Skip to main content
Erschienen in: Journal of Materials Science: Materials in Electronics 14/2018

22.05.2018

Microstructural evolution of Cu–Sn–Ni compounds in full intermetallic micro-joint and in situ micro-bending test

verfasst von: Liping Mo, Chaowei Guo, Zheng Zhou, Fengshun Wu, Changqing Liu

Erschienen in: Journal of Materials Science: Materials in Electronics | Ausgabe 14/2018

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

This study focuses on the microstructural evolution process of Cu–Sn–Ni intermetallic compounds (IMCs) interlayer in the micro-joints, formed from the initial Ni/Sn (1.5 µm)/Cu structure through transient liquid phase (TLP) soldering. Under the bonding temperature of 240 °C, the micro-joints evolve into Ni/(Cu, Ni)6Sn5/(Cu, Ni)3Sn/Cu structure, where the interfacial reactions on Cu/Sn and Sn/Ni are suppressed by the atoms diffusing from the opposite side. The thickness of (Cu, Ni)3Sn layer on plated Cu layer still increases with the prolonged dwell time. When the bonding temperature was elevated to 290 °C, the phase transformation of (Cu, Ni)6Sn5 into (Cu, Ni)3Sn has been accelerated, thus the majority of IMCs interlayer is constituted with (Cu, Ni)3Sn. However, a small amount of Ni-rich (Cu, Ni)6Sn5 phases still remain near the Ni substrate and some of them close to the center-line of IMCs interlayer. The state between (Cu, Ni)6Sn5 and the adjacent (Cu, Ni)3Sn tends to reach equilibrium in Ni content based on the observation from Transmission Electron Microscope (TEM). In addition, the Cu–Sn–Ni IMCs micro-cantilevers were fabricated from these micro-joints using Focus Ion Beam (FIB) for the in situ micro-bending test, the results indicate a high ultimate tensile strength as well as the brittle fracture in the inter- and trans-granular modes.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Springer Professional "Wirtschaft"

Online-Abonnement

Mit Springer Professional "Wirtschaft" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 340 Zeitschriften

aus folgenden Fachgebieten:

  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Versicherung + Risiko




Jetzt Wissensvorsprung sichern!

Literatur
1.
Zurück zum Zitat B. Lee, H. Jeon, K.-W. Kwon, H.-J. Lee, Employment of a bi-layer of Ni(P)/Cu as a diffusion barrier in a Cu/Sn/Cu bonding structure for three-dimensional interconnects. Acta Mater. 61, 6736–6742 (2013)CrossRef B. Lee, H. Jeon, K.-W. Kwon, H.-J. Lee, Employment of a bi-layer of Ni(P)/Cu as a diffusion barrier in a Cu/Sn/Cu bonding structure for three-dimensional interconnects. Acta Mater. 61, 6736–6742 (2013)CrossRef
2.
Zurück zum Zitat J.G. Duh, Interface reactions and phase equilibrium between Ni/Cu under-bump metallization and eutectic SnPb flip-chip solder bumps. J. Mater. Res. 18, 935–940 (2003)CrossRef J.G. Duh, Interface reactions and phase equilibrium between Ni/Cu under-bump metallization and eutectic SnPb flip-chip solder bumps. J. Mater. Res. 18, 935–940 (2003)CrossRef
3.
Zurück zum Zitat B. Lee, H. Jeon, S. Kim, K. Kwon, J.-W. Kim, H. Lee, Introduction of an electroless-plated Ni diffusion barrier in Cu/Sn/Cu bonding structures for 3D integration. J. Electrochem. Soc. 159, H85-H89 (2011) B. Lee, H. Jeon, S. Kim, K. Kwon, J.-W. Kim, H. Lee, Introduction of an electroless-plated Ni diffusion barrier in Cu/Sn/Cu bonding structures for 3D integration. J. Electrochem. Soc. 159, H85-H89 (2011)
4.
Zurück zum Zitat M.-H. Chan, Y.-C. Liao, C.-T. Lin, K.-W. Chuang, H.-N. Huang, C.-T. Yeh, W.-T. Tseng, J.-Y. Lai, Thermal cycling effect on intermetallic formation with various surface finish of micro bump interconnect for 3D package, IEEE 63rd Electronic Components and Technology Conference (ECTC), pp. 2163–2167 (2013) M.-H. Chan, Y.-C. Liao, C.-T. Lin, K.-W. Chuang, H.-N. Huang, C.-T. Yeh, W.-T. Tseng, J.-Y. Lai, Thermal cycling effect on intermetallic formation with various surface finish of micro bump interconnect for 3D package, IEEE 63rd Electronic Components and Technology Conference (ECTC), pp. 2163–2167 (2013)
5.
Zurück zum Zitat R. Labie, W. Ruythooren, J. Van Humbeeck, Solid state diffusion in Cu–Sn and Ni–Sn diffusion couples with flip-chip scale dimensions. Intermetallics 15, 396–403 (2007)CrossRef R. Labie, W. Ruythooren, J. Van Humbeeck, Solid state diffusion in Cu–Sn and Ni–Sn diffusion couples with flip-chip scale dimensions. Intermetallics 15, 396–403 (2007)CrossRef
6.
Zurück zum Zitat C. Liu, C. Ho, C. Peng, C.R. Kao, Effects of joining sequence on the interfacial reactions and substrate dissolution behaviors in Ni/Solder/Cu joints. J. Electron. Mater. 40, 1912–1920 (2011)CrossRef C. Liu, C. Ho, C. Peng, C.R. Kao, Effects of joining sequence on the interfacial reactions and substrate dissolution behaviors in Ni/Solder/Cu joints. J. Electron. Mater. 40, 1912–1920 (2011)CrossRef
7.
Zurück zum Zitat S.-W. Chen, S.-H. Wu, S.-W. Lee. Interfacial reactions in the Sn-(Cu)/Ni, Sn-(Ni)/Cu, and Sn/(Cu,Ni) systems. J. Electron. Mater. 32, 1188–1194 (2003)CrossRef S.-W. Chen, S.-H. Wu, S.-W. Lee. Interfacial reactions in the Sn-(Cu)/Ni, Sn-(Ni)/Cu, and Sn/(Cu,Ni) systems. J. Electron. Mater. 32, 1188–1194 (2003)CrossRef
8.
Zurück zum Zitat V. Vuorinen, T. Laurila, T. Mattila, E. Heikinheimo, J. Kivilahti, Solid-state reactions between Cu(Ni) alloys and Sn. J. Electron. Mater. 36, 1355–1362 (2007)CrossRef V. Vuorinen, T. Laurila, T. Mattila, E. Heikinheimo, J. Kivilahti, Solid-state reactions between Cu(Ni) alloys and Sn. J. Electron. Mater. 36, 1355–1362 (2007)CrossRef
9.
Zurück zum Zitat J.-W. Yoon, S.-W. Kim, S.-B. Jung, Interfacial reaction and mechanical properties of eutectic Sn–0.7Cu/Ni BGA solder joints during isothermal long-term aging. J. Alloys Compd. 391, 82–89 (2005)CrossRef J.-W. Yoon, S.-W. Kim, S.-B. Jung, Interfacial reaction and mechanical properties of eutectic Sn–0.7Cu/Ni BGA solder joints during isothermal long-term aging. J. Alloys Compd. 391, 82–89 (2005)CrossRef
10.
Zurück zum Zitat J.-W. Yoon, S.-W. Kim, S.-B. Jung, IMC morphology, interfacial reaction and joint reliability of Pb-free Sn–Ag–Cu solder on electrolytic Ni BGA substrate. J. Alloys Compd. 392, 247–252 (2005)CrossRef J.-W. Yoon, S.-W. Kim, S.-B. Jung, IMC morphology, interfacial reaction and joint reliability of Pb-free Sn–Ag–Cu solder on electrolytic Ni BGA substrate. J. Alloys Compd. 392, 247–252 (2005)CrossRef
11.
Zurück zum Zitat U. Schwingenschlögl, C. Di Paola, K. Nogita, C.M. Gourlay, The influence of Ni additions on the relative stability of η and η′Cu6Sn5. Appl. Phys. Lett. 96, 061908 (2010)CrossRef U. Schwingenschlögl, C. Di Paola, K. Nogita, C.M. Gourlay, The influence of Ni additions on the relative stability of η and η′Cu6Sn5. Appl. Phys. Lett. 96, 061908 (2010)CrossRef
12.
Zurück zum Zitat Y.Q. Wu, S.D. McDonald, J. Read, H. Huang, K. Nogita, Determination of the minimum Ni concentration to prevent the η to η4 + 1 polymorphic transformation of stoichiometric Cu6Sn5. Scripta Mater. 68, 595–598 (2013)CrossRef Y.Q. Wu, S.D. McDonald, J. Read, H. Huang, K. Nogita, Determination of the minimum Ni concentration to prevent the η to η4 + 1 polymorphic transformation of stoichiometric Cu6Sn5. Scripta Mater. 68, 595–598 (2013)CrossRef
13.
Zurück zum Zitat K. Nogita, D. Mu, S.D. McDonald, J. Read, Y.Q. Wu, Effect of Ni on phase stability and thermal expansion of Cu6–xNixSn5 (x = 0, 0.5, 1, 1.5 and 2). Intermetallics 26, 78–85 (2012)CrossRef K. Nogita, D. Mu, S.D. McDonald, J. Read, Y.Q. Wu, Effect of Ni on phase stability and thermal expansion of Cu6–xNixSn5 (x = 0, 0.5, 1, 1.5 and 2). Intermetallics 26, 78–85 (2012)CrossRef
14.
Zurück zum Zitat D. Mu, H. Huang, S.D. McDonald, J. Read, K. Nogita, Investigating the mechanical properties, creep and crack pattern of Cu6Sn5 and (Cu, Ni)6Sn5 on diverse crystal planes. Mater. Sci. Eng. A 566, 126–133 (2013)CrossRef D. Mu, H. Huang, S.D. McDonald, J. Read, K. Nogita, Investigating the mechanical properties, creep and crack pattern of Cu6Sn5 and (Cu, Ni)6Sn5 on diverse crystal planes. Mater. Sci. Eng. A 566, 126–133 (2013)CrossRef
15.
Zurück zum Zitat N. Bosco, F. Zok, Critical interlayer thickness for transient liquid phase bonding in the Cu–Sn system. Acta Mater. 52, 2965–2972 (2004)CrossRef N. Bosco, F. Zok, Critical interlayer thickness for transient liquid phase bonding in the Cu–Sn system. Acta Mater. 52, 2965–2972 (2004)CrossRef
16.
Zurück zum Zitat B.S. Lee, S.K. Hyun, J.W. Yoon, Cu–Sn and Ni–Sn transient liquid phase bonding for die-attach technology applications in high-temperature power electronics packaging. J. Mater. Sci.: Mater. Electron. 28, 7827–7833 (2017) B.S. Lee, S.K. Hyun, J.W. Yoon, Cu–Sn and Ni–Sn transient liquid phase bonding for die-attach technology applications in high-temperature power electronics packaging. J. Mater. Sci.: Mater. Electron. 28, 7827–7833 (2017)
17.
Zurück zum Zitat F. Gao, J. Qu, Calculating the diffusivity of Cu and Sn in Cu3Sn intermetallic by molecular dynamics simulations. Mater. Lett. 73, 92–94 (2012)CrossRef F. Gao, J. Qu, Calculating the diffusivity of Cu and Sn in Cu3Sn intermetallic by molecular dynamics simulations. Mater. Lett. 73, 92–94 (2012)CrossRef
18.
Zurück zum Zitat J.F. Li, P.A. Agyakwa, C.M. Johnson, Interfacial reaction in Cu/Sn/Cu system during the transient liquid phase soldering process. Acta Mater. 59, 1198–1211 (2011)CrossRef J.F. Li, P.A. Agyakwa, C.M. Johnson, Interfacial reaction in Cu/Sn/Cu system during the transient liquid phase soldering process. Acta Mater. 59, 1198–1211 (2011)CrossRef
19.
Zurück zum Zitat T.-T. Luu, A. Duan, K. Aasmundtveit, N. Hoivik. Optimized Cu–Sn wafer-level bonding using intermetallic phase characterization. J. Electron. Mater. 42, 3582–3592 (2013)CrossRef T.-T. Luu, A. Duan, K. Aasmundtveit, N. Hoivik. Optimized Cu–Sn wafer-level bonding using intermetallic phase characterization. J. Electron. Mater. 42, 3582–3592 (2013)CrossRef
20.
Zurück zum Zitat L. Mo, F. Wu, C. Liu. Growth kinetics of IMCs in Cu–Sn intermetallic joints during isothermal soldering process. 2015 IEEE 65th Electronic Components and Technology Conference (ECTC), pp. 1854–1858 (2015) L. Mo, F. Wu, C. Liu. Growth kinetics of IMCs in Cu–Sn intermetallic joints during isothermal soldering process. 2015 IEEE 65th Electronic Components and Technology Conference (ECTC), pp. 1854–1858 (2015)
21.
Zurück zum Zitat H. Yu, V. Vuorinen, J.K. Kivilahti, Solder/substrate interfacial reactions in the Sn–Cu–Ni interconnection system. J. Electron. Mater. 36, 136–146 (2007)CrossRef H. Yu, V. Vuorinen, J.K. Kivilahti, Solder/substrate interfacial reactions in the Sn–Cu–Ni interconnection system. J. Electron. Mater. 36, 136–146 (2007)CrossRef
22.
Zurück zum Zitat S. Fürtauer, D. Li, D. Cupid, H. Flandorfer. The Cu–Sn phase diagram. Part I: new experimental results. Intermetallics 34, 142–147 (2013)CrossRef S. Fürtauer, D. Li, D. Cupid, H. Flandorfer. The Cu–Sn phase diagram. Part I: new experimental results. Intermetallics 34, 142–147 (2013)CrossRef
23.
Zurück zum Zitat C. Schmetterer, H. Flandorfer, K.W. Richter, U. Saeed, M. Kauffman, P. Roussel, H. Ipser. A new investigation of the system Ni–Sn. Intermetallics 15, 869–884 (2007)CrossRef C. Schmetterer, H. Flandorfer, K.W. Richter, U. Saeed, M. Kauffman, P. Roussel, H. Ipser. A new investigation of the system Ni–Sn. Intermetallics 15, 869–884 (2007)CrossRef
24.
Zurück zum Zitat H.-C. Cheng, C.-F. Yu, W.-H. Chen. Strain- and strain-rate-dependent mechanical properties and behaviors of Cu3Sn compound using molecular dynamics simulation. J. Mater. Sci. 47, 3103–3114 (2012)CrossRef H.-C. Cheng, C.-F. Yu, W.-H. Chen. Strain- and strain-rate-dependent mechanical properties and behaviors of Cu3Sn compound using molecular dynamics simulation. J. Mater. Sci. 47, 3103–3114 (2012)CrossRef
Metadaten
Titel
Microstructural evolution of Cu–Sn–Ni compounds in full intermetallic micro-joint and in situ micro-bending test
verfasst von
Liping Mo
Chaowei Guo
Zheng Zhou
Fengshun Wu
Changqing Liu
Publikationsdatum
22.05.2018
Verlag
Springer US
Erschienen in
Journal of Materials Science: Materials in Electronics / Ausgabe 14/2018
Print ISSN: 0957-4522
Elektronische ISSN: 1573-482X
DOI
https://doi.org/10.1007/s10854-018-9293-8

Weitere Artikel der Ausgabe 14/2018

Journal of Materials Science: Materials in Electronics 14/2018 Zur Ausgabe

Neuer Inhalt