Enhanced H₂ sensing properties of a-plane ZnO prepared on c-cut sapphire substrate by sputtering

Zinc oxide (ZnO) thin films have been prepared on c-plane sapphire substrate by magnetron sputtering technique. The influence of deposition time on the structural, optical and photoluminescence properties of the films have been investigated. XRD patterns reveal the growth of preferentially oriented (101) non-polar a-plane ZnO film with hexagonal wurtzite structure. The PL peak shifts towards lower wavelength for deposition time up to 20 min, which is in consistent with the results obtained from UV absorption studies. The blue shift in the PL peak confirms the possibility for quantum confinement effect. The band gap energy of the film increases from 3.33 to 3.38 eV, indicating enhanced quantum confinement effects. FESEM micrographs showed that the films have a smooth and dense morphology with uniform grain growth. Hydrogen sensing measurements indicated that a-plane ZnO film on c-sapphire showed higher response than c-plane ZnO film reported earlier. The sensor response of 44 nm thick ZnO film exhibit highest response of 145 towards 500 ppm H₂ gas at the operating temperature of 200 °C.