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Microsystem Technologies
Erschienen in: Microsystem Technologies 10/2015

01.10.2015 | Review Paper

Research development of silicon MEMS gyroscopes: a review

verfasst von: Guo Zhanshe, Cheng Fucheng, Li Boyu, Cao Le, Lu Chao, Song Ke

Erschienen in: Microsystem Technologies | Ausgabe 10/2015

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Abstract

Micro-electromechenical Systems (MEMS) gyroscope is widely used in many occasions to measure the angular speed of the moving objects and attracts the attentions of many research institutions all over the world. This kind of sensor possesses the advantages of high degree of integration, low cost and consumption of power. This paper first introduces the research development of silicon MEMS gyroscope since eighties of last century; the researches of many institutions such as Draper Laboratory and UC Berkeley are mentioned and different design principles, control methods and structures are presented. This review then presents the key theories and technologies of the sensor and some research results of them. In additional, some recent new applications of MEMS gyroscope are also been introduced in this paper such as wearable motion capture system and micro inertial measurement unit. Finally, according to the review, some views of silicon MEMS gyroscope and its future prospects are put forwarded.
Vorheriger Artikel RF-MEMS: an enabling technology for modern wireless systems bearing a market potential still not fully displayed
Nächster Artikel Droplet generation and evaporative cooling using micro piezoelectric actuators with ring-surrounded circular nozzles

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Metadaten
Titel
Research development of silicon MEMS gyroscopes: a review
verfasst von
Guo Zhanshe
Cheng Fucheng
Li Boyu
Cao Le
Lu Chao
Song Ke
Publikationsdatum
01.10.2015
Verlag
Springer Berlin Heidelberg
Erschienen in
Microsystem Technologies / Ausgabe 10/2015
Print ISSN: 0946-7076
Elektronische ISSN: 1432-1858
DOI
https://doi.org/10.1007/s00542-015-2645-x

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