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Optical and Quantum Electronics

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01.02.2021

Superior control for physical properties of sputter deposited ITO thin-films proper for some transparent solar applications

verfasst von: Mohamed Fikry, Mohamed Mohie, Menna Gamal, Ahmed Ibrahim, Gehad Genidy

Erschienen in: Optical and Quantum Electronics | Ausgabe 2/2021

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Abstract

Superior control of sputtering deposition of ITO thin-films to enhance the physical properties of the ITO thin-films has been investigated. The effect of different sputter deposition conditions and the thermal post-annealing on the physical properties of the transparent-conductive indium tin oxide (ITO) thin-films deposited on a glass substrate have been studied. The power varied from 20 to 210 W with argon (Ar) gas flowing at a rate from 20 to 80 sccm. Thermal post-annealing of deposited thin-films at 200–450 °C in vacuum and air has been carried out as well. The physical properties were monitored using XRD, STM, four-point probe electrometer, and UV–Vis spectrometer. The change of the Ar flow rates influences the deposited films surface roughness, electrical sheet resistance (R_s), average optical transmittance (T_avg) with no apparent change in the morphology fractal dimension. At the Ar flow rate of 30 sccm and the critical power of 120 W, the deposited thin-films transform from amorphous to semi-crystalline structure mostly up 170 W. Optimal thin-films with fairly the highest T_avg at 97.7% and good R_s with 158.3 Ω/sq could be obtained under a residual Ar gas flow rate of 50 sccm and at 20 W. The critical post-annealing temperature at 350 ℃ (air) and 450 °C (vacuum) could initiate the semi-crystalline structure of the previously amorphous deposited thin-films. For the first time, ITO thin-films with T_avg and T_max up to 97.7% and 99.9% respectively have been achieved. Besides, the R_s value is controlled from 6 to 3981 Ω/sq with excellent average transparency. These prove viable candidates in transparent solar applications.

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Titel: Superior control for physical properties of sputter deposited ITO thin-films proper for some transparent solar applications
verfasst von: Mohamed Fikry
Mohamed Mohie
Menna Gamal
Ahmed Ibrahim
Gehad Genidy
Publikationsdatum: 01.02.2021
Verlag: Springer US
Erschienen in: Optical and Quantum Electronics / Ausgabe 2/2021
Print ISSN: 0306-8919
Elektronische ISSN: 1572-817X
DOI: https://doi.org/10.1007/s11082-021-02770-w

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