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Erschienen in:
01.02.2013
Preparation of CuInSe2 thin films by selenization of co-sputtered Cu-In precursors using rapid thermal processing
Erschienen in: Journal of Materials Science: Materials in Electronics | Ausgabe 2/2013
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Abstract
CuInSe2 thin films have been synthesized by selenization of co-sputtered Cu-In precursors using rapid thermal processing (RTP). Heat treatments from 400 to 450 °C for periods between 1 min and 10 min were carried out on (Cu-In)/Se precursors. Phase evolution as function of reaction temperature and holding time was analyzed according to XRD and SEM results. Severe Se loss during RTP was proved in our experiments and has been reported by many other researchers. To solve the problem, a new effective way of reducing Se loss was presented, which is based on low temperature heat treatment at 250 °C before high temperature annealing. Nearly single-phase CuInSe2 thin films have been achieved by annealing precursors at 250 °C for 5 min then 450 °C for 1 min. Se loss can be significantly reduced via low temperature heat treatment by the fact that under 250 °C, Se is evaporated mildly and largely consumed as Cu-Se and In-Se binary selenides.