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Shape Memory and Superelasticity
Erschienen in: Shape Memory and Superelasticity 1/2018

29.12.2017 | SPECIAL ISSUE: A TRIBUTE TO PROF. SHUICHI MIYAZAKI – FROM FUNDAMENTALS TO APPLICATIONS, INVITED PAPER

SMA Foils for MEMS: From Material Properties to the Engineering of Microdevices

verfasst von: Manfred Kohl, Hinnerk Ossmer, Marcel Gueltig, Christof Megnin

Erschienen in: Shape Memory and Superelasticity | Ausgabe 1/2018

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Abstract

In the early nineties, microelectromechanical systems (MEMS) technology has been still in its infancy. As silicon (Si) is not a transducer material, it was clear at the very beginning that mechanically active materials had to be introduced to MEMS in order to enable functional microdevices with actuation capability beyond electrostatics. At that time, shape memory alloys (SMAs) have been available in bulk form, mainly as SMA wires and SMA plates. On the macro scale, these materials show highest work densities compared to other actuation principles in the order of 107 J/m3, which stimulated research on the integration of SMA to MEMS. Subsequently, two approaches for producing planar materials have been initiated (1) magnetron sputtering of SMA thin films and (2) the integration of rolled SMA foils, which both turned out to be very successful creating a paradigm change in microactuation technology. The following review covers important milestones of the research and development of SMA foil-based microactuators including materials characterization, design engineering, technology, and demonstrator development as well as first commercial products.
Vorheriger Artikel Electrochemical Properties of Si Film Electrodes Containing TiNi Thin-Film Current Collectors
Nächster Artikel Loading Path and Control Mode Effects During Thermomechanical Cycling of Polycrystalline Shape Memory NiTi

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Metadaten
Titel
SMA Foils for MEMS: From Material Properties to the Engineering of Microdevices
verfasst von
Manfred Kohl
Hinnerk Ossmer
Marcel Gueltig
Christof Megnin
Publikationsdatum
29.12.2017
Verlag
Springer International Publishing
Erschienen in
Shape Memory and Superelasticity / Ausgabe 1/2018
Print ISSN: 2199-384X
Elektronische ISSN: 2199-3858
DOI
https://doi.org/10.1007/s40830-017-0144-x

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