Zurück zum Zitat Pan R, Zhao W, Wang Z, Shuting J, Gao X, Chen D, Fan J (2021) Research on an evaluation model for the working stiffness of a robot-assisted bonnet polishing system. J Manuf Process 65:134–143CrossRef Pan R, Zhao W, Wang Z, Shuting J, Gao X, Chen D, Fan J (2021) Research on an evaluation model for the working stiffness of a robot-assisted bonnet polishing system. J Manuf Process 65:134–143CrossRef
52.
Zurück zum Zitat Song JF (2009) Optimizing process parameters and related technologies for balloon polishing of curved surface optical parts. Harbin University of Technology, Harbin, China (In Chinese) Song JF (2009) Optimizing process parameters and related technologies for balloon polishing of curved surface optical parts. Harbin University of Technology, Harbin, China (In Chinese)
53.
Zurück zum Zitat Zeng S, Blunt L (2014) Experimental investigation and analytical modelling of the effects of process parameters on material removal rate for bonnet polishing of cobalt chrome alloy. Precis Eng 38:348–355CrossRef Zeng S, Blunt L (2014) Experimental investigation and analytical modelling of the effects of process parameters on material removal rate for bonnet polishing of cobalt chrome alloy. Precis Eng 38:348–355CrossRef
54.
Zurück zum Zitat Jiang T, Guo YB, Wang ZS, Lin GD (2015) Study on influencing factors of removal efficiency of optical element bonnet polishing. J Huazhong Univ Sci Technol (Natural Science Edition) 43(01):12–15 (In Chinese) Jiang T, Guo YB, Wang ZS, Lin GD (2015) Study on influencing factors of removal efficiency of optical element bonnet polishing. J Huazhong Univ Sci Technol (Natural Science Edition) 43(01):12–15 (In Chinese)
55.
Zurück zum Zitat Pan R (2014) Research on high efficiency and controllable bonnet polishing technology for large aspheric surface. Xiamen University, Xiamen, China (In Chinese) Pan R (2014) Research on high efficiency and controllable bonnet polishing technology for large aspheric surface. Xiamen University, Xiamen, China (In Chinese)
56.
Zurück zum Zitat Zhong B, Deng W, Chen X, Wen S, Wang J, Xu Q (2021) Frequency division combined machining method to improve polishing efficiency of continuous phase plate by bonnet polishing. Opt Express 29(2):1597–1612CrossRef Zhong B, Deng W, Chen X, Wen S, Wang J, Xu Q (2021) Frequency division combined machining method to improve polishing efficiency of continuous phase plate by bonnet polishing. Opt Express 29(2):1597–1612CrossRef
57.
Zurück zum Zitat Sha SJ, Wang LS, Shi YJ (2012) Research on flexible bonnet polishing process method and related technology. In Advanced Materials Research. Trans Tech Publications Ltd 490:2916–2920 Sha SJ, Wang LS, Shi YJ (2012) Research on flexible bonnet polishing process method and related technology. In Advanced Materials Research. Trans Tech Publications Ltd 490:2916–2920
58.
Zurück zum Zitat Gray C, Baker I, Davies G, Evans R, Field N, Fox T, Messelink W, Mitchell J, Rees P, Waine S, Walker D, Yu G (2013) Fast manufacturing of E-ELT mirror segments using CNC polishing. In Optical Manufacturing and Testing X. SPIE 8838:146–157 Gray C, Baker I, Davies G, Evans R, Field N, Fox T, Messelink W, Mitchell J, Rees P, Waine S, Walker D, Yu G (2013) Fast manufacturing of E-ELT mirror segments using CNC polishing. In Optical Manufacturing and Testing X. SPIE 8838:146–157
59.
Zurück zum Zitat Vecchi G, Basso S, Civitani M, Ghigo M, Pareschi G, Riva M, Zerbi F (2015) A bonnet and fluid jet polishing facility for optics fabrication related to the E-ELT. Optic Manuf Test X 8838:146–157 Vecchi G, Basso S, Civitani M, Ghigo M, Pareschi G, Riva M, Zerbi F (2015) A bonnet and fluid jet polishing facility for optics fabrication related to the E-ELT. Optic Manuf Test X 8838:146–157
60.
Zurück zum Zitat Gao B, Yao YX, Xie DG, Yuan ZJ, Liu Y (2004) Development and characterization of bonnet polishing tools. Modern Manuf Eng 10:52–54 (In Chinese) Gao B, Yao YX, Xie DG, Yuan ZJ, Liu Y (2004) Development and characterization of bonnet polishing tools. Modern Manuf Eng 10:52–54 (In Chinese)
61.
Zurück zum Zitat Kong L, Jia ZH, Shao W, Liu DM, Fu XH (2016) Design of CNC airbag polishing structure and research on non-spherical processing technology. J Changchun Univ Technol (Natural Science Edition) 39(06):27–30 (In Chinese) Kong L, Jia ZH, Shao W, Liu DM, Fu XH (2016) Design of CNC airbag polishing structure and research on non-spherical processing technology. J Changchun Univ Technol (Natural Science Edition) 39(06):27–30 (In Chinese)
62.
Zurück zum Zitat Wang CJ, Yang W, Wang Z, Yang X, Sun Z, Zhong B, Pan R, Yang P, Guo Y, Xu Q (2014) Highly efficient deterministic polishing using a semirigid bonnet. Opt Eng 53(9):095102CrossRef Wang CJ, Yang W, Wang Z, Yang X, Sun Z, Zhong B, Pan R, Yang P, Guo Y, Xu Q (2014) Highly efficient deterministic polishing using a semirigid bonnet. Opt Eng 53(9):095102CrossRef
63.
Zurück zum Zitat Wang CJ, Yang W, Wang ZZ, Pan R, Guo YB (2013) Research on the optimization of the bonnet polishing tool. Appl Mech Mater 278:406–413 Wang CJ, Yang W, Wang ZZ, Pan R, Guo YB (2013) Research on the optimization of the bonnet polishing tool. Appl Mech Mater 278:406–413
64.
Zurück zum Zitat Wang CJ, Wang Z, Wang Q, Ke X, Zhong B, Guo Y, Xu Q (2017) Improved semirigid bonnet tool for high-efficiency polishing on large aspheric optics. Int J Adv Manuf Technol 88:1607–1617CrossRef Wang CJ, Wang Z, Wang Q, Ke X, Zhong B, Guo Y, Xu Q (2017) Improved semirigid bonnet tool for high-efficiency polishing on large aspheric optics. Int J Adv Manuf Technol 88:1607–1617CrossRef
65.
Zurück zum Zitat Jiang JY, Jiang C, Liu JH (2021) Optimum design of bonnet polishing head structure based on finite element analysis. Agric Equip Vehic Eng 59(01):11–16 (In Chinese) Jiang JY, Jiang C, Liu JH (2021) Optimum design of bonnet polishing head structure based on finite element analysis. Agric Equip Vehic Eng 59(01):11–16 (In Chinese)
66.
Zurück zum Zitat Walker D, Baldwin A, Evans R, Freeman R, Hamidi S, Shore P, Tonnellier X, Wei S, Yu G (2007) A quantitative comparison of three grolishing techniques for the precessions process. SPIE Optic Eng App 6671:66711H Walker D, Baldwin A, Evans R, Freeman R, Hamidi S, Shore P, Tonnellier X, Wei S, Yu G (2007) A quantitative comparison of three grolishing techniques for the precessions process. SPIE Optic Eng App 6671:66711H
67.
Zurück zum Zitat Walker D, Beaucamp A, Brooks D, Doubrovski V, Cassie D, Dunn C, Freeman R, King A, Libert M, McCavana G, Morton R, Riley D, Simms J (2004) Recent developments of Precessions polishing for larger components and free-form surfaces. SPIE Optics Photon 5523:281–289 Walker D, Beaucamp A, Brooks D, Doubrovski V, Cassie D, Dunn C, Freeman R, King A, Libert M, McCavana G, Morton R, Riley D, Simms J (2004) Recent developments of Precessions polishing for larger components and free-form surfaces. SPIE Optics Photon 5523:281–289
68.
Zurück zum Zitat Beaucamp A, Namba Y, Combrinck H, Charlton P (2014) Shape adaptive grinding of CVD silicon carbide. CIRP Ann 63(1):317–320CrossRef Beaucamp A, Namba Y, Combrinck H, Charlton P (2014) Shape adaptive grinding of CVD silicon carbide. CIRP Ann 63(1):317–320CrossRef
69.
Zurück zum Zitat Beaucamp A, Simon P, Charlton P, King C, Matsubara A, Wegener K (2017) Brittle-ductile transition in shape adaptive grinding (SAG) of SiC aspheric optics. Int J Mach Tools Manuf 115:29–37CrossRef Beaucamp A, Simon P, Charlton P, King C, Matsubara A, Wegener K (2017) Brittle-ductile transition in shape adaptive grinding (SAG) of SiC aspheric optics. Int J Mach Tools Manuf 115:29–37CrossRef
70.
Zurück zum Zitat Zhu W, Yang Y, Li H, Axinte D, Beaucamp A (2019) Theoretical and experimental investigation of material removal mechanism in compliant shape adaptive grinding process. Int J Mach Tools Manuf 142:76–97CrossRef Zhu W, Yang Y, Li H, Axinte D, Beaucamp A (2019) Theoretical and experimental investigation of material removal mechanism in compliant shape adaptive grinding process. Int J Mach Tools Manuf 142:76–97CrossRef
71.
Zurück zum Zitat Beaucamp A, Namba Y, Charlton P (2015) Process mechanism in shape adaptive grinding (SAG). CIRP Ann 64(1):305–308CrossRef Beaucamp A, Namba Y, Charlton P (2015) Process mechanism in shape adaptive grinding (SAG). CIRP Ann 64(1):305–308CrossRef
72.
Zurück zum Zitat Zhong B, Huang H, Chen X, Wang J, Pan R, Wen Z (2018) Impact of pad conditioning on the bonnet polishing process. Int J Adv Manuf Technol 98:539–549CrossRef Zhong B, Huang H, Chen X, Wang J, Pan R, Wen Z (2018) Impact of pad conditioning on the bonnet polishing process. Int J Adv Manuf Technol 98:539–549CrossRef
73.
Zurück zum Zitat Yang W, Wang CJ (2013) Research on the normal error of large aspheric mirror employed in bonnet polishing. Adv Mater Res 690:3321–3324CrossRef Yang W, Wang CJ (2013) Research on the normal error of large aspheric mirror employed in bonnet polishing. Adv Mater Res 690:3321–3324CrossRef
74.
Zurück zum Zitat Yang X, Wang Z, Wang C, Peng Y (2018) Analysis of effects of precession mechanism error on polishing spot for bonnet polishing. Proc Inst Mech Eng Part B: J Eng Manuf 232:350–357CrossRef Yang X, Wang Z, Wang C, Peng Y (2018) Analysis of effects of precession mechanism error on polishing spot for bonnet polishing. Proc Inst Mech Eng Part B: J Eng Manuf 232:350–357CrossRef
75.
Zurück zum Zitat Guo JK, Beaucamp A, Ibaraki S (2017) Virtual pivot alignment method and its influence to profile error in bonnet polishing. Int J Mach Tools Manuf 122:18–31CrossRef Guo JK, Beaucamp A, Ibaraki S (2017) Virtual pivot alignment method and its influence to profile error in bonnet polishing. Int J Mach Tools Manuf 122:18–31CrossRef
76.
Zurück zum Zitat Wang F, Zhang J, Peng LR, Wang GW, Sui YX (2015) Motion accuracy control of bonnet polishing process. Optic Precis Eng 23(08):2220–2228CrossRef Wang F, Zhang J, Peng LR, Wang GW, Sui YX (2015) Motion accuracy control of bonnet polishing process. Optic Precis Eng 23(08):2220–2228CrossRef
77.
Zurück zum Zitat Gao B, Yao YX, Xie DG, Yuan ZJ (2006) Motion modeling and simulation of bonnet polishing intake mechanism. J Mech Eng 02:101–104 (In Chinese)CrossRef Gao B, Yao YX, Xie DG, Yuan ZJ (2006) Motion modeling and simulation of bonnet polishing intake mechanism. J Mech Eng 02:101–104 (In Chinese)CrossRef
78.
Zurück zum Zitat Pan R, Wang ZZ, Guo YB, Wang CJ, Zhang DX (2012) Modeling and control of precession motion for polishing of large-bore axisymmetric aspherical bonnet. J Mech Eng 48(11):183–190CrossRef Pan R, Wang ZZ, Guo YB, Wang CJ, Zhang DX (2012) Modeling and control of precession motion for polishing of large-bore axisymmetric aspherical bonnet. J Mech Eng 48(11):183–190CrossRef
79.
Zurück zum Zitat Pan R, Wang ZZ, Wang CJ, Zhang DX, Xie YH, Guo YB (2013) Advanced motion control technology for bonnet polishing of free-form surface optical elements. J Mech Eng 49(03):186–193CrossRef Pan R, Wang ZZ, Wang CJ, Zhang DX, Xie YH, Guo YB (2013) Advanced motion control technology for bonnet polishing of free-form surface optical elements. J Mech Eng 49(03):186–193CrossRef
80.
Zurück zum Zitat Pan R, Wang ZZ, Wang CJ, Zhang DX, Xie YH, Guo YB (2014) Movement modeling and control of precession mechanism for bonnet polishing based on static highest-stiffness strategy. J Chin Inst Eng 37(7):932–938 (In Chinese)CrossRef Pan R, Wang ZZ, Wang CJ, Zhang DX, Xie YH, Guo YB (2014) Movement modeling and control of precession mechanism for bonnet polishing based on static highest-stiffness strategy. J Chin Inst Eng 37(7):932–938 (In Chinese)CrossRef
81.
Zurück zum Zitat Walker D, Beaucamp H, Bingham G, Brooks D, Freeman R, Kim S, King A, McCavana G, Morton R, Riley D, Simms J (2003) The Precessions process for efficient production of aspheric optics for large telescopes and their instrumentation. SPIE Astron Telesc Instrum 4842:73–84 Walker D, Beaucamp H, Bingham G, Brooks D, Freeman R, Kim S, King A, McCavana G, Morton R, Riley D, Simms J (2003) The Precessions process for efficient production of aspheric optics for large telescopes and their instrumentation. SPIE Astron Telesc Instrum 4842:73–84
82.
Zurück zum Zitat Walker D, Brooks D, King A, Freeman R, Morton R, McCavana G, Kim S (2003) The ‘Precessions’ tooling for polishing and figuring flat, spherical and aspheric surfaces. Opt Express 11(8):958–964CrossRef Walker D, Brooks D, King A, Freeman R, Morton R, McCavana G, Kim S (2003) The ‘Precessions’ tooling for polishing and figuring flat, spherical and aspheric surfaces. Opt Express 11(8):958–964CrossRef
83.
Zurück zum Zitat Kim DW, Kim S-W (2005) Novel simulation technique for efficient fabrication of 2-m class hexagonal segments for extremely large telescope primary mirrors. SPIE/COS Photon Asia 5638:48–59 Kim DW, Kim S-W (2005) Novel simulation technique for efficient fabrication of 2-m class hexagonal segments for extremely large telescope primary mirrors. SPIE/COS Photon Asia 5638:48–59
84.
Zurück zum Zitat Kim DW, Kim SW (2005) Static tool influence function for fabrication simulation of hexagonal mirror segments for extremely large telescopes. Opt Express 13(3):910–917CrossRef Kim DW, Kim SW (2005) Static tool influence function for fabrication simulation of hexagonal mirror segments for extremely large telescopes. Opt Express 13(3):910–917CrossRef
85.
Zurück zum Zitat Li HY, Zhang W, Yu GB (2009) Removal characteristics of ultra-precision airbag polishing for space optical elements. J Opt 29(03):811–817 (In Chinese) Li HY, Zhang W, Yu GB (2009) Removal characteristics of ultra-precision airbag polishing for space optical elements. J Opt 29(03):811–817 (In Chinese)
86.
Zurück zum Zitat Li H, Walker D, Yu G, Zhang W (2013) Modeling and validation of polishing tool influence functions for manufacturing segments for an extremely large telescope. Appl Opt 52(23):5781–5787CrossRef Li H, Walker D, Yu G, Zhang W (2013) Modeling and validation of polishing tool influence functions for manufacturing segments for an extremely large telescope. Appl Opt 52(23):5781–5787CrossRef
87.
Zurück zum Zitat Wang CJ, Guo YB, Wang ZZ, Pan R, Xie YH (2013) Modeling of dynamic removal function for optical element bonnet polishing system. J Mech Eng 49(17):19–25 (In Chinese)CrossRef Wang CJ, Guo YB, Wang ZZ, Pan R, Xie YH (2013) Modeling of dynamic removal function for optical element bonnet polishing system. J Mech Eng 49(17):19–25 (In Chinese)CrossRef
88.
Zurück zum Zitat Song J, Yao Y (2015) Material removal model considering influence of curvature radius in bonnet polishing convex surface. Chin J Mech Eng 28:1109–1116 (In Chinese)CrossRef Song J, Yao Y (2015) Material removal model considering influence of curvature radius in bonnet polishing convex surface. Chin J Mech Eng 28:1109–1116 (In Chinese)CrossRef
89.
Zurück zum Zitat Zhong B, Wang C, Chen X, Wang J (2019) Time-varying tool influence function model of bonnet polishing for aspheric surfaces. Appl Opt 58(4):1101–1109CrossRef Zhong B, Wang C, Chen X, Wang J (2019) Time-varying tool influence function model of bonnet polishing for aspheric surfaces. Appl Opt 58(4):1101–1109CrossRef
90.
Zurück zum Zitat Ke XL, Wang CJ, Guo YB, Xu Q (2016) Modeling of tool influence function for high-efficiency polishing. Int J Adv Manuf Technol 84:2479–2489CrossRef Ke XL, Wang CJ, Guo YB, Xu Q (2016) Modeling of tool influence function for high-efficiency polishing. Int J Adv Manuf Technol 84:2479–2489CrossRef
91.
Zurück zum Zitat Cao Z, Cheung CF (2016) Multi-scale modeling and simulation of material removal characteristics in computer-controlled bonnet polishing. Int J Mech Sci 106:147–156CrossRef Cao Z, Cheung CF (2016) Multi-scale modeling and simulation of material removal characteristics in computer-controlled bonnet polishing. Int J Mech Sci 106:147–156CrossRef
92.
Zurück zum Zitat Shi C, Peng Y, Hou L, Wang Z, Guo Y (2018) Improved analysis model for material removal mechanisms of bonnet polishing incorporating the pad wear effect. Appl Opt 57(25):7172–7186CrossRef Shi C, Peng Y, Hou L, Wang Z, Guo Y (2018) Improved analysis model for material removal mechanisms of bonnet polishing incorporating the pad wear effect. Appl Opt 57(25):7172–7186CrossRef
93.
Zurück zum Zitat Shi C, Peng Y, Hou L, Wang Z, Guo Y (2018) Micro-analysis model for material removal mechanisms of bonnet polishing. Appl Opt 57(11):2861–2872CrossRef Shi C, Peng Y, Hou L, Wang Z, Guo Y (2018) Micro-analysis model for material removal mechanisms of bonnet polishing. Appl Opt 57(11):2861–2872CrossRef
94.
Zurück zum Zitat Pan R, Zhong B, Chen DJ, Wang ZZ, Fan JW, Zhang CY, Wei SN (2018) Modification of tool influence function of bonnet polishing based on interfacial friction coefficient. Int J Mach Tools Manuf 124:43–52CrossRef Pan R, Zhong B, Chen DJ, Wang ZZ, Fan JW, Zhang CY, Wei SN (2018) Modification of tool influence function of bonnet polishing based on interfacial friction coefficient. Int J Mach Tools Manuf 124:43–52CrossRef
95.
Zurück zum Zitat Mizugaki Y, Sakamoto M, Sata T (1992) Fractal path generation for a metal-mold polishing robot system and its evaluation by the operability. CIRP Ann 41(1):531–534CrossRef Mizugaki Y, Sakamoto M, Sata T (1992) Fractal path generation for a metal-mold polishing robot system and its evaluation by the operability. CIRP Ann 41(1):531–534CrossRef
96.
Zurück zum Zitat Lawson J, Wolfe C, Manes K, Trenholme J, Aikens D, English R (1995) Specification of optical components using the power spectral density function. Int Soc Optics Photon 2536:38–50 Lawson J, Wolfe C, Manes K, Trenholme J, Aikens D, English R (1995) Specification of optical components using the power spectral density function. Int Soc Optics Photon 2536:38–50
97.
Zurück zum Zitat Zhou XS, Li SY, Dai YF, Zheng ZW, Yang Z (2007) Control method for medium frequency error of optical surface - determining area correction method. Optic Precis Eng 11:1668–1673 Zhou XS, Li SY, Dai YF, Zheng ZW, Yang Z (2007) Control method for medium frequency error of optical surface - determining area correction method. Optic Precis Eng 11:1668–1673
98.
Zurück zum Zitat Pan R, Wang Z, Guo Y, Wang C, Liang K (2014) Analysis of corrective characteristics of various polishing methods for mid-frequency errors. Proc Inst Mech Eng C J Mech Eng Sci 228:525–534CrossRef Pan R, Wang Z, Guo Y, Wang C, Liang K (2014) Analysis of corrective characteristics of various polishing methods for mid-frequency errors. Proc Inst Mech Eng C J Mech Eng Sci 228:525–534CrossRef
99.
Zurück zum Zitat Wang C, Yang W, Ye S, Wang ZZ, Zhong B, Guo YB, Xu Q (2014) Optimization of parameters for bonnet polishing based on the minimum residual error method. Opt Eng 53(7):1–9CrossRef Wang C, Yang W, Ye S, Wang ZZ, Zhong B, Guo YB, Xu Q (2014) Optimization of parameters for bonnet polishing based on the minimum residual error method. Opt Eng 53(7):1–9CrossRef
100.
Zurück zum Zitat Lin G, Bi G, Hu CL, Jiang T, Peng YF (2015) Influence of bonnet polishing path on if error of optical elements. J Xiamen Univ 54(02):281–285 (In Chinese) Lin G, Bi G, Hu CL, Jiang T, Peng YF (2015) Influence of bonnet polishing path on if error of optical elements. J Xiamen Univ 54(02):281–285 (In Chinese)
101.
Zurück zum Zitat Ren DS (2011) Research on distribution characteristics of medium and high frequency errors in certain optical processing and shaping methods. University of National Defense Science and Technology, Changsha, China (In Chinese) Ren DS (2011) Research on distribution characteristics of medium and high frequency errors in certain optical processing and shaping methods. University of National Defense Science and Technology, Changsha, China (In Chinese)
102.
Zurück zum Zitat Cho U, Eom D, Lee D, Park J (1992) A flexible polishing robot system for die and mould. In 23rd International Symposium on Industrial Robots, pp 449–456 Cho U, Eom D, Lee D, Park J (1992) A flexible polishing robot system for die and mould. In 23rd International Symposium on Industrial Robots, pp 449–456
103.
Zurück zum Zitat Pessoles X, Tournier C (2008) Automatic polishing process of plastic injection molds on a 5-axis milling center. J Mater Process Technol 209(7):3665–3673CrossRef Pessoles X, Tournier C (2008) Automatic polishing process of plastic injection molds on a 5-axis milling center. J Mater Process Technol 209(7):3665–3673CrossRef
104.
Zurück zum Zitat Tam HY, Lui C, Mok C (1999) Robotic polishing of free-form surfaces using scanning paths. J Mater Process Technol 95(1–3):191–200CrossRef Tam HY, Lui C, Mok C (1999) Robotic polishing of free-form surfaces using scanning paths. J Mater Process Technol 95(1–3):191–200CrossRef
105.
Zurück zum Zitat Tam HY (1999) Toward the uniform coverage of surfaces by scanning curves. Comput Aided Des 31(9):583–596MATHCrossRef Tam HY (1999) Toward the uniform coverage of surfaces by scanning curves. Comput Aided Des 31(9):583–596MATHCrossRef
106.
Zurück zum Zitat Tam HY, Cheng HB (2010) An investigation of the effects of the tool path on the removal of material in polishing. J Mater Process Technol 210(5):807–818CrossRef Tam HY, Cheng HB (2010) An investigation of the effects of the tool path on the removal of material in polishing. J Mater Process Technol 210(5):807–818CrossRef
107.
Zurück zum Zitat Tam HY, Cheng HB, Dong ZC (2013) Peano-like paths for subaperture polishing of optical aspherical surfaces. Appl Opt 52(15):3624–3636CrossRef Tam HY, Cheng HB, Dong ZC (2013) Peano-like paths for subaperture polishing of optical aspherical surfaces. Appl Opt 52(15):3624–3636CrossRef
108.
Zurück zum Zitat Dunn C, Walker D (2008) Pseudo-random tool paths for CNC sub-aperture polishing and other applications. Opt Express 16(23):18942–18949CrossRef Dunn C, Walker D (2008) Pseudo-random tool paths for CNC sub-aperture polishing and other applications. Opt Express 16(23):18942–18949CrossRef
109.
Zurück zum Zitat Wang C, Wang Z, Xu Q (2015) Unicursal random maze tool path for computer-controlled optical surfacing. Appl Opt 54(34):10128–10136CrossRef Wang C, Wang Z, Xu Q (2015) Unicursal random maze tool path for computer-controlled optical surfacing. Appl Opt 54(34):10128–10136CrossRef
110.
Zurück zum Zitat Hu H, Dai Y, Peng X (2010) Restraint of tool path ripple based on surface error distribution and process parameters in deterministic finishing. Opt Express 18:22973–22981CrossRef Hu H, Dai Y, Peng X (2010) Restraint of tool path ripple based on surface error distribution and process parameters in deterministic finishing. Opt Express 18:22973–22981CrossRef
111.
Zurück zum Zitat Deng WJ, Zheng LG, Shi YL, Wang XK, Zhang XJ (2009) Adaptive planning of NC polishing path for off-axis aspherical surface. Optic Precis Eng 17(01):65–71 Deng WJ, Zheng LG, Shi YL, Wang XK, Zhang XJ (2009) Adaptive planning of NC polishing path for off-axis aspherical surface. Optic Precis Eng 17(01):65–71
112.
Zurück zum Zitat Jiang T (2020) High-efficiency bonnet polishing medium-frequency error control path planning. Guangdong Chem Ind 47(19):58–60 (In Chinese) Jiang T (2020) High-efficiency bonnet polishing medium-frequency error control path planning. Guangdong Chem Ind 47(19):58–60 (In Chinese)
113.
Zurück zum Zitat Zhu CR (2016) Research on bonnet polishing process based on five-axle mixed bonnet Polisher. Harbin University of Technology, Harbin, China (In Chinese) Zhu CR (2016) Research on bonnet polishing process based on five-axle mixed bonnet Polisher. Harbin University of Technology, Harbin, China (In Chinese)
114.
Zurück zum Zitat Dong B (2019) Path planning for freeform surface bonnet polishing based on residual height peak. Yanshan University, Hebei, China (In Chinese) Dong B (2019) Path planning for freeform surface bonnet polishing based on residual height peak. Yanshan University, Hebei, China (In Chinese)
115.
Zurück zum Zitat Qu XT, Wang HY, Fan C, Wu WZ, Liu XL (2015) Aspheric polishing trajectory planning of equal overlap helix. J Xi’an Jiaotong Univ 49(06):126–131 (In Chinese) Qu XT, Wang HY, Fan C, Wu WZ, Liu XL (2015) Aspheric polishing trajectory planning of equal overlap helix. J Xi’an Jiaotong Univ 49(06):126–131 (In Chinese)
116.
Zurück zum Zitat Han Y (2020) Deterministic polishing path planning and material removal optimization. Jilin University, Jilin, China (In Chinese) Han Y (2020) Deterministic polishing path planning and material removal optimization. Jilin University, Jilin, China (In Chinese)
117.
Zurück zum Zitat Zhang LP, Yang H, Bao LX, Li J (2014) Optimum residence time for intake bonnet polishing. Optic Precis Eng 22(12):3303–3309CrossRef Zhang LP, Yang H, Bao LX, Li J (2014) Optimum residence time for intake bonnet polishing. Optic Precis Eng 22(12):3303–3309CrossRef
118.
Zurück zum Zitat Wang W (2020) Research on removal function and algorithms for bonnet moulding of X-ray focusing mirror. Harbin University of Technology, Harbin, China (In Chinese) Wang W (2020) Research on removal function and algorithms for bonnet moulding of X-ray focusing mirror. Harbin University of Technology, Harbin, China (In Chinese)
119.
Zurück zum Zitat Li QS, Cheng Y, Cai FZ, Feng ZJ, Zhang BP (1999) Study on residence time algorithms for computer controlled optical surface forming. Optic Technol 57(03):60–63 Li QS, Cheng Y, Cai FZ, Feng ZJ, Zhang BP (1999) Study on residence time algorithms for computer controlled optical surface forming. Optic Technol 57(03):60–63
120.
Zurück zum Zitat Han Y, Wu F, Wan YJ (2009) Calculation method of residence time of CCOS technology. Photoelectr Technol Committee Chinese Astronaut Soc 38:69–72 (In Chinese) Han Y, Wu F, Wan YJ (2009) Calculation method of residence time of CCOS technology. Photoelectr Technol Committee Chinese Astronaut Soc 38:69–72 (In Chinese)
121.
Zurück zum Zitat Fang H, Guo P, Yu J (2006) Dwell function algorithm in fluid jet polishing. Appl Opt 45:4291–4296CrossRef Fang H, Guo P, Yu J (2006) Dwell function algorithm in fluid jet polishing. Appl Opt 45:4291–4296CrossRef
122.
Zurück zum Zitat Jiao CJ, Li SY, Xie XH, Zhou L, Duan WR (2009) Ion beam correction dwell time algorithm for low-steepness optical mirror surface error based on Bayesian principle. J Mech Eng 45(11):253–259 (In Chinese)CrossRef Jiao CJ, Li SY, Xie XH, Zhou L, Duan WR (2009) Ion beam correction dwell time algorithm for low-steepness optical mirror surface error based on Bayesian principle. J Mech Eng 45(11):253–259 (In Chinese)CrossRef
123.
Zurück zum Zitat Deng WJ, Zheng LG, Shi YL, Wang XK, Zhang XJ (2007) Residence time algorithm based on linear algebra and regularization method. Optic Precis Eng 07:1009–1015 (In Chinese) Deng WJ, Zheng LG, Shi YL, Wang XK, Zhang XJ (2007) Residence time algorithm based on linear algebra and regularization method. Optic Precis Eng 07:1009–1015 (In Chinese)
124.
Zurück zum Zitat Dong Z, Cheng H (2015) Toward the complete practicability for the linear-equation dwell time model in subaperture polishing. Applied optics. Optic Technol Biomed Optics 54(30):8884–8890 Dong Z, Cheng H (2015) Toward the complete practicability for the linear-equation dwell time model in subaperture polishing. Applied optics. Optic Technol Biomed Optics 54(30):8884–8890
125.
Zurück zum Zitat Dong Z, Cheng H, Tam HY (2015) Robust linear equation dwell time model compatible with large scale discrete surface error matrix. Appl Opt 54(10):2747–2756CrossRef Dong Z, Cheng H, Tam HY (2015) Robust linear equation dwell time model compatible with large scale discrete surface error matrix. Appl Opt 54(10):2747–2756CrossRef
126.
Zurück zum Zitat Wu JF, Lu ZW, Zhang HX, Wang TS (2009) Dwell time algorithm in ion beam figuring. Appl Opt 48(20):3930–3937CrossRef Wu JF, Lu ZW, Zhang HX, Wang TS (2009) Dwell time algorithm in ion beam figuring. Appl Opt 48(20):3930–3937CrossRef
127.
Zurück zum Zitat Wang C, Yang W, Wang Z, Yang X, Hu C, Zhong B, Guo YB, Xu Q (2014) Dwell-time algorithm for polishing large optics. Appl Opt 53(21):4752–4760CrossRef Wang C, Yang W, Wang Z, Yang X, Hu C, Zhong B, Guo YB, Xu Q (2014) Dwell-time algorithm for polishing large optics. Appl Opt 53(21):4752–4760CrossRef
128.
Zurück zum Zitat Cordero-Davila A, Gonzalez-Garcia J, Pedrayes-Lopez M, Aguilar-Chiu LA, Cuautle-Cortes J, Robledo-Sanchez C (2004) Edge effects with the Preston equation for a circular tool and workpiece. Appl Opt 43(6):1250–1254CrossRef Cordero-Davila A, Gonzalez-Garcia J, Pedrayes-Lopez M, Aguilar-Chiu LA, Cuautle-Cortes J, Robledo-Sanchez C (2004) Edge effects with the Preston equation for a circular tool and workpiece. Appl Opt 43(6):1250–1254CrossRef
129.
Zurück zum Zitat Walker D, Beaucamp A, Dunn C, Evans R, Freeman R, Morton R, Wei S, Yu G (2008) Active control of edges and global microstructure on segmented mirrors. Astron Telesc Instrum 701812:1–9 Walker D, Beaucamp A, Dunn C, Evans R, Freeman R, Morton R, Wei S, Yu G (2008) Active control of edges and global microstructure on segmented mirrors. Astron Telesc Instrum 701812:1–9
130.
Zurück zum Zitat Wang W, Xu M, Yu GY (2010) Edge effect control in computer-controlled precision bonnet polishing. In Collection of Papers on 2010 Optics Conference of China Optical Society, 2010:516–525 (In Chinese) Wang W, Xu M, Yu GY (2010) Edge effect control in computer-controlled precision bonnet polishing. In Collection of Papers on 2010 Optics Conference of China Optical Society, 2010:516–525 (In Chinese)
131.
Zurück zum Zitat Walker D, Yu G, Li H, Messelink W, Evans R, Beaucamp A (2012) Edges in CNC polishing: from mirror-segments towards semiconductors, paper 1: edges on processing the global surface. Opt Express 20(18):19787–19798CrossRef Walker D, Yu G, Li H, Messelink W, Evans R, Beaucamp A (2012) Edges in CNC polishing: from mirror-segments towards semiconductors, paper 1: edges on processing the global surface. Opt Express 20(18):19787–19798CrossRef
132.
Zurück zum Zitat Li H, Walker D, Yu G, Sayle A, Messelink W, Evans R, Beaucamp A (2013) Edge control in CNC polishing, paper 2: Simulation and validation of tool influence functions on edges. Opt Express 21(1):370–381CrossRef Li H, Walker D, Yu G, Sayle A, Messelink W, Evans R, Beaucamp A (2013) Edge control in CNC polishing, paper 2: Simulation and validation of tool influence functions on edges. Opt Express 21(1):370–381CrossRef
133.
Zurück zum Zitat Yu G, Walker D, Li H, Zheng X, Beaucamp A (2017) Research on edge-control methods in CNC polishing. J Eur Optic Soc-Rapid Publications 13(1):1–13 Yu G, Walker D, Li H, Zheng X, Beaucamp A (2017) Research on edge-control methods in CNC polishing. J Eur Optic Soc-Rapid Publications 13(1):1–13
134.
Zurück zum Zitat Ke X, Qiu L, Wang C, Wang Z (2020) Tentative investigations on reducing the edge effects in pre-polishing the optics. Appl Sci 10(15):5286CrossRef Ke X, Qiu L, Wang C, Wang Z (2020) Tentative investigations on reducing the edge effects in pre-polishing the optics. Appl Sci 10(15):5286CrossRef
135.
Zurück zum Zitat Beaucamp A, Namba Y (2013) Super-smooth finishing of diamond turned hard X-ray molding dies by combined fluid jet and bonnet polishing. CIRP Ann 62:315–318CrossRef Beaucamp A, Namba Y (2013) Super-smooth finishing of diamond turned hard X-ray molding dies by combined fluid jet and bonnet polishing. CIRP Ann 62:315–318CrossRef
136.
Zurück zum Zitat Su X, Ji P, Liu K, Walker D, Yu GY, Li HY, Li D, Wang B (2019) Combined processing chain for freeform optics based on atmospheric pressure plasma processing and bonnet polishing. Opt Express 27(13):17979–17992CrossRef Su X, Ji P, Liu K, Walker D, Yu GY, Li HY, Li D, Wang B (2019) Combined processing chain for freeform optics based on atmospheric pressure plasma processing and bonnet polishing. Opt Express 27(13):17979–17992CrossRef
137.
Zurück zum Zitat Luo JW (2018) CMP theoretical model establishment and process experimental study on super smooth surface of NiP. Harbin Institute of Technology, Harbin, China (In Chinese) Luo JW (2018) CMP theoretical model establishment and process experimental study on super smooth surface of NiP. Harbin Institute of Technology, Harbin, China (In Chinese)
138.
Zurück zum Zitat Zhu WL, Beaucamp A (2020) Non-Newtonian fluid based contactless sub-aperture polishing. CIRP Ann 69(1):293–296CrossRef Zhu WL, Beaucamp A (2020) Non-Newtonian fluid based contactless sub-aperture polishing. CIRP Ann 69(1):293–296CrossRef
139.
Zurück zum Zitat Wang H, Zhang F, Zhao H, Luan D, Chen Y (2007) Study on optical polishing of optical glass by means of ultrasonic-magnetorheological compound finishing. In 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. SPIE 6722:399–403 Wang H, Zhang F, Zhao H, Luan D, Chen Y (2007) Study on optical polishing of optical glass by means of ultrasonic-magnetorheological compound finishing. In 3rd International Symposium on Advanced Optical Manufacturing and Testing Technologies: Advanced Optical Manufacturing Technologies. SPIE 6722:399–403
140.
Zurück zum Zitat Lormeau JP, Supranowitz C, Dumas P, Nitzsche T, Jenkins R (2015) Field proven technologies for fabrication of high-precision aspheric and freeform optical surfaces. Optics Measure Conf 9442:12–23 Lormeau JP, Supranowitz C, Dumas P, Nitzsche T, Jenkins R (2015) Field proven technologies for fabrication of high-precision aspheric and freeform optical surfaces. Optics Measure Conf 9442:12–23
141.
Zurück zum Zitat Zhu WL, Beaucamp A (2020) Compliant grinding and polishing: a review. Int J Mach Tools Manuf 158:103634CrossRef Zhu WL, Beaucamp A (2020) Compliant grinding and polishing: a review. Int J Mach Tools Manuf 158:103634CrossRef
Metadaten
Titel
Review on ultra-precision bonnet polishing technology
verfasst von
Ziwei Wu
Jianyun Shen
Yunfeng Peng
Xian Wu
Publikationsdatum
23.06.2022
Verlag
Springer London
Erschienen in
The International Journal of Advanced Manufacturing Technology / Ausgabe 5-6/2022
Print ISSN: 0268-3768
Elektronische ISSN: 1433-3015
DOI
https://doi.org/10.1007/s00170-022-09501-9

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