Resonant operation and cycle work from a MEMS-based micro-heat engine

The documentation of a new engine thermodynamic cycle on the micro-scale is presented. This new cycle is the result of resonant operation and cycle work production from a MEMS-based micro-heat engine. The engine is constructed of two thin membranes surrounding a cavity filled with working fluid. This new thermodynamic cycle is shown to include nearly constant volume pressure increase, expansion, heat rejection, and compression components. A thermal switch is integrated with the micro-engine to control heat rejection. The micro-engine is shown to produce up to 6.7 μW of cyclic mechanical power when operated on this cycle. Micro-engine natural frequency is shown to vary from 90 to 140 Hz. The Micro-engine is shown to operate across a low temperature gradient of 1.5°C.