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Measurement Techniques

Erschienen in:

01.07.2017 | NANOMETROLOGY

Method for Certification Monitoring of Surface Inhomogeneities of Optics Based on Frequency Analysis of the Surface Profile

verfasst von: D. G. Denisov, N. V. Baryshnikov, Ya. V. Gladysheva, V. E. Karasik, A. B. Morozov, V. E. Patrikeev

Erschienen in: Measurement Techniques | Ausgabe 2/2017

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Abstract

A method for determining the rms deviation of the heights of surface inhomogeneities based on an algorithm for calculating the spectral density of the one-dimensional correlation function over a wide range of spatial frequencies is developed and justified scientifically. The methodological errors of the algorithm are analyzed using experimental data from studies on a test stand under production conditions.

Vorheriger Artikel Modeling, Reproduction, and Mapping of Geofields with and Without Measurement Noise. Part 3. Integral Equation, Radial Grid, and Soft Computing Methods

Nächster Artikel Assessment of Surface Roughness Using Curvature Parameters of Peaks and Valleys of the Profile

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P. S. Baisden, L. J. Atherton, R. A. Hawley, et al., Large Optics for the National Ignition Facility, LNNL – TR-666625, Jan. 28, 2015, pp. 1–159.

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N. V. Baryshnikov, D. G. Denisov, V. E. Karasik, and A. A. Sakharov, “Method and apparatus for certification monitoring of the radii of curvature of spherical surfaces of optical components using a wave front sensor,” in: Proc. 5th Int. Conf. Photonics and Information Optics (2016), pp. 416–417.

A. N. Nikitin, A. V. Kudryashov, J. Sheldakova, et al., “Hartmannometer vs Fizeau interferometer: advantages and drawbacks,” Photonics West-2015: Proc. SPIE Conf. and Exhibitions, Feb. 7–12, 2015, San Francisco, USA, p. 9369-5.

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Titel: Method for Certification Monitoring of Surface Inhomogeneities of Optics Based on Frequency Analysis of the Surface Profile
verfasst von: D. G. Denisov
N. V. Baryshnikov
Ya. V. Gladysheva
V. E. Karasik
A. B. Morozov
V. E. Patrikeev
Publikationsdatum: 01.07.2017
Verlag: Springer US
Erschienen in: Measurement Techniques / Ausgabe 2/2017
Print ISSN: 0543-1972
Elektronische ISSN: 1573-8906
DOI: https://doi.org/10.1007/s11018-017-1160-0

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