Ausgabe 2/2004
Inhalt (12 Artikel)
Multi-height micro structures in poly(dimethyl siloxane) lab-on-a-chip
S. Chung, J. Park, C. Chung, D. C. Han, J. K. Chang
Characterization and failure analysis of MEMS: high resolution optical investigation of small out-of-plane movements and fast vibrations
W. Merlijn van Spengen, R. Puers, R. Mertens, Ingrid De Wolf
Trench filling characteristics of low stress TEOS/ozone oxide deposited by PECVD and SACVD
C. Chang, T. Abe, M. Esashi
Effect of disk rotational speed on contamination particles generated in a hard disk drive
D. Y. Lee, J. Hwang, G. N. Bae
A novel design and microfabrication for a micro PEMFC
S.-S. Hsieh, J.-K. Kuo, C.-F. Hwang, H.-H. Tsai
Flexible tooling for localized electrochemical deposition with wire-electrodischarge grinding
J. H. Choo, S. H. Yeo, F. F. Tan
Piezoelectric thin films formed by MOD on cantilever beams for micro sensors and actuators
T. Cui, D. Markus, S. Zurn, D. L. Polla
Design and fabrication of high sensitive microphone diaphragm using deep corrugation technique
W. J. Wang, R. M. Lin, Y. Ren
Development of a micro-opto-mechanical accelerometer based on intensity modulation
S. J. Lee, D.-W. Cho