Skip to main content
Erschienen in: Journal of Computational Electronics 3/2018

30.04.2018

Novel design for performance enhancement of a touch-mode capacitive pressure sensor: theoretical modeling and numerical simulation

verfasst von: M. Aditya Varma, Sumit Kumar Jindal

Erschienen in: Journal of Computational Electronics | Ausgabe 3/2018

Einloggen

Aktivieren Sie unsere intelligente Suche, um passende Fachinhalte oder Patente zu finden.

search-config
loading …

Abstract

Capacitive pressure sensors have undergone a multitude of design modifications to improve their performance for various applications. This paper aims to add a novel feature to increase the capacitance generated by using a convex dome-shaped substrate electrode. The paper provides in-depth mathematical and analytical modeling that supports the proposed design. The results indicate a significant improvement in capacitance, touch-mode range, and linearity for the touch-mode capacitive pressure sensor.

Sie haben noch keine Lizenz? Dann Informieren Sie sich jetzt über unsere Produkte:

Springer Professional "Wirtschaft+Technik"

Online-Abonnement

Mit Springer Professional "Wirtschaft+Technik" erhalten Sie Zugriff auf:

  • über 102.000 Bücher
  • über 537 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Maschinenbau + Werkstoffe
  • Versicherung + Risiko

Jetzt Wissensvorsprung sichern!

Springer Professional "Technik"

Online-Abonnement

Mit Springer Professional "Technik" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 390 Zeitschriften

aus folgenden Fachgebieten:

  • Automobil + Motoren
  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Elektrotechnik + Elektronik
  • Energie + Nachhaltigkeit
  • Maschinenbau + Werkstoffe




 

Jetzt Wissensvorsprung sichern!

Springer Professional "Wirtschaft"

Online-Abonnement

Mit Springer Professional "Wirtschaft" erhalten Sie Zugriff auf:

  • über 67.000 Bücher
  • über 340 Zeitschriften

aus folgenden Fachgebieten:

  • Bauwesen + Immobilien
  • Business IT + Informatik
  • Finance + Banking
  • Management + Führung
  • Marketing + Vertrieb
  • Versicherung + Risiko




Jetzt Wissensvorsprung sichern!

Literatur
1.
Zurück zum Zitat Hsu, T.R.: MEMS and Microsystems Design and Manufacture. Tata Mc-Graw Hill, New Delhi (2002) Hsu, T.R.: MEMS and Microsystems Design and Manufacture. Tata Mc-Graw Hill, New Delhi (2002)
2.
Zurück zum Zitat Beeby, S., Kraft, M.: Mechanical sensors. Artech House (2004) Beeby, S., Kraft, M.: Mechanical sensors. Artech House (2004)
3.
Zurück zum Zitat Eaton, W.P., Smith, J.H.: Micromachined pressure sensors: review and recent developments. Smart Mater. Struct. 6(5), 530–539 (1997)CrossRef Eaton, W.P., Smith, J.H.: Micromachined pressure sensors: review and recent developments. Smart Mater. Struct. 6(5), 530–539 (1997)CrossRef
4.
Zurück zum Zitat Bao, M.: Analysis and Design Principles of MEMS Devices. Elsevier, Amsterdam (2005) Bao, M.: Analysis and Design Principles of MEMS Devices. Elsevier, Amsterdam (2005)
5.
Zurück zum Zitat Jindal, S.K., Raghuwanshi, S.K.: A complete analytical model for circular diaphragm pressure sensor for freely supported edge. Microsyst. Technol. 21(5), 1073–1079 (2014)CrossRef Jindal, S.K., Raghuwanshi, S.K.: A complete analytical model for circular diaphragm pressure sensor for freely supported edge. Microsyst. Technol. 21(5), 1073–1079 (2014)CrossRef
6.
Zurück zum Zitat Ko, W.H.: Future of sensors and actuators systems. Sens. Actuators A 56, 193–197 (1996)CrossRef Ko, W.H.: Future of sensors and actuators systems. Sens. Actuators A 56, 193–197 (1996)CrossRef
7.
Zurück zum Zitat Bakhoum, E.G., Cheng, M.H.M.: Capacitive pressure sensor with very large dynamic range. IEEE Trans. Compon. Packag. Technol. 33(1), 79–83 (2010)CrossRef Bakhoum, E.G., Cheng, M.H.M.: Capacitive pressure sensor with very large dynamic range. IEEE Trans. Compon. Packag. Technol. 33(1), 79–83 (2010)CrossRef
8.
Zurück zum Zitat Wang, Q., Ko, W.H.: Modelling of touch mode capacitive sensors and diaphragms. Sens. Actuators: A 75, 230–241 (1999)CrossRef Wang, Q., Ko, W.H.: Modelling of touch mode capacitive sensors and diaphragms. Sens. Actuators: A 75, 230–241 (1999)CrossRef
9.
Zurück zum Zitat Ko, W.H., Wang, Q.: Touch mode capacitive pressure sensors. Sens. Actuators: A 75, 242–251 (1999)CrossRef Ko, W.H., Wang, Q.: Touch mode capacitive pressure sensors. Sens. Actuators: A 75, 242–251 (1999)CrossRef
10.
Zurück zum Zitat Han, J., Shannon, M.A.: Smooth contact capacitive pressures sensors in touch ad peeling mode operation. IEEE Sens. J. 9(3), 199–206 (2009)CrossRef Han, J., Shannon, M.A.: Smooth contact capacitive pressures sensors in touch ad peeling mode operation. IEEE Sens. J. 9(3), 199–206 (2009)CrossRef
11.
Zurück zum Zitat Gupta, A., Singh, R., Ahmad, A.: A capacitive pressure sensor for MEMS. Proc. SPIE 5062, 450–454 (2003)CrossRef Gupta, A., Singh, R., Ahmad, A.: A capacitive pressure sensor for MEMS. Proc. SPIE 5062, 450–454 (2003)CrossRef
12.
Zurück zum Zitat Daigle, M., Corcus, J., We, K.: An analytical solution to circular touch mode capacitor. IEEE Sens. J. 7(4), 502–505 (2007)CrossRef Daigle, M., Corcus, J., We, K.: An analytical solution to circular touch mode capacitor. IEEE Sens. J. 7(4), 502–505 (2007)CrossRef
13.
Zurück zum Zitat Fragiacomo, G., Ansbeak, T., Pedersen, T., Hansen, O., Thomsen, E.V.: Analysis of small deflection touch mode behaviour in capacitive pressure sensor. Sens. Actuators: A 161, 114–119 (2010)CrossRef Fragiacomo, G., Ansbeak, T., Pedersen, T., Hansen, O., Thomsen, E.V.: Analysis of small deflection touch mode behaviour in capacitive pressure sensor. Sens. Actuators: A 161, 114–119 (2010)CrossRef
14.
Zurück zum Zitat Jindal, S.K., Mahajan, A., Raghuwanshi, S.K.: A complete analytical model for clamped edge circular diaphragm non-touch and touch mode capacitive pressure sensor. Microsyst. Technol. 22(5), 1143–1150 (2015)CrossRef Jindal, S.K., Mahajan, A., Raghuwanshi, S.K.: A complete analytical model for clamped edge circular diaphragm non-touch and touch mode capacitive pressure sensor. Microsyst. Technol. 22(5), 1143–1150 (2015)CrossRef
15.
Zurück zum Zitat Lv, H., Guo, Q., Hu, G.: A touch mode capacitive pressure sensor with long linear range and high sensitivity. In: Proceedings of the 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, pp. 796–800 (2008) Lv, H., Guo, Q., Hu, G.: A touch mode capacitive pressure sensor with long linear range and high sensitivity. In: Proceedings of the 3rd IEEE International Conference on Nano/Micro Engineered and Molecular Systems, pp. 796–800 (2008)
16.
Zurück zum Zitat Jindal, S.K., Raghuwanshi, S.K.: Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modeling and simulation. Microsyst. Technol. 23(1), 135–142 (2017)CrossRef Jindal, S.K., Raghuwanshi, S.K.: Capacitance and sensitivity calculation of double touch mode capacitive pressure sensor: theoretical modeling and simulation. Microsyst. Technol. 23(1), 135–142 (2017)CrossRef
17.
Zurück zum Zitat Xu, G., Guangwen, C., Guoquing, H.: A surface micro machined double sided touch mode capacitive pressure sensor. SPIE 4601, 25–30 (2001) Xu, G., Guangwen, C., Guoquing, H.: A surface micro machined double sided touch mode capacitive pressure sensor. SPIE 4601, 25–30 (2001)
18.
Zurück zum Zitat Jindal, S.K., Raghuwanshi, S.K.: Analytical comparison of circular diaphragm based simple, single and double touch Mode–MEMS capacitive pressure sensor. In: Proceedings of International Conference on Communication Systems, pp. 020018(1-8) (2015) Jindal, S.K., Raghuwanshi, S.K.: Analytical comparison of circular diaphragm based simple, single and double touch Mode–MEMS capacitive pressure sensor. In: Proceedings of International Conference on Communication Systems, pp. 020018(1-8) (2015)
19.
Zurück zum Zitat Bustillo, J. M., Howe, R. T., Muller, R. S.: Surface micromachining for microelectromechanical systems. Proc. IEEE 86(8) (1998) Bustillo, J. M., Howe, R. T., Muller, R. S.: Surface micromachining for microelectromechanical systems. Proc. IEEE 86(8) (1998)
20.
Zurück zum Zitat Azimi, S., Breese, M.B.H., Dang, Z.Y., Yan, Y., Ow, Y.S., Bettiol, A.A.: Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation. J. Micromech. Microeng. 015015 (9pp) (2012) Azimi, S., Breese, M.B.H., Dang, Z.Y., Yan, Y., Ow, Y.S., Bettiol, A.A.: Fabrication of complex curved three-dimensional silicon microstructures using ion irradiation. J. Micromech. Microeng. 015015 (9pp) (2012)
21.
Zurück zum Zitat Waits, C.M., Morgan, B., Kastantin, M., Ghodssi, R.: Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching. Sens. Actuators: A, pp. 245–253 (2005) Waits, C.M., Morgan, B., Kastantin, M., Ghodssi, R.: Microfabrication of 3D silicon MEMS structures using gray-scale lithography and deep reactive ion etching. Sens. Actuators: A, pp. 245–253 (2005)
22.
Zurück zum Zitat Timoshenko, S.P., Woinkowsky-Krieger, S.: Theory of Plates and Shells, 2nd edn. McGraw-Hill, New York (1959) Timoshenko, S.P., Woinkowsky-Krieger, S.: Theory of Plates and Shells, 2nd edn. McGraw-Hill, New York (1959)
23.
Zurück zum Zitat Rochus, V., Wang, B., Tilmans, H.A.C., Chaudhuri, A. Ray, Helin, P., Severi, S., Rottenberg, X.: Fast analytical design of MEMS capacitive pressure sensors with sealed cavities. Mechatronics (2016) Rochus, V., Wang, B., Tilmans, H.A.C., Chaudhuri, A. Ray, Helin, P., Severi, S., Rottenberg, X.: Fast analytical design of MEMS capacitive pressure sensors with sealed cavities. Mechatronics (2016)
Metadaten
Titel
Novel design for performance enhancement of a touch-mode capacitive pressure sensor: theoretical modeling and numerical simulation
verfasst von
M. Aditya Varma
Sumit Kumar Jindal
Publikationsdatum
30.04.2018
Verlag
Springer US
Erschienen in
Journal of Computational Electronics / Ausgabe 3/2018
Print ISSN: 1569-8025
Elektronische ISSN: 1572-8137
DOI
https://doi.org/10.1007/s10825-018-1174-0

Weitere Artikel der Ausgabe 3/2018

Journal of Computational Electronics 3/2018 Zur Ausgabe

Neuer Inhalt