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Journal of Electronic Materials
Erschienen in: Journal of Electronic Materials 9/2022

12.06.2022 | Original Research Article

Photoactive Copper-Doped Zinc Stannate Thin Films for Ultraviolet–Visible Light Photodetector

verfasst von: Ching-Tai Fu, Chia-Tung Kuo, Chong-Chi Chi, Lu-Cheng Hou, Chao-I Liu, Shu-Chih Chang, Yuan-Mau Lee, Yu-Hsuan Chuang, Tri-Rung Yew

Erschienen in: Journal of Electronic Materials | Ausgabe 9/2022

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Abstract

A photodetector capable of detecting light illuminations ranging from ultraviolet (UV) to visible light spectrum using earth-abundant and environmentally friendly Cu-doped zinc tin oxide (Cu-doped ZTO) thin films is reported. Trilayer photodetector devices comprising P+-Si/10 at.% Cu-doped-ZTO-thin-film/indium-tin-oxide were successfully fabricated using radio-frequency (RF) magnetron sputtering. Optical and photoconductive characteristics of trilayer photodetector devices were investigated. The devices were found to exhibit superior photodetection capabilities, including high sensitivities of 1147 and 758, under 630-nm and 352-nm light illumination, respectively, and corresponding fast photoresponse times with a rise-time/fall-time of 8.9 ms/8.0 ms and 8.8 ms/8.0 ms. The induced mid-gap states from the Cu-dopant contributed extensively to the photoresponse through stable optical transitions. Air-annealing the Cu-ZTO thin films at 600°C effectively reduced the dark current, enabling Cu-ZTO thin films suitable for UV–visible light, wide spectral photodetector applications.
Vorheriger Artikel Defect Engineering in MBE-Grown CdTe Buffer Layers on GaAs (211)B Substrates
Nächster Artikel SiC Material in Si-LDMOS Transistors by Controlling Mismatching at Their Interfaces

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Metadaten
Titel
Photoactive Copper-Doped Zinc Stannate Thin Films for Ultraviolet–Visible Light Photodetector
verfasst von
Ching-Tai Fu
Chia-Tung Kuo
Chong-Chi Chi
Lu-Cheng Hou
Chao-I Liu
Shu-Chih Chang
Yuan-Mau Lee
Yu-Hsuan Chuang
Tri-Rung Yew
Publikationsdatum
12.06.2022
Verlag
Springer US
Erschienen in
Journal of Electronic Materials / Ausgabe 9/2022
Print ISSN: 0361-5235
Elektronische ISSN: 1543-186X
DOI
https://doi.org/10.1007/s11664-022-09709-1

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