Ausgabe 3/2011
Inhalt (20 Artikel)
A MEMS nano-extensometer with integrated de-amplification mechanism
A. Ya’akobovitz, S. Krylov, Y. Hanein
An effective method to obtain commutation positions in BLDC drive mode
Song Lin, Chao Bi, Quan Jiang
Design and optimization of parylene nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensing
Qinglong Zheng, Yong Xu
Low cost fabrication of microelectrodes on plastic substrate
Yan Xu, Long-Biao Huang, Kai-Leung Yung, Yun-Chuan Xie, Thomas Ming-Hung Lee
A three-phased circular electrode array for electro-osmotic microfluidic pumping
Kongying Xie, Yongjun Lai, Xin Guo, Rob J. Campbell
Low resistive silicon substrate as an etch-stop layer for drilling thick SiO2 by spark assisted chemical engraving (SACE)
Jayan Ozhikandathil, Andrew Morrison, Muthukumaran Packirisamy, Rolf Wüthrich
Effect of substrate–target distance and sputtering pressure in the synthesis of AlN thin films
G. F. Iriarte, J. G. Rodriguez, F. Calle
Numerical modeling of a novel degradable drug delivery system with microholes
Yang Gao, Tianning Chen, Xiaopeng Wang
Planarization of patterned magnetic recording media to enable head flyability
Chulmin Choi, Yeoungchin Yoon, Daehoon Hong, Young Oh, Frank E. Talke, Sungho Jin
A polymer-based bidirectional micropump driven by a PZT bimorph
Yi Luo, Miao Lu, Tianhong Cui
Micromachined W-band polymeric tunable iris filter
Firas Sammoura, Liwei Lin
Multi frequency interrogation of polypyrrole based gas sensors for organic vapors
Chintan M. Bhatt, Nagaraju Jampana
Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage
L. A. Rocha, R. A. Dias, E. Cretu, L. Mol, R. F. Wolffenbuttel
Parylene-based implantable Pt-black coated flexible 3-D hemispherical microelectrode arrays for improved neural interfaces
Yuefeng Rui, Jingquan Liu, Yajun Wang, Chunsheng Yang
Soft lithography replication based on PDMS partial curing
Hongbin Yu, Guangya Zhou, Fook Siong Chau, Sujeet K. Sinha
New methacrylate-based feedstock systems for micro powder injection moulding
Thomas Hanemann, Kirsten Honnef, Tobias Müller, Oxana Weber
Advancements in technology and design of NEMS vector hydrophone
Linggang Guan, Chenyang Xue, Guojun Zhang, Wendong Zhang, Panpan Wang
Microchannel miter bend effects on pressure equalization and vortex formation
S. Taniselass, V. Retnasamy, P. Poopalan
Preliminary evaluation of the influence of the temperature on the performance of a piezoresistive pressure sensor based on a-SiC film
M. A. Fraga, M. Massi, H. Furlan, I. C. Oliveira, L. A. Rasia, C. F. R. Mateus