Ausgabe 3/2011
Inhalt (20 Artikel)
A MEMS nano-extensometer with integrated de-amplification mechanism
- Technical Paper
A. Ya’akobovitz, S. Krylov, Y. Hanein
An effective method to obtain commutation positions in BLDC drive mode
- Technical Paper
Song Lin, Chao Bi, Quan Jiang
Design and optimization of parylene nanomechanical cantilevers with integrated piezoresistors for surface-stress based biochemical sensing
- Technical Paper
Qinglong Zheng, Yong Xu
Low cost fabrication of microelectrodes on plastic substrate
- Technical Paper
Yan Xu, Long-Biao Huang, Kai-Leung Yung, Yun-Chuan Xie, Thomas Ming-Hung Lee
A three-phased circular electrode array for electro-osmotic microfluidic pumping
- Technical Paper
Kongying Xie, Yongjun Lai, Xin Guo, Rob J. Campbell
Low resistive silicon substrate as an etch-stop layer for drilling thick SiO2 by spark assisted chemical engraving (SACE)
- Technical Paper
Jayan Ozhikandathil, Andrew Morrison, Muthukumaran Packirisamy, Rolf Wüthrich
Effect of substrate–target distance and sputtering pressure in the synthesis of AlN thin films
- Technical Paper
G. F. Iriarte, J. G. Rodriguez, F. Calle
Numerical modeling of a novel degradable drug delivery system with microholes
- Technical Paper
Yang Gao, Tianning Chen, Xiaopeng Wang
Planarization of patterned magnetic recording media to enable head flyability
- Open Access
- Technical Paper
Chulmin Choi, Yeoungchin Yoon, Daehoon Hong, Young Oh, Frank E. Talke, Sungho Jin
A polymer-based bidirectional micropump driven by a PZT bimorph
- Technical Paper
Yi Luo, Miao Lu, Tianhong Cui
Micromachined W-band polymeric tunable iris filter
- Open Access
- Technical Paper
Firas Sammoura, Liwei Lin
Multi frequency interrogation of polypyrrole based gas sensors for organic vapors
- Technical Paper
Chintan M. Bhatt, Nagaraju Jampana
Auto-calibration of capacitive MEMS accelerometers based on pull-in voltage
- Technical Paper
L. A. Rocha, R. A. Dias, E. Cretu, L. Mol, R. F. Wolffenbuttel
Parylene-based implantable Pt-black coated flexible 3-D hemispherical microelectrode arrays for improved neural interfaces
- Technical Paper
Yuefeng Rui, Jingquan Liu, Yajun Wang, Chunsheng Yang
Soft lithography replication based on PDMS partial curing
- Technical Paper
Hongbin Yu, Guangya Zhou, Fook Siong Chau, Sujeet K. Sinha
New methacrylate-based feedstock systems for micro powder injection moulding
- Technical Paper
Thomas Hanemann, Kirsten Honnef, Tobias Müller, Oxana Weber
Advancements in technology and design of NEMS vector hydrophone
- Technical Paper
Linggang Guan, Chenyang Xue, Guojun Zhang, Wendong Zhang, Panpan Wang
Microchannel miter bend effects on pressure equalization and vortex formation
- Technical Paper
S. Taniselass, V. Retnasamy, P. Poopalan
Preliminary evaluation of the influence of the temperature on the performance of a piezoresistive pressure sensor based on a-SiC film
- Technical Paper
M. A. Fraga, M. Massi, H. Furlan, I. C. Oliveira, L. A. Rasia, C. F. R. Mateus