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Journal of Materials Science: Materials in Electronics

Erschienen in:

09.12.2016

Thickness dependence of properties Ga-doped ZnO thin films deposited by magnetron sputtering

verfasst von: H. Mahdhi, J. L. Gauffier, K. Djessas, Z. Ben Ayadi

Erschienen in: Journal of Materials Science: Materials in Electronics | Ausgabe 6/2017

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Abstract

In this work, we studied gallium doped zinc oxide (ZnO:Ga) thin films deposited by rf-magnetron sputtering at room temperature using gallium doped nanocrystalline powder synthesized by sol–gel method. The effect of the thickness, on the physical properties of the GZO thin films was analyzed. The influence of the thickness, on structure, surface morphologies, chemical atomic composition, electrical and optical properties was investigated by XRD, SEM, TEM, AFM, Hall measurement and UV Vis–NIR spectrophotometer, respectively. X-ray diffraction (XRD) results revealed the polycrystalline nature of the films with hexagonal wurtzite structure having preferential orientation along [002] direction normal to the substrate. The lowest resistivity obtained from electrical studies was 10⁻⁴ Ω cm. Optical transmittance measurement results show a good transparency within the visible wavelength range for all the films.

Vorheriger Artikel Structural analysis of PVP capped silver nanoparticles synthesized at room temperature for optical, electrical and gas sensing properties

Nächster Artikel Effect of Cobalt doping on ZnS nanoparticles synthesized by microwave irradiation

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H.B. Zeng, W.P. Cai, P.S. Liu, X.X. Xu, H.J. Zhou, C. Klingshrin, H. Kalt, ZnO-based hollow nanoparticles by selective etching: elimination and reconstruction of metal–semiconductor interface, improvement of blue emission and photocatalysis, ACS Nano. 2, 1661–1670 (2008)CrossRef

C. Klingshirn, ZnO: from basics towards applications, Phys. Status Solid. (b) 244, 3027–3073 (2007)CrossRef

U. Ozgur, Y.I. Alivov, C. Liu, A. Teke, M.A. Reshchikov, S. Dogan, V. Avrutin, S.-J. Cho, H. Morkoc, A comprehensive review of ZnO materials and devices, J. Appl. Phys. 98, 041301 (2005)CrossRef

V.S. Khomchenko, T.G. Kryshtab, A.K Savin, Fabrication and properties of ZnO:Cu and ZnO:Ag thin films, Superlattices Microstruct. 42, 94–98 (2007)CrossRef

H.W. Lee, B.G. Choi, K.B. Shim, Y.J. Oh, Preparation of Ti-doped ZnO transparent conductive thin films by PLD method, J. Ceram. Process. Res. 6, 52–56 (2005)

H. Tang, Z. Ye, L. Zhu, H. He, B. Zhao, M. Zhi, Z. Yang, Synthesis of radial ZnO nanostructures by a simple thermal evaporation method, Phys. E 40, 507–511 (2008)CrossRef

A.P. Roth, D.F. Williams, Properties of zinc oxide films prepared by the oxidation of diethyl zinc, J. Appl. Phys. 52, 6685 (1981)CrossRef

L.P. Peng, L. Fang, X.F. Yang, H.B. Ruan, et al., Characteristics of ZnO:In thin films prepared by RF magnetron sputtering, Phys. E Low Dimens. Syst. Nanostruct. 41, 1819–1823 (2009)CrossRef

P. Nunes, E. Fortunato, R. Martins, Influence of the post-treatment on the properties of ZnO thin films, Thin Solid Films 383, 277–280 (2001)CrossRef

10.

L.H. Van, M.H. Hong, J. Ding, Structural and magnetic property of Co-doped-ZnO thin films prepared by pulsed laser deposition, J. Alloys Compd. 449, 207–209 (2008)CrossRef

11.

X.Q. Wei, B.Y. Man, M. Liu, C.S. Xue, H.Z. Zhuang, C. Yang, Blue luminescent centers and microstructural evaluation by XPS and Raman in ZnO thin films annealed in vacuum, N₂ and O₂, Physica B Condens. Matter 388, 145–152 (2007)CrossRef

12.

A.E. Jimenez-Gonzalez, J.A.S. Urueta, R. Suarez-Parra, Optical and electrical characteristics of aluminum-doped ZnO thin films prepared by sol–gel technique, J. Cryst. Growth 192, 430–438 (1998)CrossRef

13.

L. Armelao, M. Fabrizio, S. Gialanella, F. Zordan, Sol–gel synthesis and characterisation of ZnO-based nanosystems, Thin Solid Films 394, 89–95 (2001)CrossRef

14.

G. Aygun, I. Yildiz, Interfacial and structural properties of sputtered HfO{sub 2} layers, J. Appl. Phys. 106, 014312 (2009)CrossRef

15.

K. Omri, I. Najeh, R. Dhahri, J. El Ghoul, L. El Mir, Effects of temperature on the optical and electrical properties of ZnO nanoparticles synthesized by sol–gel method, Microelectron. Eng. 128, 53–58 (2014)CrossRef

16.

H. Mahdhi, Z. Ben Ayadi, S. Alaya, J.L. Gauffier, K. Djessas, The effects of dopant concentration and deposition temperature on the structural, optical and electrical properties of Ga-doped ZnO thin films, Superlattices Microstruct. 72, 60–71 (2014)CrossRef

17.

Z. Ben Ayadi, L. El Mir, K. Djessas, S. Alaya, Electrical and optical properties of aluminum-doped zinc oxide sputtered from an aerogel nanopowder target, Nanotechnology 18, 445702 (2007)CrossRef

18.

Z. Ben Ayadi, L. El Mir, K. Djessas, S. Alaya, Effect of substrate temperature on the properties of Al-doped ZnO films sputtered from aerogel nanopowders for solar cells applications, Thin Solid Films 519, 7572–7574 (2011)CrossRef

19.

Y. Chem, D.M. Bagnall, H.K. Koh, K.T. Park, K. Hiraga, Z.Q. Zhu, T. Yao, Plasma assisted molecular beam epitaxy of ZnO on c -plane sapphire: growth and characterization, J. Appl. Phys. 84, 3912 (1998)CrossRef

20.

B.D. Cullity, Elements of X-ray Diffraction (Addison-Wesley, Reading, 1978), p. 102

21.

K. Medjnoun, K. Djessas, M.S. Belkaid, S. Grillo, A. Solhy, O. Briot, M. Moret, Characteristics of nanostructured Zn1-xVxO thin films with high vanadium content elaborated by rf-magnetron sputtering, Superlattices Microstruct. 82, 384–398 (2015)CrossRef

22.

K. Ellmer, R. Cebulla, R. Wendt, Transparent and conducting ZnO:(Al) films deposited by simultaneous RF- and DC-excitation of a magnetron, Thin Solid Films 317, 413–416 (1998)CrossRef

23.

H. Deng, J.J. Russel, R.N. Lamb, B. Jiang, Microstructure control of ZnO thin films prepared by single source chemical vapor deposition, Thin Solid Films 458, 43–46 (2004)CrossRef

24.

Min-Chul Jun, Sang-Uk Park, Jung-Hyuk Koh, Comparative studies of Al-doped ZnO and Ga-doped ZnO transparent conducting oxide thin films, Nanoscale Res. Lett. 7, 639–645 (2012)CrossRef

25.

Xuhu Yu, Jin Ma, FengJi, Yuheng Wang, Chuanfu Cheng, Honglei Ma, Thickness dependence of properties of ZnO:Ga films deposited by rf magnetron sputtering, Appl. Surf. Sci. 245, 310–315 (2005)CrossRef

26.

G.A. Hirata, J. McKittrick, T. Cheeks, J.M. Siqueiros, J.A. Diaz, O. Contreras, O.A. Lopez, Synthesis and optelectronic characterization of gallium doped zinc oxide transparent electrodes, Thin Solid Films 288, 29–31 (1996)CrossRef

27.

H. Mahdhi, Z. Ben Ayadi, J.L. Gauffier, K. Djessas, S. Alaya, Effect of sputtering power on the electrical and optical properties of Ca-doped ZnO thin films sputtered from nanopowders compacted target, Opt. Mater. 45, 97–103 (2015)CrossRef

28.

J. Tauc, Optical properties and electronic structure of amorphous Ge and Si, Mater. Res. Bull. 3, 37–46 (1968)CrossRef

29.

D.K. Schroder, Semiconductor Material and Device Characterization. (Wiley, New York, 1990)

30.

E. Burstein, Anomalous optical absorption limit in InSb, Phys. Rev. 93, 632–633 (1954)CrossRef

31.

T.S. Moss, The Interpretation of the Properties of Indium Antimonide, Proc. Phys. Soc. B 67, 775–782 (1954)CrossRef

32.

M.A. Lucio-Lopez et al., Thickness dependence of ZnO:In thin films doped with different indium compounds and deposited by chemical spray, Sol. Energy Mater. Sol. Cells 90, 2362–2376 (2006)CrossRef

33.

R.C. Weast, Handbook of Chemistry and Physics, 56th edn. (CRC Press, Cleveland, 1975), pp. B–204

Titel: Thickness dependence of properties Ga-doped ZnO thin films deposited by magnetron sputtering
verfasst von: H. Mahdhi
J. L. Gauffier
K. Djessas
Z. Ben Ayadi
Publikationsdatum: 09.12.2016
Verlag: Springer US
Erschienen in: Journal of Materials Science: Materials in Electronics / Ausgabe 6/2017
Print ISSN: 0957-4522
Elektronische ISSN: 1573-482X
DOI: https://doi.org/10.1007/s10854-016-6158-x

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