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Erschienen in: Microsystem Technologies 9-11/2008

01.10.2008 | Technical Paper

Micro injection molding for mass production using LIGA mold inserts

verfasst von: Takanori Katoh, Ryuichi Tokuno, Yanping Zhang, Masahiro Abe, Katsumi Akita, Masaharu Akamatsu

Erschienen in: Microsystem Technologies | Ausgabe 9-11/2008

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Abstract

Micro molding is one of key technologies for mass production of polymer micro parts and structures with high aspect ratios. The authors developed a commercially available micro injection molding technology for high aspect ratio microstructures (HARMs) with LIGA-made mold inserts and pressurized CO2 gasses. The test inserts made of nickel with the smallest surface details of 5 μm with structural height of 15 μm were fabricated by using LIGA technology. High surface quality in terms of low surface roughness of the mold inserts allowed using for injection molding. Compared to standard inserts no draft, which is required to provide a proper demolding, was formed in the inserts. To meet higher economic efficiency and cost reduction, a fully electrical injection molding machine of higher accuracy has been applied with dissolving CO2 gasses into molten resin. The gasses acts as plasticizer and improves the flowability of the resin. Simultaneously, pressurizing the cavity with the gasses allows high replication to be obtained. Micro injection molding, using polycarbonate as polymer resins, with the aspect ratio of two was achieved in the area of 28 × 55 mm2 at the cycle time of 40 s with CO2 gasses, in contrast to the case of the aspect ratio of 0.1 without the gasses.

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Literatur
Zurück zum Zitat Akamatsu M, Mayama T (2003) AMOTEC injection molding technology using CO2 and injection compression molding for fine pattern replication. Plast Age (Japanease) 49(2):101–103 Akamatsu M, Mayama T (2003) AMOTEC injection molding technology using CO2 and injection compression molding for fine pattern replication. Plast Age (Japanease) 49(2):101–103
Zurück zum Zitat Becher EW, Ehrfeld W, Hagmann P, Maner A, Muenchmeyer D (1986) Fabrication of microstructures with high aspect ratio and great structural heights by synchrotron radiation lithography, electroforming and plastic molding (LIGA process). Microelectron Eng 4:35–56CrossRef Becher EW, Ehrfeld W, Hagmann P, Maner A, Muenchmeyer D (1986) Fabrication of microstructures with high aspect ratio and great structural heights by synchrotron radiation lithography, electroforming and plastic molding (LIGA process). Microelectron Eng 4:35–56CrossRef
Zurück zum Zitat Datta P, Goettert J (2007) Method for polymer hot embossing process development. Microsyst Technol 13:265–270CrossRef Datta P, Goettert J (2007) Method for polymer hot embossing process development. Microsyst Technol 13:265–270CrossRef
Zurück zum Zitat Despa MS, Kelly KW, Collier JR (1999) Injection molding of polymeric LIGA HARMs. Microsyst Technol 6:60–66CrossRef Despa MS, Kelly KW, Collier JR (1999) Injection molding of polymeric LIGA HARMs. Microsyst Technol 6:60–66CrossRef
Zurück zum Zitat Guckel H (1996) Deep X-ray lithography for micromechanics and precision engineering, Rev. Sci Instrum 67:3357 Guckel H (1996) Deep X-ray lithography for micromechanics and precision engineering, Rev. Sci Instrum 67:3357
Zurück zum Zitat Haverkamp V, Ehrfeld W, Gebauer K, Hessel V, Löwe H, Richter T, Wille C (1999) The potantial of micromixers for contacting of disperse liquid phases. Fresenius J Anal Chem 364:617–624CrossRef Haverkamp V, Ehrfeld W, Gebauer K, Hessel V, Löwe H, Richter T, Wille C (1999) The potantial of micromixers for contacting of disperse liquid phases. Fresenius J Anal Chem 364:617–624CrossRef
Zurück zum Zitat Heckele M, Bacher W, Müller KD (1998) Hot embossing––the molding technique for plastic microstructures. Microsyst Technol 4:122–124CrossRef Heckele M, Bacher W, Müller KD (1998) Hot embossing––the molding technique for plastic microstructures. Microsyst Technol 4:122–124CrossRef
Zurück zum Zitat Hirose S, Miyatake T, Li X, Toyota E, Hirose M, Fujii K, Suzuki K (2000) Performance of a compact beamline with high brightness for X-ray lithography. J Vac Sci Technol B18:2986–2989 Hirose S, Miyatake T, Li X, Toyota E, Hirose M, Fujii K, Suzuki K (2000) Performance of a compact beamline with high brightness for X-ray lithography. J Vac Sci Technol B18:2986–2989
Zurück zum Zitat Hori T, Takayama T (1995) 4th international conference on synchrotron radiation sources and 2nd Asian forum on synchrotron radiation (proceedings). POSTECH, Pohang, pp 148–158 Hori T, Takayama T (1995) 4th international conference on synchrotron radiation sources and 2nd Asian forum on synchrotron radiation (proceedings). POSTECH, Pohang, pp 148–158
Zurück zum Zitat Michaeli W, Rogalla A (1996) Moulding in miniature. Eur Plast News, April: 45 Michaeli W, Rogalla A (1996) Moulding in miniature. Eur Plast News, April: 45
Zurück zum Zitat Morton KJ, Strum JC, Austin RH, Chou SY (2006) Nanoimprinted fluidic device for continuous separation of nanoparticles. Proc of μ TAS 1:1014–1016 Morton KJ, Strum JC, Austin RH, Chou SY (2006) Nanoimprinted fluidic device for continuous separation of nanoparticles. Proc of μ TAS 1:1014–1016
Zurück zum Zitat Piotter V, Benzler T, Hanemann T, Wöllmer H, Ruprecht R, Haußelt J (1999) Innovative molding technologies for the fabrication of components for microsystems. SPIE 3680:456–463CrossRef Piotter V, Benzler T, Hanemann T, Wöllmer H, Ruprecht R, Haußelt J (1999) Innovative molding technologies for the fabrication of components for microsystems. SPIE 3680:456–463CrossRef
Zurück zum Zitat Piotter V, Mueller K, Plewa K, Ruprecht R, Hausselt J (2002) Performance and simulation of thermoplastic micro injection molding. Microsyst Technol 8:387–390CrossRef Piotter V, Mueller K, Plewa K, Ruprecht R, Hausselt J (2002) Performance and simulation of thermoplastic micro injection molding. Microsyst Technol 8:387–390CrossRef
Zurück zum Zitat Ruprecht R, Bacher W, Hausselt J, Piotter V (1995) Injection molding of LIGA and LIGA-similar microstructures using filled and unfilled thermoplastics. SPIE 2639:146–157CrossRef Ruprecht R, Bacher W, Hausselt J, Piotter V (1995) Injection molding of LIGA and LIGA-similar microstructures using filled and unfilled thermoplastics. SPIE 2639:146–157CrossRef
Zurück zum Zitat Simoide K, Mawatari K, Mukaiyama S, Fukui H (2002) Bio-chemical analysis on microfabricated polymer chips. Proc of μTAS 2:918–921 Simoide K, Mawatari K, Mukaiyama S, Fukui H (2002) Bio-chemical analysis on microfabricated polymer chips. Proc of μTAS 2:918–921
Zurück zum Zitat Wallabe et al (2001) RibCon: Micromolded easy-assembly multi fiber connector for single- and multi-mode applications. Proc of DTIP conference. SPIE 4408:478–485 Wallabe et al (2001) RibCon: Micromolded easy-assembly multi fiber connector for single- and multi-mode applications. Proc of DTIP conference. SPIE 4408:478–485
Zurück zum Zitat Yamaki H (2001) Novel injection molding technology using CO2. Plast Age (Japanese) 47(6):136–139 Yamaki H (2001) Novel injection molding technology using CO2. Plast Age (Japanese) 47(6):136–139
Zurück zum Zitat Yorita J, Numasawa T, Hirata Y (2004) Manufacturing technology of micromold inserts and micromolding. High Polym 53(5):322–325 Yorita J, Numasawa T, Hirata Y (2004) Manufacturing technology of micromold inserts and micromolding. High Polym 53(5):322–325
Zurück zum Zitat Zhang Y, Katoh T (1996) Synchrotron radiation micromachining of polymers to produce high-aspect-ratio microparts. Jpn J Appl Phys 35:L186–L188CrossRef Zhang Y, Katoh T (1996) Synchrotron radiation micromachining of polymers to produce high-aspect-ratio microparts. Jpn J Appl Phys 35:L186–L188CrossRef
Metadaten
Titel
Micro injection molding for mass production using LIGA mold inserts
verfasst von
Takanori Katoh
Ryuichi Tokuno
Yanping Zhang
Masahiro Abe
Katsumi Akita
Masaharu Akamatsu
Publikationsdatum
01.10.2008
Verlag
Springer-Verlag
Erschienen in
Microsystem Technologies / Ausgabe 9-11/2008
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-007-0533-8

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